Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5 to 30 L/min

7.5

C4 SJ3l60-C4 SJ2l60-C4 4 onetouch fitting 4 onetouch fitting 3 position 4 position 3 position 4 position 77 48 73 61 69 44 39 42 2 position 2 position C6 SJ3l60-C6 SJ2l60-M3 6 onetouch fitting M3 x 0.5 3 position 4 position 3 position 4 position 73 69 57 65 69 46 42 Note) Please contact SMC for the weight of elbow fittings. 2 position SJ3l60-M5 M5 x 0.8 3 position 4 position 65 Note) Please

Compact Vacuum Unit

Latching Vacuum pump system ZB00 ZB03 ZB04 ZB05 ZB06 0.3 mm 1 to 12 stations Ejector 0.4 mm 0.5 mm 0.6 mm Manifold Features 2 Compact Vacuum Unit Series ZB RoHS How to Order Single Unit 5 L 0 2 K1 ZB 00 P1 C4 Vacuum Pump System 5 L 1 1 K1 ZB 04 P1 C4 Ejector Nominal Nozzle Size Body Type Rated Voltage 5 6 Applicable supply valve and standard supply pressure 24 VDC 12 VDC Port specification

2-Color Display Digital Flow Switch Series PFM

Dimensions PFM -C4/C6/C8/N7--X693 7 5 PFM -C4/C6/C8/N7--X694 7 5 10.2 10.2 1 43 A 43 1 IN OUT (34.2) 3 (34.2) 13 3 13 A 18 OUT 2 x 3.4 18 IN B B 48 20 48 20 2 x 3.4 One-touch fitting Applicable tube O.D.

Fieldbus System

Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations Symbol A, B port P , E port A, B port size (Metric) Symbol A, B port P , E port A, B port size (Inch) Applicable series Applicable series C3 C4 C6 C4 C6 C8 C6 C8 C10 M N1 N3 N7 N3 N7 N9 N7 N9 N11 M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQ4 Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) VQ5 Dimensions VQZ Single unit Manifold VQD 2n-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M3 mounting hole ~ =4.5 ~ =4.5 M2.5 mounting hole Residual pressure release manual override Residual pressure release manual override DIN rail clamp screw

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

C4 SJ3l60-C4 SJ2l60-C4 4 onetouch fitting 4 onetouch fitting 3 position 4 position 3 position 4 position 77 48 73 61 69 44 39 42 2 position 2 position C6 SJ3l60-C6 SJ2l60-M3 6 onetouch fitting M3 x 0.5 3 position 4 position 3 position 4 position 73 69 57 65 69 46 42 Note) Please contact SMC for the weight of elbow fittings. 2 position SJ3l60-M5 M5 x 0.8 3 position 4 position 65 Note) Please

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(The standard valve has an individual exhaust for the pilot valve.) 1.12-58 Series VQZ Base Mounted Replacement Parts One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting Size Series VQZ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C8 VQZ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 VQZ3000 SY VVQ2000-51A-C6 Note) Order is accepted in

Fieldbus System

U U side (2 to 10 stations) D D side (2 to 10 stations) B Both sides (2 to 20 stations) 16 16 stations 02 2 stations Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations A, B port size (Metric) A, B port size (Inch) Symbol A, B port P, E port Applicable series C3 3.2 One-touch fitting 8 One-touch fitting SV1000 C4 4 One-touch fitting C6 6 One-touch fitting C4 4 One-touch

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

If 12VDC specifications are required, enter "12" at the end of the assembly part number. 1 2 1 2 P N D side SZ3000-40-6A-D For flat cable 20 pins SZ3000-40-5A-D 1 2 1 2 P N D side SZ3000-40-8A-D For flat cable 10 pins SZ3000-40-7A-D A connector block assembly can be shipped as an assembly only in the case of double wiring.

SYA3000/5000/7000

Closed center Exhaust center Pressure center 48 SYA320-C4 M5 x 0.8 M5 x 0.8 One-touch 0.35 0.16 0.42 [0.41] 0.34 [0.37] 0.63 0.11 [0.11] 3 position fitting for 4 0.76 [0.46] 0.42 [0.34] 0.21 [0.12] 0.59 0.29 0.15 40 42 Single Double 2 position 0.30 0.19 0.65 0.39 0.76 0.17 0.55 0.24 0.60 0.33 0.76 0.16 C6 Closed center Exhaust center Pressure center 44 SYA320-C6 One-touch 0.32 0.16 0.64

SZ3000

Type of actuation Plug Plug (A) 4 (B) (2) (A) (4) (B) 2 Single Number of solenoids Common connector assembly SX100-40-4S 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Common connector assembly (With common lead wire) SX100-40-4S Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Double SS5Z3-60-04D1 set SZ3160-5MO2 sets SZ3260-5MO2 sets SX100-40-4S1 set (with common Lead wire for single solenoid) SX100-42-4S1

SZ3000

Type of actuation Plug Plug (A) 4 (B) (2) (A) (4) (B) 2 Single Number of solenoids Common connector assembly SX100-40-4S 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Common connector assembly (With common lead wire) SX100-40-4S Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Double SS5Z3-60-04D1 set SZ3160-5MO2 sets SZ3260-5MO2 sets SX100-40-4S1 set (with common Lead wire for single solenoid) SX100-42-4S1

5 Port Air Operated Valve SYA3000/5000/7000 Series

48 SYA320-C4 One-touch M5 x 0.8 M5 x 0.8 0.63 0.16 0.42 [0.41] 0.34 [0.37] 0.35 0.11 [0.11] 3 position fitting for 4 0.76 [0.46] 0.21 [0.12] 0.59 0.29 0.42 [0.34] 0.15 40 42 Single Double 2 position 0.76 0.19 0.65 0.39 0.30 0.17 0.76 0.24 0.60 0.33 0.55 0.16 Closed center Exhaust center Pressure center C6 44 SYA320-C6 One-touch 0.65 0.16 0.64 [0.42] 0.31 [0.36] 0.32 0.17 [0.11] 3 position

VZ100/300/500

0.8 1/8 F G 20 20 stations A port M5 x 0.8, 1/8 N NPT Z NPTE Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port. 40-1 How to Order Applicable solenoid valve VZ314VZ314MVZ324VZ324MApplicable blanking plate assembly DXT200-8-3A VV3Z3 40 05 1 C6 R port P/R port Thread type Stations A port side P port M5 01 C4 C6 B3 B7 2 stations 02 M5

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R

smcmaintenancepartslist

Material Applicable model Note) Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S Replacement Parts 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

Table of Contents

60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics,