5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

, C10, 02 300 (Lead wire length) 19 95 58 24.5Mounting holes 24.4 9 9 R3 A 2 28.5 SMC 4 SY 13 18 20 Cover diameter 1.6 Cross section 0.34mm2 4 B 38 2-C6, C8, C10, 02 38 SYJ 23.4 Mounting holes Manual override C6: One-touch fitting for 6 46.5 M5 X 0.8 External pilot port (Only external pilot style(R)) C8: One-touch fitting for 8 SX C10: One-touch fitting for 10 02: Rc(PT)1/4 VK (C6, C8)

Air Cylinder

40 6 38 M5 x 0.8 5.5 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 61 19 26 16 25 2 6.6 8 46 50 8 47 M6 x 1 6 50 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32 76 27 32 20 30 2 9 9 58 58 11 58 M8 x 1.25 7 63 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32 92 27 38 20 32 2 11 9 70 58 11 72 M10 x 1.5 7 80 Up to 300 301 to 1500 20 16 (20) 3/8 17.5 16 (17.5

Table of Contents

VCA20-12-1A VCA30-12-1A VCA40-12-1A Connector Mounting screws (2 pcs.)

CM2

BBA3: D-B5/B6/G5 BBA4: D-C7/C8/H7 "D-H7BAL" switch is set on the cylinder with the screws above when shipped.

CM2

BBA3: For D-B5/B6/G5 BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.

High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

fitting ass'y for 6 C8: One-touch fitting ass'y for 8 DIN rail clamp screw 23 P=22 L1 L2 L3 (C6, C8) (C6, C8) 9.5 9.5 (C6, C8) (C6, C8) Mounting hole for 2-M4 9.5 9.5 4.5 Mounting hole for 2-M6 IN IN IN IN 5.5 80 6.5 (40) 69.5 58 80 37.5 39.5 Residual pressure release manual override U side D side Stations (5) 10.5 1 2 3 n 22 7 (59.5) 58 20.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

RSQ

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B U A 36.7 D-H7 D-H7W D-H79F D-H7BAL B U A 29 D-H7C B U A 38.2 Proper Auto Switch Mounting Position Auto Switch Mounting Height D-C7 D-C8 D-H7 D-H7W D-H79F D-H7BAL U Auto switch model D-H7BAL D-H7W D-H7 D-H7C D-C7 D-C8 D-C73C D-C80 D-C73C D-C80C D-H7NF D-H7C

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

57.5 22.5 (30.5) 21.5 (29.5) 20.5 (28.5) 17.5 (25.5) 16 (24) 19 (27) 32 33.5 33.5 33 30.5 54.5 57.5 56 53 58.5 59.5 24.5 (33.5) 23.5 (32.5) 22.5 (31.5) 19.5 (28.5) 18 (27) 21 (30) 40 38 38 37.5 35 60.5 63.5 62 59 64.5 65.5 29.5 (41.5) 28.5 (40.5) 27.5 (39.5) 24.5 (36.5) 23 (35) 26 (38) 50 43.5 43.5 43 40.5 71.5 74.5 73 70 75.5 76.5 29.5 (41.5) 28.5 (40.5) 27.5 (39.5) 24.5 (36.5) 23 (35)

51

33.5 38 43.5 50.5 59 69.5 Bore size Bore size 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 8.5 11 11.5 21.5 21.5 30.5 31.5 12 14.5 15 14.5 25 25 20.5 21 22.5 34.5 34.5 45.5 45.5 24 24.5 26 26.5 38 38 10 12.5 13 23 23 31.5 32.5 22 22.5 24 36 36 47 47 8 9.5 10 20 20 29 30 19 19.5 21 33 33 44 44 13 15.5 16 15.5 26 26 25 25.5 27 27.5 39 39 12.5 15 15.5 15 25.5 25.5 24.5

Guide Cylinder Series MGG

36.5 34.5 35.5 34.5 35 39 29.5 32 31 38 28 (40) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5 (39.5) 24 (36) 32 (36) 50 50 40.5 43 43.5 43.5 41.5 42.5 40 42 46 36.5 39.5 38 43.5 28 (40) 24 (36) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5 (39.5) 32 (36) 63 63 47.5 50 50.5 43.5 41.5 47 42 46 42.5 36.5 39.5 38 50.5 32 (46) 30.5 (44.5) 33.5 (47.5) 80 80 46.5 49.5 48 59 32 (46

VFS

2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !0 03 04 Non plug-in type VVF4000-1A-2VVF4000-2A-1 VVF4000-2A-2 Plug-in type End plate (U side) assembly !1 Non plug-in type VVF4000-3A-1 Plug-in type End plate (D side) assembly !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

AXT625-4-1#1 AXT625-5 AXT625-17 AXT625-16 18 x 15 x 1.5 10.5 x 7.5 x 1.5 8 x 5 x 1.5 AXT625-6 AXT625-28-1A (Terminal section with adapter plate) No.

Guide Cylinder/Compact Type Series MGC

, 125, 150 200, 250, 300 MGT 125 107 19 16 160 176 110 125 9 12 85 165 M8 37 160 40 70 95 60 38 150 142 25 19 190 210 115 135 11 12 95 200 M10 42 194 45 82.5 115 75 50 Bore size (mm) P Note 2) Q R S T U V W WH X Y Z O 20 25 32 40 50 86 80 M6 x 1 M5 x 0.8 21 12 26 12 40 36 30 140 23 M6 x 1 M5 x 0.8 21 12 31 13 98 47 44 37 80 153 25 M6 x 1 1/8 21 12 38 16 112 53 50 37 82 161 28.5 M8 x 1.25

CG1

(30.5) 26 (38) 26 (38) A HS A A A B 19.5 (27.5) 19.5 (27.5) 20.5 (28.5) 23 (32) 27.5 (39.5) 27.5 (39.5) A HS A HS B 15 (22.5) 15 (22.5) 15.5 (23.5) 18 (27) 22.5 (34.5) 22.5 (34.5) 31 (45) 31 (45) 30 24.5 27 27.5 29 24 27 25.5 27.5 20 30 27 27 27.5 29 24 29.5 25.5 30 25 31 30.5 28 28.5 30 25 33 26.5 33.5 32 35.5 35 32.5 33 34.5 29.5 37.5 31 38 40 43 40.5 40 40.5 42 37 43 38.5 43.5 50 43 47.5

Modular Type Lubricators Series AL

AV C4SL-3W C4SL-6 C4SL-36 AF Nylon C4SL-36W C4SL-2 C4SL-23 C4LL-8 C4LL-38 Metal Metal bowl with level gauge 121538-1A 121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank Metal bowl with level gauge Note) Bowl O-ring (or seal) is included for the AL20 to AL60.

AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F 36 4F 9.1 10 140 30 35.2 50 8.8 11 132 31 33.1 51 8.3 12 125 32 31.3 52 7.8 13 118 33 29.6 53 7.4 14 112 34 28.1 54 7.0 15 107 35 26.8 55 6.7 16 102 36 25.6 56 6.4 17 97 37 24.5 57 6.1 18 93 38 23.4 58 5.9 19 90 39 22.5 59 5.6 1A 86 3A 21.6 5A 5.4 1B 83 3B 20.8 5B 5.2 1C 80 3C 20.1 5C 5.0 1D 77 3D 19.4 5D 4.9 1E 75 3E 18.8 5E 4.7 1F 72 3F 18.2 5F 4.5

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),