0.

M-type plug connector (M) P.2 (A) 2 M-type plug connector (M) Rubber Metal VQZ100 + 1 (P) 3 (R) N.O.

Table of Contents

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

Table of Contents

l Mounting orientation m m Refer to the caution notes below.

5 Port Solenoid Valve

D-sub connector kit (25P) with 1.5 m cable MD1 Circular connector kit (26P) with 1.5 m cable FD2 D-sub connector kit (25P) with 3.0 m cable MD2 Circular connector kit (26P) with 3.0 m cable FD3 D-sub connector kit (25P) with 5.0 m cable MD3 Circular connector kit (26P) with 5.0 m cable 1 to 12 stations (12 stations, 20 points) LD1 Lead wire kit, 1.5 m lead wire LD2 Lead wire kit, 3.0 m lead

Series VQ Metal Seal/Rubber Seal Body Ported

6 Voltage 1 to 6 L M 2 3 (VQ0) (VQ1000) (VQ2000) L M 2 3 (VQ0) (VQ1000) (VQ2000) VQ110L VQ110L Double (latching) Double (latching) Voltage 1 to 6 Voltage 1 to 6 The direction of the L and M connectors of a pilot valve is opposite to that of the single and double styles.

CJ2

Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 6-3-13 for details.

SYJ300/500/700

(Initial value) Base mounted Solenoid specifications Grommet(G)/(H), L plug connector (L), M plug connector (M), DIN terminal (D), M8 connector (W) Electrical entry JIS Symbol G, H, L, M, W D Internal pilot Rated coil voltage V DC AC50/60Hz 24, 12, 6, 5, 3 24, 12 10-SYJ51 M 2 4 10-SYJ52 M 2 4 100, 110, 200, 220 10% of rated voltage Allowable voltage fluctuation (A) 2 (A) 2 Standard 0.35

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

A A n-One-touch fitting (A port) (Pitch) P=19 21 C6: Applicable tube T0604 C8: Applicable tube T0806 Rc (PT) 1/8 L plug connector (L) M plug connector (M) (Non-locking) Manual override (P/R port) 4-Rc (PT)1/4 69.5 [76] 69.5 [76] 57.1 50.5 35 8.5 63.5 63.5 63.5 4-Rc (PT)1/4 (P/R port) 14 1 21.5 21.5 A A 14 1 9.5 C6: MAX. 6 C8: MAX. 6.5 9.5 (Pitch) n-Rc (PT)1/8 (A port) P=19 21 22.5 22.5 43

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

1 to 12 stations 24 D side D-sub connector (25P) kit, with 3.0 m cable D side D-sub connector kit D-sub connector (25P) kit, with 5.0 m cable Flat ribbon cable (26P) kit, without cable P kit Flat ribbon cable (26P) kit, with 1.5 m cable 24 stations 1 to 12 stations 24 (1) Flat ribbon cable (26P) kit, with 3.0 m cable D side Flat ribbon cable (26P) kit, with 5.0 m cable 26P 20P ( ) Flat ribbon

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-m-L3m-mmm : 0 x 00016F (367) PF2M701-m-L4m-mmm : 0 x 000170 (368) PF2M725-m-Lm-mmm : 0 x 00017D (381) PF2M725-m-L2m-mmm : 0 x 00017E (382) PF2M725-m-L3m-mmm : 0 x 00017F (383) PF2M725-m-L4m-mmm : 0 x 000180 (384) PF2M702-m-Lm-mmm : 0 x 000171 (369) PF2M702-m-L2m-mmm : 0 x 000172 (370) PF2M702-m-L3m-mmm : 0 x 000173 (371) PF2M702-m-L4m-mmm : 0 x 000174 (372) PF2M750-m-Lm-mmm : 0 x 000181

A

m 0 . 0 1 m m 0 . 0 1 m m 0 . 0 1 m m 0 . 0 1 m m 0 . 0 1 m m Fluid A i r A i r A i r A i r A i r A i r Operating Pressure 0.2~0.6MPa 0.15~0.6MPa 0.2~0.6MPa 0.15~0.6MPa (29~87PSI) 22~87PSI 29~87PSI 22~87PSI Ambient and Fluid Temperature 0 ~ 6 0 C ( 3 2 ~ 1 4 0 F ) 0 ~ 6 0 C ( 3 2 ~ 1 4 0 F ) Max Operating Frequency 1 8 0 c . p . m 1 8 0 c . p . m Lubrication N o n l u b e N o n l u b

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 2 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

Model: 10T (Side Ported), Type: None, Valve Stations: 2 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

Model: 11T (Bottom Ported), Type: None, Valve Stations: 2 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

Model: 10 (Side Ported), Number of Cores - Lead Wires: L3 (9 Cores), Lead Wire Length: 3 (3m), Valve Stations: 2 Stations, P, E Port Locations: D (D Sides), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

Model: 10S (Side Ported), SI Unit Specification: A3N (Negative Common, 32 Outputs), Valve Stations: 2 Stations, P, E Port Location: D (D Side), SUP/EXH Block Assembly: S (Internal Pilot/Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

Type: 10S (Side Ported), SI Unit Specification: QB (DeviceNetâ„¢ - 16 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 2 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

Type: 10S (Side Ported), SI Unit Specification: EB (EtherNet/IPâ„¢ - 16 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 2 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

Type: 10S (Side Ported), SI Unit Specification: KA (IO-Link - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 2 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

Manifold Type: 43 (Individual Wiring), Valve Stations: 2 Stations, P, R Port Location: D (D Side 2~10 Stations), SUP/EXH Block Specification: S (Internal Pilot, Built-in Silencer), Port Size: C8 (ø8 One-touch Fitting)