5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Description AXT335-1-11 (M4 x 40) VFR4000-32-3 VFR41 AXT335-1-11 (M4 x 40) VFR4000-32-3 VFR42 AXT335-1-11 (M4 x 40) VFR4000-32-3 VFR43/44/45 9 NBR Hexagon socket head screw Gasket 10 11 Steel Pilot valve assembly Sub-plate assembly Refer to How to Order Pilot Valve Assembly on page 1275.

Series VQ Base Mounted Metal Seal/Rubber Seal

VVQ1000-19AC3 C4 C6 M5 C3 C4 C6 M5 F P L VS VS7 Check valve for prevention of back pressure assembly [-B] VVQ1000-57A DIN rail mounting bracket [-D] VVQ1000-AR-1 Regulator unit VVQ1000-R-1-C6 Individual EXH spacer VVQ1000-18A Refer to p.1.10-157 for cylinder port fittings.

Manifold Specifications

specifications Rc 1/4 01(Rc 1/8) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) B7 (One-touch fitting for 1/4") C9 (One-touch fitting for 5/16") Port size Rc 1/8 4(A), 2(B) port Flow Characteristics Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-40 VV5Z5-41 VV5Z5-42-C6

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5 to 30 L/min

Rubber seal 5 Port Solenoid Valve Series SYJ7000

C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7-41 SYJ74 for internal pilot Type SS5YJ7-42-C6 Type SS5YJ7-42-C8 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along

VZ100/300/500

0.8 1/8 F G 20 20 stations A port M5 x 0.8, 1/8 N NPT Z NPTE Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port. 40-1 How to Order Applicable solenoid valve VZ314VZ314MVZ324VZ324MApplicable blanking plate assembly DXT200-8-3A VV3Z3 40 05 1 C6 R port P/R port Thread type Stations A port side P port M5 01 C4 C6 B3 B7 2 stations 02 M5

5 Port Air Operated Valve Series SYA3000/5000/7000 1

for VR F2 With side bracket Series One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 SYA5000 VH 3 SYA3000 5 SYA5000 SYA7000 VHS 7 SYA7000 SYA 5 1 C6 Body ported 20 40 SYA 5 1 Base mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Nil Rc G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Nil Rc 2 position

42

40 0.6 Outlet pressure [MPa] B EB 37 19 37 0.5 Note 1) Set the pressure within the operating pressure range of the valve.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

How to Order Manifold Assemblies (Example) Example (OMRON Corporation compatible serial unit) Double solenoid (24VDC) SZ3260-5LOZ-C6 (3 sets) Single solenoid (24VDC) SZ3160-5LOZ-C6 (2 sets) Supply/Exhaust block assembly SS5Z3-60SRID-05U-C6 . 1 set (manifold part number) SZ3160-5LOZ-C6. 2 sets (single solenoid part number) SZ3260-5LOZ-C6. 3 sets (double solenoid part number) (U side mounting

VCC

Description Symbol A B C D E Description For piping 12 x 9 40 swivel elbow For piping 10 x 8 40 swivel elbow For piping 10 x 7.5 40 swivel elbow For piping 8 x 6 40 swivel elbow For piping 6 x 4 40 swivel elbow Part no. VCKK1209-02F VCKK1008-02F VCKK1075-02F VCKK0806-02F VCKK0604-02F Symbol F G H J K Part no.

SZ3000

How to Order Valve Manifold Assembly Ordering example (OMRON Corporation compatible serial unit) Double solenoid (24 VDC) SZ3260-5LOZ-C6 (3 sets) SS5Z3-60SR1D-05U 1 set (manifold part number) SZ3160-5LOZ-C6 2 sets (Single solenoid part no.) SZ3260-5LOZ-C6 3 sets (Double solenoid part no.)

SZ3000

How to Order Valve Manifold Assembly Ordering example (OMRON Corporation compatible serial unit) Double solenoid (24 VDC) SZ3260-5LOZ-C6 (3 sets) SS5Z3-60SR1D-05U 1 set (manifold part number) SZ3160-5LOZ-C6 2 sets (Single solenoid part no.) SZ3260-5LOZ-C6 3 sets (Double solenoid part no.)

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

-M5 Type 10-SS3YJ5-40-01 Base mounted for internal pilot C4 1/8 1/8 M5 x 0.8 1/8 Type 10-SS3YJ5-41-M5 10-SYJ54M Type 10-SS3YJ5-41-01 Type 10-SS3YJ5-41-C4 Type 10-SS3YJ5-41-C6 C6 1/8 Note) The values are for individually operated 2 position type manifold bases.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQ1170 N 5MO C6 L dimension 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

fitting ass'y for 6 C8: One-touch fitting ass'y for 8 DIN rail clamp screw 23 P=22 L1 L2 L3 (C6, C8) (C6, C8) 9.5 9.5 (C6, C8) (C6, C8) Mounting hole for 2-M4 9.5 9.5 4.5 Mounting hole for 2-M6 IN IN IN IN 5.5 80 6.5 (40) 69.5 58 80 37.5 39.5 Residual pressure release manual override U side D side Stations (5) 10.5 1 2 3 n 22 7 (59.5) 58 20.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

manifold 10-SS5Z3-60PD2-05U-P 10-SS5Z3-60PD2-05U-P 1 set (Manifold part no.) 10-SZ3160-5LOZ-C6 2 sets (Single solenoid part no.) 10-SZ3260-5LOZ-C6 3 sets (Double solenoid part no.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

2-Color Display Digital Flow Switch Series PFM

Dimensions PFM -C4/C6/C8/N7--X693 7 5 PFM -C4/C6/C8/N7--X694 7 5 10.2 10.2 1 43 A 43 1 IN OUT (34.2) 3 (34.2) 13 3 13 A 18 OUT 2 x 3.4 18 IN B B 48 20 48 20 2 x 3.4 One-touch fitting Applicable tube O.D.

3 Port Solenoid Valve

(Double) Port size C2, C4 (2, 4 one-touch fitting) Mass (g) 31 40 V110-C2/C4 Flow Characteristics Flow characteristics Port size 2a, 2b 1(P)2a/2b C [dm3/(sbar)] C [dm3/(sbar)] 2a/2b3(E) 1(P) b b C2 C4 0.03 0.03 0.22 0.19 0.05 0.05 0.31 0.29 C6 The effective area S (mm2) is approximately 5 times as large as the sonic conductance (S C x 5). 2 3 Port Solenoid Valve Series VV100 Construction