Air Cylinder Series CA2

Volume GR-L-005 5 g GR-L-010 10 g GR-L-150 150 g 3. Do not wipe off grease from the sliding part of the air cylinder. Wiping grease from the sliding part of the air cylinder forcefully may cause malfunction. 1110

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

0.4 MPa External grip 0.4 MPa 0.3 MPa MHK 0.3 MPa 10 10 F 0.2 MPa 0.2 MPa MHS MHC 0 0 10 10 20 20 30 30 40 40 Gripping point L (mm) Gripping point L (mm) F F MHT MHS4-25D MHS4-25D MHY 50 50 Pressure 0.6 MPa Pressure 0.6 MPa MHW 40 40 F Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa -X 30 30 Internal grip 0.4 MPa 0.4 MPa 20 20 MRHQ 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 10 10 MA D0 0 10 10

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

248 237.5 216 16 Stations L1 L2 L3 L4 (Pitch) L plug connector (L) DIN terminal (D) M plug connector (M) 300 (Lead wire length) MAX. 10 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 (mm) 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3

0.4

P=17.5 1 2 3 4 5 6 7 8 n: Stations 53 Silencer cover Blanking plug (For One-touch fitting) L Dimensions 04 06 08 10 Applicable fittings size d 4 6 8 10 A A L D Model KQ2PKQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 16 18 20.5 22 32 35 39 43 6 8 10 12 It is inserted into an unused cylinder port and SUP/EXH ports.

Digital Flow Switches

Sensor 1 l/min 5 l/min 10 l/min 20 l/min 50 l/min 100 l/min 200 l/min 500 l/min Flow rate range 1 l/min 10 l/min PF2A510 0.5 l/min 10.5 l/min 5 l/min 50 l/min PF2A550 52.5 l/min 2.5 l/min 10 l/min 100 l/min PF2A511 105 l/min 5 l/min 20 l/min 200 l/min 210 l/min 10 l/min PF2A521 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Sensor Flow rate range 0.5 l/min 2

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Step Motor Controller

[m] 1 3 5 (10) (11) (30) (60) 1.5 3 5 (L) Conductor size: AWG26 Terminal no.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

End Plate EX600-ED2-l EX600-ED3-l Power connector Model specification M12 (5-pin) plug 7/8 inch (5-pin) plug 24 VDC 10%, Class 2, 2 A 24 VDC 10%, 8 A Power supply (for Control/Input) Power supply (for Output) 24 VDC +10/5%, Class 2, 2 A 24 VDC +10/5%, 8 A Enclosure IP67 (Manifold assembly) Standards CE marking, UL (CSA), RoHS recognition Weight 0.4 lbs (170 g) 0.4 lbs (175 g) EX600-ED3-l

CQS

CQSKB125D 10D 15D 20D 25D 30D M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M5 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l M5 X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M5 X 25 l X 30 l X 35 l X 40 l X 45

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A L L1 Bore size (mm) 12 16 20 25 5 st 10 st 5 st 10 st 5 st 10 st Rod end male thread 61.4 13.5 24 51.4 8.5 19 59.5 13.5 25.5 49.5 8.5 20.5 64 14.5 28.5 54 9.5 23.5 Rod end nut 65.5 15 32.5 55.5 10 27.5 Flange bracket material: Carbon steel Double clevis style: CDQ2D Double Clevis Style A B CL L Bore size (mm) 12 16 20 25 CB CD CZ CT CU CW CX 5 st 10 st 5 st 10 st 5 st 10 st 5 st 10 st

15

70 10 75 Stroke [mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 LEYG32M Load mass m [kg] Load mass m [kg] LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max

CA2

9 f l 9 f l + Stroke h + l + Stroke h + l S + Stroke h + l MB ZZ + l + 2 strokes ZZ + 2l + 2 strokes Stroke range (mm) A Bore size (mm) MB1 AL B B1 C D E F G H1 K KA J M MM N Without rod boot With rod boot 40 60 8 6 up to 500 20 to 500 30 27 22 44 16 32 10 15 M8 x 1.25 14 11 M14 x 1.5 27 CA2 50 70 11 7 up to 600 20 to 600 35 32 27 52 20 40 10 17 M8 x 1.25 18 11 M18 x 1.5 30 63 85 11 7 up

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 750 kPa 30 kPa 50 kPa 50 kPa 350 kPa 10 70 kPa 70 kPa 350 kPa 00 20 40 60 80 100 Flow [L/min] Flow [L/min] Flow Rate Characteristics (Reference Data) PF2M710(-L) PF2M705(-L) PF2M725(-L) 10 L/min 5 L/min 25 L/min 12 10 8 6 4 2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa

Compact 5-Port Solenoid Valve

Station 8 113 SOL.b SOL.a 47.04 (+) (+) () () 22 9 Station 9 SOL.b SOL.a (+) (+) () () 23 10 D-sub connector cable [IP67 compliant] D-sub connector cable [IP20/40 compliant] Station 10 Cable length (L) Assembly part no. Note Cable length (L) Assembly part no.

1

C0.5 file chamfer C WA DA F L X L R sphere F X X L R sphere TP H1 L T W1 L T L W1 L L 6-17-10 6-17-11 10 Simple Specials -XA1 to XA38: Change of Rod End Shape These changes are dealt with Simple Specials System.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Pressure Switches/ Pressure Sensors 28 L plug connector (L): 10-SYJ3143-L-M5 M8 connector (WO): 10-SYJ3143-WO-M5 M plug connector (M): 10-SYJ3143-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6

Metal Seal/Rubber Seal Series VQ Body Ported

Pitch L = 12.5 x n + 10.5 L Dimension 10 135.5 1 2 3 4 5 6 7 8 9 23 35.5 48 60.5 73 85.5 98 110.5 123 No. L dimension 20 260.5 11 12 13 14 15 16 17 18 19 148 160.5 173 185.5 198 210.5 223 235.5 248 No. L dimension 30 385.5 21 22 23 24 25 26 27 28 29 273 285.5 298 310.5 323 335.5 348 360.5 373 No.

Proposals for Energy Saving

Table 1 Display Real-time flow rate l/min Accumulated flow l, m, m x 10 ft, ft x 10, ft x 10 CFM Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min, or l, m or m x 10)]. 98 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO For Air Digital Flow Switch Series PFA 4.