Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

(V) D-Y7W(V) D-Y7BAL D-P5DW 13 13 13 12 12 13 10 12 10 12 12 12 11 11.5 9 11.5 9.5 9.5 9.5 14 14 14 15 15.5 CUJ 6 9 9 8.5 6.5 6.5 7 5.5 6 6 5.5 5 6 CU CQS 5.5 6.5 5.5 6.5 5.5 5.5 CQM CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 11.5 11.5 11.5 12 12 RQ

Compact Cylinder

16 20 25 32 40 50 63 80 100 D-A9l(V) 7.5 9.5 9.5 9 9 D-M9l(V) D-M9lW(V) D-M9lA(V)L 5 5 5 3.5 5.5 5.5 6 6.5 7 7 D-A7l(H)(C) D-A80l(H)(C) 10 12 12 12 12 11 10 12 12 13 D-A79W 13 13 13 13 13 14 14 16 15 17 D-F7l(V) D-J79(C) D-F7lW(V) D-F7BA(V)L D-F7NTL D-F79F 5.5 6 5.5 5 6 6 6 6.5 6.5 7 D-P4DWL 5 5 5 5 5.5 Values which include hysteresis are for guideline purposes only, they are not a guarantee

NCQ2/CQ2

16 20 25 32 40 50 63 80 100 D-A9 (V) 7.5 9.5 9 9 9.5 9.5 8.5 11 10 10.5 D-M9 (V) D-M9 W(V) D-M9 A(V)L 3.5 5 5 5 5.5 5.5 6 6.5 7 7 D-A7 (H)(C) D-A80 (H)(C) 10 12 12 12 12 11 10 12 12 13 D-A79W 13 13 13 13 13 14 14 16 15 17 D-F7 (V) D-J79(C) D-F7 W(V) D-F7BA(V)L D-F7NTL D-F79F 5.5 6 5.5 5 6 6 6 6.5 6.5 7 D-P4DWL 5 5 5 5 5.5 Values which include hysteresis are for guideline purposes only, they

Series VQ Metal Seal/Rubber Seal Body Ported

0.5MPa Load factor 50% Piping length 5m Speed controller: AS3000F-08 (S=10mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-08 (S=10mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 8 14.6 (0.81) VQ2000 (Metal seal) 8 16.2 (0.90) VQ2001 (Rubber seal) 1.10-6 VQ0 Body Ported

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Mass (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Metric size Unrestricted 360 piping tube mounting.

CQ2

16 Bore size (mm) Both ends tapped 20 25 32 40 50 63 80 2 45 2 6 6 6 6 6 19 45 Male thread 3 350 6 12 24 52 54 106 106 240 Rod end male thread Nut 2 232 4 8 16 34 34 64 64 98 Rubber bumper 0 57 0 2 2 3 7 12 20 34 One-touch fitting 12 12 21 21 Foot (including bolt) 1117 57 71 170 195 159 171 267 349 735 Mounting Bolt for CQ2WB Flange (including bolt) 1056 1365 57 69 139 161 180 214 373 559

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171 (6) (13) ZPn3 10 12 10 12 10 12 ,'6.5) (6) : (13) (6.5) (6) ' :13) 1 1 6.5) (6) (13) II . 13 (7) (7) (13) ZPn6 I ZPT20 IS 26 15 26 15 15 15 16 .

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Flow Rate and Sonic Conductance Model AS1002FS AS2002FSAS2052FS AS3002FS AS4002FS Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Tubing O.D.

VQ4000

Rc 1/4: Rc 1/4 thread C8: One-touch fitting for 8 Rc 3/8: Rc 3/8 thread Note) C10: One-touch fitting for 10 2(4)-G 1/2 C12: One-touch fitting for 12 (Conduit port) U side 3.5 163 130 44 62 95 When U side mounting (S) 6 6 73 When D side mounting (SD) 15 35.5 X 12 X 12 n B A 8 2 4 MODEL SQ (SI No.EX124-SDN1) B A TM 4632 MOD/NET PWR 1 7 SETTINGS 2 4 Manual override B A 6 4 2 B A A B 5 SMC

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 0 1 Meter-out Meter-in 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 23 04 06 08 10 12 4 6 8 10 12 With One-touch fitting Stainless steel specifications (SUS303) Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Use 1/8" tube.

