2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5 to 30 L/min

7.5

C4 SJ3l60-C4 SJ2l60-C4 4 onetouch fitting 4 onetouch fitting 3 position 4 position 3 position 4 position 77 48 73 61 69 44 39 42 2 position 2 position C6 SJ3l60-C6 SJ2l60-M3 6 onetouch fitting M3 x 0.5 3 position 4 position 3 position 4 position 73 69 57 65 69 46 42 Note) Please contact SMC for the weight of elbow fittings. 2 position SJ3l60-M5 M5 x 0.8 3 position 4 position 65 Note) Please

Compact Vacuum Unit

Latching Vacuum pump system ZB00 ZB03 ZB04 ZB05 ZB06 0.3 mm 1 to 12 stations Ejector 0.4 mm 0.5 mm 0.6 mm Manifold Features 2 Compact Vacuum Unit Series ZB RoHS How to Order Single Unit 5 L 0 2 K1 ZB 00 P1 C4 Vacuum Pump System 5 L 1 1 K1 ZB 04 P1 C4 Ejector Nominal Nozzle Size Body Type Rated Voltage 5 6 Applicable supply valve and standard supply pressure 24 VDC 12 VDC Port specification

2-Color Display Digital Flow Switch Series PFM

Dimensions PFM -C4/C6/C8/N7--X693 7 5 PFM -C4/C6/C8/N7--X694 7 5 10.2 10.2 1 43 A 43 1 IN OUT (34.2) 3 (34.2) 13 3 13 A 18 OUT 2 x 3.4 18 IN B B 48 20 48 20 2 x 3.4 One-touch fitting Applicable tube O.D.

Series: 1 (JSY1000), Type: 10 (Side-Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins, Entry Direction Adjustable), Connector Entry Direction: 1 (Upward), Valve Stations: 5 Stations, P,E Port Location: B (Both Sides, 2 to 24 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting), DIN Rail Option: 0 (DIN Rail Mounting, w

Series: 1 (JSY1000), Type: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: 0 (w/o SI Unit), SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 5 Stations, P,E Port, SUP/EXH Assembly: B (Internal Pilot, Both Sides, 2 to 24 Stations), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 1 (JSY1000), Type: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: 0 (w/o SI Unit), SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 5 Stations, P,E Port, SUP/EXH Assembly: B (Internal Pilot, Both Sides, 2 to 24 Stations), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting), DIN Rail Option: 0 (DIN Rail Mounting, w/o DIN

Series: 1 (JSY1000), Type: 10S (Side-Ported, Serial Interface, EX260), SI Unit: DA (EtherCAT - 32 Outputs - Connector M12), SI Unit Output Polarity: NPN, Positive Common, Valve Stations: 5 Stations, P,E Port Location: B (Both Sides, 2 to 24 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C6 (ø6 One-touch Fitting)

Series: JSY1000, Type: Side-Ported, Connector Type: D-sub Connector, IP40, 25 Pins, Entry Direction Adjustable, Connector Entry Direction: Upward, Valve Stations: 5 Stations, P,E Port Location: Both Sides, 2 to 24 Stations, SUP/EXH Block: Internal Pilot, A,B Port Size: ø4 One-touch Fitting, Mounting: DIN Rail Mounting, DIN Rail Option: DIN Rail Mounting, w/o DIN Rail

Series: JSY1000, Type: Side-Ported, Serial Interface, EX600, SI Unit: w/o SI Unit, SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 5 Stations, P,E Port, SUP/EXH Assembly: Internal Pilot, Both Sides, 2 to 24 Stations, A,B Port Size: ø6 One-touch Fitting, Mounting: -, DIN Rail Option: -

Series: JSY1000, Type: Side-Ported, Serial Interface, EX600, SI Unit: w/o SI Unit, SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 5 Stations, P,E Port, SUP/EXH Assembly: Internal Pilot, Both Sides, 2 to 24 Stations, A,B Port Size: ø6 One-touch Fitting, Mounting: DIN Rail Mounting, DIN Rail Option: DIN Rail Mounting, w/o DIN Rail

Series: JSY1000, Type: Side-Ported, Serial Interface, EX260, SI Unit: EtherCAT - 32 Outputs - Connector M12, SI Unit Output Polarity: NPN, Positive Common, Valve Stations: 5 Stations, P,E Port Location: Both Sides, 2 to 24 Stations, SUP/EXH Block: Internal Pilot, A,B Port Size: ø6 One-touch Fitting, Mounting: -, DIN Rail Option: -

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQ4 Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) VQ5 Dimensions VQZ Single unit Manifold VQD 2n-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M3 mounting hole ~ =4.5 ~ =4.5 M2.5 mounting hole Residual pressure release manual override Residual pressure release manual override DIN rail clamp screw

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

C4 SJ3l60-C4 SJ2l60-C4 4 onetouch fitting 4 onetouch fitting 3 position 4 position 3 position 4 position 77 48 73 61 69 44 39 42 2 position 2 position C6 SJ3l60-C6 SJ2l60-M3 6 onetouch fitting M3 x 0.5 3 position 4 position 3 position 4 position 73 69 57 65 69 46 42 Note) Please contact SMC for the weight of elbow fittings. 2 position SJ3l60-M5 M5 x 0.8 3 position 4 position 65 Note) Please

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(The standard valve has an individual exhaust for the pilot valve.) 1.12-58 Series VQZ Base Mounted Replacement Parts One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting Size Series VQZ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C8 VQZ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 VQZ3000 SY VVQ2000-51A-C6 Note) Order is accepted in

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

If 12VDC specifications are required, enter "12" at the end of the assembly part number. 1 2 1 2 P N D side SZ3000-40-6A-D For flat cable 20 pins SZ3000-40-5A-D 1 2 1 2 P N D side SZ3000-40-8A-D For flat cable 10 pins SZ3000-40-7A-D A connector block assembly can be shipped as an assembly only in the case of double wiring.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

SYA3000/5000/7000

Closed center Exhaust center Pressure center 48 SYA320-C4 M5 x 0.8 M5 x 0.8 One-touch 0.35 0.16 0.42 [0.41] 0.34 [0.37] 0.63 0.11 [0.11] 3 position fitting for 4 0.76 [0.46] 0.42 [0.34] 0.21 [0.12] 0.59 0.29 0.15 40 42 Single Double 2 position 0.30 0.19 0.65 0.39 0.76 0.17 0.55 0.24 0.60 0.33 0.76 0.16 C6 Closed center Exhaust center Pressure center 44 SYA320-C6 One-touch 0.32 0.16 0.64

SZ3000

Type of actuation Plug Plug (A) 4 (B) (2) (A) (4) (B) 2 Single Number of solenoids Common connector assembly SX100-40-4S 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Common connector assembly (With common lead wire) SX100-40-4S Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Double SS5Z3-60-04D1 set SZ3160-5MO2 sets SZ3260-5MO2 sets SX100-40-4S1 set (with common Lead wire for single solenoid) SX100-42-4S1

SZ3000

Type of actuation Plug Plug (A) 4 (B) (2) (A) (4) (B) 2 Single Number of solenoids Common connector assembly SX100-40-4S 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Common connector assembly (With common lead wire) SX100-40-4S Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Double SS5Z3-60-04D1 set SZ3160-5MO2 sets SZ3260-5MO2 sets SX100-40-4S1 set (with common Lead wire for single solenoid) SX100-42-4S1