5 Port Solenoid Valve Series VQZ1000/2000/3000

Example) In case of 2000 mm of lead wire DC VQZ1120-5LO1-M5 SY100-30-4A-20 AC VQZ1120-1LO1-M5 SY100-30-1A-20 V115 X110 5 Y Function Part no.

XL-OMY0002

XLD50-2-9-1A XLD40-2-9-1A ** XLD50-2-9-1A ** AS568-009V AS568-016V AS568-016V AS468-009 ** AS568-016 ** AS568-016 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** AS568-233V B2401-V85V AS568-349V B2401-G155V AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** S XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A

High Vacuum L Type Valve

-2-9-1A ** XLD100-2-9-1A ** XLD160-2-9-1A ** Assy (4) Initial pumping Standard AS568-020V valve seal (5).

HRX-OM-W002

27 28 23 35 36 (CN6) 20 34 21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4

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ZP'f40 28 30 28 30 30 32 28 30 ' (26) (2S) (231 (26) (25) (16) (28) (26) (20) (26) (25) (23) ZP'[SIl 30 32 32 34 -1 30 32 How To Order ZPT(02~~5) Symbd Thread dja I 1 Mate,ial Pad type' AS M5xO.8 N NBR (Application: Refer to liS10) 066 .!1:,'j '" M6xl A6 S Silic on rubber .. ~ U Flattype Pad dia.(mm) Vacuum entry (also mounting thread dia) 088 :!

VZ100/300/500

DXT201-19-1A Note With screw (For VZ52) Refer to pages 4-6-34 to 4-6-45 for manifold use.

XL

Description AS568 -025V AS568-030V AS568-035V XLF16-6 XLF25-6 AS568-039V AS568-043V AS568-045V Exterior seal AS568-233V B2401-V85V AS568-227V B2401-V15V B2401-V24V B2401-P42V (M) Valve seal XLD50 -2-9-1A XLD80 -2-9-3A XLD80 -2-9-3A AS568 -009V XLD40 -2-9-1A S Valve seal assembly Refer to the Construction/Operation drawing of each series for the construction numbers.

PA300/500/700

VP300-27-1A VP500-27-1A VP700-27-1A Series VPA342 VPA542 VPA742 Bracket (With screw) Only VPA344, VPA544 and VPA744 Specifications Fluid Type of actuation Air N.C. or N.O. (Can be switched.) Note) Standard Vacuum Operating pressure range (MPa) 0.2 to 0.8 N.C.

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Nil/G N/T 2-port 7 MPa 3 MPa SGH100 3 MPa SGH1-16-1A SGH100 7 MPa 3-port 7 MPa 3 MPa EBKX-W4005 EBKY-D8006 SGH200 2-port 7 MPa SGH2-16-1A 7 MPa 3 MPa SGH1-16-1A SGH200 3 MPa 3-port SGH300 7 MPa SGH2-16-1A 7 MPa 2-port 7 MPa SGH3-16-1A EBKX-Z2003 EBKY-D8007 3 MPa SGH400 3 MPa SGH2-16-1A SGH300 7 MPa 3-port 7 MPa SGH3-16-1A 2-port 7 MPa SGH4-16-1A 3 MPa SGH3-16-1A SGH400 3-port 7 MPa SGH4-16

ZR

Output Specifications 25 (L) 1 output NPN open collector 30 V, 80 mA or less Analog output (1 to 5 V) ZSE4 ZSE4B 26 (L) 67 (L) 1 output PNP open collector 80 mA or less 26 (L) Analog output (1 to 5 V) ZSE4E 27 (L) 2 outputs NPN open collector 30 V, 80 mA or less 67 (L) 2 outputs PNP open collector 80 mA or less 13-3-16 16 Series ZR Large Size Vacuum Module: Ejector System ZX ZR ZM ZH ZU Courtesy

Modular F.R.L. Units

Replacement Parts Description Material HNBR Y200-A Y220P-050S Y300-A Y320P-050S Y400-A Y420P-050S Y500-A Y520P-050S Seal Spacer with Bracket Center of F.R.L. body X-X C B G E E EE(Y120T, Y220T only) X X A Seal (Spacer width) J H F Y200T-A Y400T-A D K G 5.5 7 9 9 EE 33 E 24 35 40 40 D 53.4 71.5 86.1 89.6 C 29 41 48 48 H 15.5 19 26 26 B 67 82 96 96 J 3.5 4 5 5 K 30 41 50 50 A 3.2 4.2 5.2 5.2

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

PD ). 5 -26 5.4.1 Parameter list . 5 -26 5.4.2 List of details . 5 -27 6.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

DXT156-19-1A 1 pc.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Type 21P Type 32P Model Manifold type Clean appearance In the case of a flat ribbon cable type, each valve is wired on the print board of manifold base to allow the external wiring to be piped all together with 26 pins MIL connector.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Type 21P Type 32P Model Manifold type Clean appearance In the case of a flat ribbon cable type, each valve is wired on the print board of manifold base to allow the external wiring to be piped all together with 26 pins MIL connector.

I

ISE4L01 T1-26 100kPa Analog output 1~5V (+ 5%F.S.), load impedance: 1k ISE4L01 T1-65 (14.5PSI) Type PNP output PNP open collector 80mA ISE401 T1-25 Positive Pressure NPN output NPN open collector 30V, 80mA, residual voltage : 1V or less ISE401 T1-26 1MPa Analog output 1~5(+ 5%F.S.), load impedance: 1k ISE401 T1-65 (145PSI) Type PNP output PNP open collector 80mA 1 When handling the switch

XMD/XYD Series

1A S Valve seal Assy (4) Specific XLD40-2-9-1A ** XLD50-2-9-1A ** XLD63-2-9-1A ** XLD80-2-9-1A ** Standard AS568-009V AS568-016V AS568-016V Initial pumping valve seal (5).

VK300

8 R port: Rc 1/8 VP Type 40: Base mounted (A port bottom ported) How to Order Applicable solenoid valve VK334Applicable blanking plate assembly VK300-42-1A Bracket VK300-43-1A VG VV3K3 05 40 01 VP P port: Rc 1/8 Thread type Option Valve stations S070 R port: Rc 1/8 01 Nil None 1 station Port size Nil Rc G NPT NPTF F With bracket (Not mounted) VQ F N T 01 Rc 1 8 20 20 stations A port: Rc

VCA

VCA20-12-1A VCA30-12-1A VCA40-12-1A Connector Mounting screws (2 pcs.)

VCC

-1 (for VCC12-00) 1 set unit VCC12(D)-00 (dedicated) Orifice body assembly VCC12D-1A-1 (for VCC12D-00) VNA 1 set unit VNB O-ring assembly 1 set unit VCC12-OR-1 SGC O-ring assembly Orifice assembly 1 set unit VCC12-OR-4 SGH 1 set unit VCC13-1A-1 VNC VCC13-00 (dedicated) 1 set unit VNH O-ring assembly VCC13-OR-1 O-ring assembly 1 set unit VCC13-OR-2 VND Mounting nut assembly A-o Mounting nut