Fluoropolymer Piping Equipment

6 x 4 8 x 6 10 x 8 6 x 4 8 x 6 6 x 4 12 x 10 10 x 8 10 x 8 12 x 10 6 x 4 6 x 4 3 x 2 12 x 10 12 x 10 10 x 8 8 x 6 6 x 4 19 x 16 19 x 16 12 x 10 10 x 8 19 x 16 19 x 16 19 x 16 12 x 10 6 x 4 4 x 3 3 x 2 19 x 16 12 x 10 10 x 8 8 x 6 25 x 22 25 x 22 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 25 x 22 25 x 22 19 x 16 19 x 16 12 x 10 6 x 4 25 x 22 25 x 22 25 x 22 LQ1T31-R4 LQ1T31-R7 LQ1T31-R8 LQ1T32

Series SV

-59-2A SV1000-59-1A 10 SV1000 A L D Applicable fitting size d Model SX3000-77-1A SX3000-77-1A 16 KQ2P-04 16 32 6 4 SV2000-59-2A SV2000-59-1A 10 SV2000 KQ2P-06 18 35 8 6 SV2000-59-3A SV2000-59-3A 16 KQ2P-08 20.5 39 10 8 SV3000-59-1A SV3000-59-1A 10 SV3000 KQ2P-10 22 43 12 10 SY9000-61-2A SY9000-61-2A 10 SV4000 KQ2P-12 24 44.5 14 12 1mm2 = 1in = 25.4mm KQ2P-01 16 31.5 5 1/8" Manifold Specification

Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

0.

Blanking plug KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 L Dimensions (mm) A Applicable fitting size d Model A L D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 D L DIN rail AXT100-DR-l 7.5 As for l, enter the number from the DIN rail dimensions table.

Compact

$lid8 $crul{ Tyfr LXFHSSfI EE r4iil & *l t30omm) Thread I Deep [ ] shows lhe location at which origin poinl switch operales. hwPmfile tlDD|niD Acilaton wiflr$uiiles $enies t)(P Specif ications Brake specifications 9troke (mm) 50, 75, '100, 125,150,175,200 Motor 2-phase stepping motor s-phase steppang motor Screw (mm) 08, Lead 6 08, Lead 12 @8.

VQ5000

240 260 12 568 588 4 240 260 12 568 588 5 281 301 5 281 301 3 199 219 11 527 547 3 199 219 11 527 547 6 322 342 6 322 342 7 363 383 7 363 383 8 404 424 L1 L2 8 404 424 L1 L2 n: Stations (12 stations max.) n: Stations (12 stations max.) 37 Series VQ5000 Base Mounted Type Option Specifications External pilot specifications International thread standards other than Rc Rc specifications are

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Applicable cylinder bore size (mm) Model Metric size Inch size ASP 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS1001F 6, 10, 16, 20 ASN AS2001F 20, 25, 32 AS2051F 20, 25, 32, 40 AQ AS3001F 40, 50, 63 ASV AS4001F 63, 80, 100 AK Flow Rate and Effective Area ASS AS1001F AS2001F AS3001F AS2051F AS4001F Model JIS Symbol Metric size 6 6 8 10 6 8 3.2, 4, 6 4 10, 12 12 ASR Tubing O.D.

LX Series Compact Electric Actuators

S C hwPmfile tlDD|niD Acilaton wiflr$uiiles $enies t)(P Specif ications Brake specifications 9troke (mm) 50, 75, '100, 125,150,175,200 Motor 2-phase stepping motor s-phase steppang motor Screw (mm) 08, Lead 6 08, Lead 12 @8.