D-A90A93A96A90VA93VA96V 3. <> () () 6080 D-M9A(V) M3M3 0.6 0.7Nm (M2.5) (M2.5)0.050.1Nm 56mm 1) (M2.5) 2) M3 BM5 12 - 13 - 3. 14 - 1) 2)1 (30) * *(NC=b )(D-M9E(V)) 15 - / 16 - 3.
D-H7BALD-H7NF D-G59WD-G5PWD-K59W D-G59FD-G5NT D-C73CD-C80C D-B54D-B64D-B59W 3. 4. () () (M4 1~1.2Nm (M3 0.6~1Nm 11 <> D-M9NM9PM9BM9NM9PVM9BV D-M9NWM9PWM9BWM9NWM9PWVM9BWV D-M9NAM9PAM9BAM9NAM9PAVM9BAV D-A90A93A96A90VA93VA96V 5. <> 6080 D-M9A(V) M3M3 0.60.7Nm (M2.5) (M2.5)0.050.1Nm 56mm 1)(M2.5) 2)M3 BMA3 A 12 4 1) (BMA2-A)(BJ5-1/) () 2) (BMA2-AS/)(BJ4-1/) D-M9A(V) () BBA3:D-B5,
Check for the following during regular maintenance, and replace components as necessary. a) Scratches, gouges, abrasion, corrosion b) Air leakage c) Twisting, flattening or distortion of tubing d) Hardening, deterioration or softness of tubing 2.
Series Option
Series Option Example VV2DW2-0501 ... 1 set Manifold part no. 1 2 3 10 20 30 None With bracket Nil F VDW23-5G-2 ... 5 sets Valve part no. (Stations 1 to 5) Note) Type 30 is available only with bracket. "" is the symbol for mounting. Add "" in front of the part numbers for solenoid valves, etc., to be mounted. Enter together in order, counting from station 1 on the D side.
8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1) 2) 3) 1. 2. 3. 4) 1. 2. 3. 4. 2 - No.ZL3-OM00801-A /ZL3ZL6 / 1)1 1.5 *3) 2) 3 3)1 1 () 3 - No.ZL3-OM00801-A () -() 4 No.ZL3-OM00801-A 1.
The signal has to be converted by a A/D converter for pressure display or switch output. Current Output signal is a current signal in the range of 4 to 20[mA]. The signal is transformed into a voltage signal before being converted by a A/D converter for pressure display or switch output.
, D-F9WV D-F9P B, D-F9W D-A9V D-F9N D-F9V Number of auto switches 2 pcs. 15 Note) 20 Note) 10 10 5 10 Note) 15 Note) 20 Note) 5 5 1 pc.
Series Option Example VV2DW2-0501 ... 1 set Manifold part no. 1 2 3 10 20 30 None With bracket Nil F VDW23-5G-2 ... 5 sets Valve part no. (Stations 1 to 5) Note) Type 30 is available only with bracket. "" is the symbol for mounting. Add "" in front of the part numbers for solenoid valves, etc., to be mounted. Enter together in order, counting from station 1 on the D side.
(See page 16, Table 6.) < Applicable Auto switches > Solid state auto switch D-G59, D-G5P, D-K59, D-G5BA D-G59WD-G5PWD-K59W D-G59FD-G5NT < Applicable Auto switches > Solid state auto switch D-H7BAL, D-H7NF Reed auto switch D-C73C, D-C80C Reed auto switch D-B54D-B64D-B59W Fig. 3 Mounting and movement of the auto switch Fig. 4 Mounting and movement of the auto switch (1) Wind a band on the
Model D L M AKH04-00 AKH06-00 AKH08-00 AKH10-00 AKH12-00 3 5 10 17 25 4 6 8 10 12 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 12.7 13.5 18.5 21 22 2-Applicable tubing D Inch Size Weight g Effective area (mm) Applicable tube O.D.
N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.
B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t
Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto
B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t
A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 14.
Type S31 Manifold: Side Ported 91.7 [96.1] Approx. 300 (Lead wire length) SS5YJ3-S31Stations -M3 L1 L2 3.5 2-3.5 (For mounting) Manual override M5 x 0.8 (P, R port) 5.2 29.2 7.5 52.2 [54.4] 51.4 [53.6] 17.3 30 3 91.7 [96.1] 78.8 [83.2] 78.8 [83.2] 13.5 A A A A A B B B B B P R P R P R 29.2 P R 30 17.3 25 7.5 12 25 51.4 [53.6] 52.2 [54.4] 13.5 B B B B B A A A A A 3 5.2 2-3.5 (For mounting)
x 1.5 NBR O-ring JIS B 2401 P3 JIS B 2401 P4 JIS B 2401 P5 NBR O-ring (1) (1) (1) P36203015 NBR Seal (A) P36203016 NBR Seal (B) KT-IRV1000 KT-IRV2000 KT-IRV3000 Repair kit no.
D-M9NAM9PAM9BAM9NAM9PAVM9BAV (2) Make sure that auto switch mounting band is not slanted.
D-M9NAM9PAM9BAM9NAM9PAVM9BAV (2) Make sure that auto switch mounting band is not slanted.