MY1

MY1M/M2 MY1M/M3 MY1M/M1 16 20 25 32 40 50 63 3.0 1.0 MX 2.1 7 6.0 18 200 5.2 1.7 3 10.4 10 26 40 50 20 MTS 9.0 2.4 4.5 15 15 38 MY1M 15 5.0 6.6 23 30 57 100 30 24 MY 8.0 10 33 59 84 10 38 15 14 48 115 120 20 60 CY 19 21 The above values are the maximum allowable values for moment and load.

HRX-OM-W002

3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22 25 26 27 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 20 20 1 10 12 1 13 4 15 3 16 15 16 18 1 23 4 8 4 3 24 24 3 2 14 (CN6) BL BL BR BR BR BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BR BR BR BR BR BR BL BL BL BL BL

3 Port Solenoid Valve Rubber Seal Series SY100 1

SY114-5GZ Blanking plate assembly SY100-77-1A R P Manifold base (5 stations) SS3Y1-S41-05-M5 SS3Y1-S41-05-M5 1 set (Type S41, 5 station manifold part number) SY100-77-1A 1 set (Blanking plate assembly part number) SY114-5GZ 4 sets (Valve) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Series SY100 3 Port Solenoid Valve Rubber Seal

Stations 3 2 1 SY114-5GZ Blank plate assembly SY100-77-1A R P Manifold base (5 stations) SS3Y1-S41-05-M5 SS3Y1-S41-05-M5.1set (S41 type 5-station manifold part number) SY100-77-1A .1set (Blank plate assembly part number) SY114-5GZ.4set (Valve) : Assembly symbolprefix "" mark to the installed solenoid valve part number.

VCA

VCA20-12-1A VCA30-12-1A VCA40-12-1A Connector Mounting screws (2 pcs.)

SYA3000/5000/7000

Note 2) ( ): denotes without sub-plate. 1731 Series SYA3000/5000/7000 Dimensions/Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) 2 x 2.2 (For manifold mounting) 2 x 3.2 (For mounting) (2 x 3.2 for mounting

5 Port Air Operated Valve SYA3000/5000/7000 Series

Note 2) ( ): denotes without sub-plate. 1461 SYA3000/5000/7000 Series Dimensions/SYA3000 Series: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Manual override (Non-locking) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 x 2.2 (For manifold mounting) 2 x 3.2 (For mounting) (2 x 3.2 for mounting

5 Port Air Operated Valve

Bracket (for VFA1000 double) DXT144-8-1A (With 2 mounting screws) 1501 VFA1000/3000/5000 Series Dimensions: VFA1000 Series/Body Ported 2 position single VFA1120-M5(-F)(-P) 2 position double VFA1220-M5(-F)(-P) (11.7) (11.7) (Distance between ports) (Distance between ports) 38 M5 x 0.8 [4 (A), 2 (B) port] M5 x 0.8 [4 (A), 2 (B) port] 26.4 (4) 6 14.8 5 B 2 B 2 26.4 10 10 1/8 (Pilot port: Upward

ZR

ZR1 V K1 5 M Z Combination of vacuum valve and release valve Manual override With light/surge voltage suppressor Pilot valve Rated voltage Electrical entry 13-3-38 38 Series ZR Large Size Vacuum Module: Vacuum Pump System Vacuum Pressure Switch: ZSE2-0R-15 Specifications Vacuum pressure switch part no.

AC Servo Motor Driver (SSCNET /H Type)

Name Detail Method (Note3, display Detail name 4) 17.1 Board error 1 DB Alarm 17.3 Board error 2 DB 17 Board error 17.4 Board error 3 DB 17.5 Board error 4 DB 17.6 Board error 5 DB 17.8 Board error 6 (Note 5) EDB 19.1 Flash-ROM error 1 DB 19 Memory error 3 (FLASH-ROM) 19.2 Flash-ROM error 2 DB 1A.1 Servo motor combination error DB 1A Servo motor combination error 1A.2 Servo motor control

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

A1 (mm) F (h9) R (RC) E (g6) G2 H (R) M1 Model A1 A2 B C G1 J M2 N U K P Q T X Z D V L S Y W CDRB1BW5018 26 21 29 27 30 29 35.5 38 M6 x 1 depth 9 14 18 15 25 20 30 24 38 12 0.006 0.017 25 0 0.052 1/8 R6 R22.5 70 67 39.5 3 32.5 13.5 60 66 5.5 6.5 32 11 5 50 46 34 6.5 78 CDRB1BW50-E CDRB1BW63M8 x 1.25 depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 R30 80 82 45 3 21 17 75 83 8 9 34 14 5 60

CRB2/CRBU2/CRB1

M1 M2 Body (B) N Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R CRB1 Y Y A1 M1 A2 P 6-Q X A1 (mm) R (RC) E2 (h9) F (h9) E1 (g6) V B W C Model A1 D G M2 X U A2 Y H N P J Z M1 S Q K T L CRB1BW 50CRB1BW 50-E CRB1BW 63CRB1BW 63-E CRB1BW 80CRB1BW 80-E CRB1BW 100CRB1BW 100-E 26 21 29 27 30 29 35.5 38 18 22 30 32 14 18 15 25 20 30 24 38 M6 x 1 depth 9 12 0.006 0.017 11.9 0 0.043 25 0

Table of Contents

A1 (mm) F (h9) R (RC) E (g6) G2 H (R) M1 Model A1 A2 B C G1 J M2 N U K P Q T X Z D V L S Y W CDRB1BW5018 26 21 29 27 30 29 35.5 38 M6 x 1 depth 9 14 18 15 25 20 30 24 38 12 0.006 0.017 25 0 0.052 1/8 R6 R22.5 70 67 39.5 3 32.5 13.5 60 66 5.5 6.5 32 11 5 50 46 34 6.5 78 CDRB1BW50-E CDRB1BW63M8 x 1.25 depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 R30 80 82 45 3 21 17 75 83 8 9 34 14 5 60

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

A1 (mm) F (h9) R (RC) E (g6) G2 H (R) M1 Model A1 A2 B C G1 J M2 N U K P Q T X Z D V L S Y W CDRB1BW5018 26 21 29 27 30 29 35.5 38 M6 x 1 depth 9 14 18 15 25 20 30 24 38 12 0.006 0.017 25 0 0.052 1/8 R6 R22.5 70 67 39.5 3 32.5 13.5 60 66 5.5 6.5 32 11 5 50 46 34 6.5 78 CDRB1BW50-E CDRB1BW63M8 x 1.25 depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 R30 80 82 45 3 21 17 75 83 8 9 34 14 5 60

Modular F.R.L. Unit

80 167 55 57 41 35 14 7 7 4 71 66 30.5 3.5 194 153 38 80 167 72.5 75 50 40 18 9 9 4 88 74 35 3.5 226 187 40 110 220 77.5 80 50 40 18 9 88 35 9 4.6 74 3 226 187 38 110 235 93 96 70 50 20 11 115 44.5 11 6.4 84 3.3 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 110 297 Note 1) For AC20 only, the position

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Response time (ms) (0.5 MPa) Type of actuation 52-SY5000 26 or less 22 or less 38 or less 52-SY7000 38 or less 30 or less 56 or less 52-SY9000 50 or less 50 or less 70 or less 2-position single 2-position double 3-position Note 1) According to dynamic performance test JIS B8375-1981. Note 2) Response time when barriers were combined with a valve.

Air Cylinder NCM Series Stainless Steel Cylinders

NCmRO-OT NCI|RO-OS H3 ).250 | r-24 o.75 |.0010.621 r2s6;; 093t0.22 t0-32 uNFl0.8l L00 1 . 1 20.12 t10-32 UNF $-m 0.62 0.34 0.880.38 3.22 2.66 2.35 1.69 t.312tyt -24 003t025 O-32UNF .12 r25 1.47 0.2,1 llG32 UtlF 1A-20 0.s10.47 1.22 o.62 3.75 3.34 2-93 1.81 ).137 t%^-20 r.25 1.m).12510-38 | r. -20 UNC 't.75 1.93 0.25 t|l-20 LhrC x.-18 1 . 1 20.38 1.57 0.88 4 . 1 9 3.49 3,692.O0 slrc' Air Cvlinder

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(M): VQZ115-lMl-C3, C4, C6, M5-PR (Lead wire) Cover dia 1.5 Cross section 0.23mm2 300 60.5 65.5 300 55.5 59 (Lead wire) Indicator light Indicator light 40.5 41.5 Cover dia 1.5 Cross section 0.23mm2 : AC : AC 2.10-8 VQZ100/200/300 Body Ported VQZ200 Valve single unit 2-C4, C6, M5 Grommet (G): VQZ2l2(R)-lGl-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 2-3.5 Mounting

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

light 37 <42> < >: AC 4-14-9 Body Ported 10 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ32(R)-G-C6/C8/C10/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

or less VQ2000 Closed center Rubber seal 34 or less 14.4 (0.8) VQ2301 44 or less 110 Metal seal 29 or less 12.6 (0.7) VQ2400 38 or less Exhaust center Rubber seal 34 or less 14.4 (0.8) VQ2401 44 or less Metal seal 29 or less 12.6 (0.7) VQ2500 38 or less Pressure center Rubber seal 34 or less 14.4 (0.8) VQ2501 44 or less Note 1) Values are for cylinder port sizes C6 (VQ1000) and C8 (VQ2000