Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

flange style: CBQ2G/CDBQ2G With head end lock With rod end lock Standard stroke Bore size (mm) A B L L1 A B L L1 10, 15, 20, 25 73.5 61 4.5 18.5 67 54.5 4.5 18.5 FV 20 50, 75, 100 88.5 66 14.5 28.5 88.5 66 14.5 28.5 10, 15, 20, 25 77 64 5 22.5 70.5 57.5 5 22.5 25 50, 75, 100 92 69 15 32.5 92 69 15 32.5 2-FD A + Stroke B + Stroke L FX FZ FT Standard stroke Bore size (mm) FD FT FV FX FZ 20

Made to Order

F L K P Q S SS Z ZZ CXWL20-225 116.5 239 42 90 564 227 323 550 578 CXWL20-250 264 42 90 614 252 348 600 628 129 CXWL20-275 141.5 289 42 90 664 277 373 650 678 Model F L K P Q S SS Z ZZ CXWL32-225 41 277 30 255 584 227 337 564 604 CXSJ series: 10 M L CXSJ series: 15, 20, 25, 32 M L Stroke Stroke ZZ ZZ SS SS Z Z K CXSJ 10 M L CXSJ 15 M L CXSJ 20 M L CXSJ 25 M L CXSJ 32 M L Model Stroke SS

Electric Actuator/Slider Type

Table Displacement (Reference Value) W L 0.08 LEFS32 (L = 30 mm) 0.06 Displacement [mm] LEFS25 (L = 25 mm) 0.04 LEFS16 (L = 20 mm) LEFS40 (L = 37 mm) 0.02 0 0 22.5 [100] 44.9 [200] 67.4 [300] 89.9 [400] 112.4 [500] Load W lbf [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

SY

41 Type 42 Type 43 Type 41P Type 42P Type 43P Type 45 3 port valve Air operated 3 4 5 3 4 5 M type plug connector (M): SY3 20-ML type plug connector (L): SY3 20-LC4 C6 C4 C6 Grommet .SS5Y31, #3 L type plug connector .

Battery-less

16: LEFS32(L/R)EA Lead 16: LEFS32(L/R)EA 20 10 Lead 24: LEFS32(L/R)EH Lead 24: LEFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEFS40(L/R)EB Lead 10: LEFS40(L/R)EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEFS40(L/R)EA 30 Lead 30: LEFS40(L/R)EH Lead 20

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

Table of Contents

10 20 20 20 20 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy Stainless steel Nil W

5

-6A 80 100 20 0.065 0.117 83 73 5 4 4 x 30 l Polished round 20 CDP-7A 100 25 0.065 0.117 88 78 5 4 4 x 36 l Polished round 24 Split pins and flat washers are included.

Hydraulic

x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M20 x 1.5 16 l +0.084 0 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 16 20 M24 x 1.5 20 C B-series +0.1 0 M6 x 1.0 M8 x 1.25 40 145 115 75 60 E 30 20 24 M30 x 1.5 31.5 dH10 L L +0.1 0 M6 x 1.0 M8 x 1.25 40 145 115 75 60 30 20 24 M39 x 1.5 31.5 +0.1 0 M8 x 1.25 M10 x 1.5 50 185 145 95 80 40 25

Electric Grippers

LEHZ(J)10(L) LEHZ(J)16(L) LEHZ(J)20(L) LEHZ(J)25(L) M4 x 0.7 1.4 LEHF10 LEHF20 LEHF32 LEHF40 30% (F.S.) 25% (F.S.) 20% (F.S.) Bolt Max. tightening torque [Nm] Model LEHS10(L) LEHS20(L) 30% (F.S.) 25% (F.S.) 20% (F.S.) LEHS32 LEHS40 LEHS10(L) LEHS20(L) LEHS32 LEHS40 M3 x 0.5 0.9 M3 x 0.5 0.9 5.

CQS

CQSKB125D 10D 15D 20D 25D 30D M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M5 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l M5 X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M5 X 25 l X 30 l X 35 l X 40 l X 45

ISO Cylinder

b g (k) l3 j e (l) c d7 d6 h [mm] [mm] Bore size Part no. b c d f g j k e l 8 GKM4-8 4 8 16 4 8 8 11 M4 x 0.7 21 10 GKM4-8 4 8 16 4 8 8 11 M4 x 0.7 21 12 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 16 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 20 GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

gripping point L = 20 mm, for 32 to 63 with gripping point L = 30 mm, and for 80 with gripping point L = 50 mm.

Table of Contents

K B1 B2 Hexagon width across flats 22 A B1 N B2 3-Rc P B1 Bracket H J K L M L M L M L M N N Grommet Conduit DIN terminal Conduit terminal Electrical entry Port size P Rc , , , B Mounting A C D E F Model 22.5 B1 B2 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 14.5 17 17 6 7.5 7.5 23 25.5 28 46.5 55 62 39 41.5 44.2 38.5 47 55 59 60 62 18 21 21 20 20 20 74.5 90 98 30 35 40 19 25 25 20 23

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

voltage suppressor 3 4 5 3 position closed centre/exhaust centre/pressure centre Grommet (G), (H): SY3 20-Q G H SY3 20-M5-Q G H 3 4 5 Scale: 40% C4 C6 SV SY SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 3 4 5 3 4 5 M type plug connector (M): SY3 20-M-Q L type plug connector (L): SY3 20-L-Q C4 C6 C4 C6 VQZ VQD VFS VS VS7 VQ7 1.2-17 Body Ported Type Series SY5000 Dimensions Note)< >: Values

smcmaintenancepartslist

Basic style Rod seal Piston seal NBR 12 16 20 25 CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS Tube gasket Long stroke 12 16 20 25 CQSB12-L-PS CQSB16-L-PS CQSB20-L-PS CQSB25-L-PS Set of left nos. !5, !6, !7. Seal kit includes !5, !6, !7. Order the seal kit, based on each bore size. (The long stroke type includes 2 tube gaskets.)

Electric Actuator

) upper limit Suction flow rate: 0 L/min Suction flow rate: 0 L/min 100,000 100,000 Particle concentration [particles/m3] Particle concentration [particles/m3] Suction flow rate: 20 L/min ISO Class 5 (Class 100) upper limit 10,000 10,000 Suction flow rate: 40 L/min ISO Class 4 (Class 10) upper limit ISO Class 4 (Class 10) upper limit 1,000 1,000 Suction flow rate: 20 L/min Suction flow rate

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

plug connector (L) VZ3 20-L-M5 M plug connector (M) VZ3 20-M-M5 3 4 5 3 4 5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor Built-in One-touch fittings VZ3 20-DIN terminal (D) VZ3 20-D-M5 3 4 5 3 4 5 C4 C6 MAX. 10 2-One-touch fitting (A, B port) Applicable tubing model C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 C4: T0425 C6: T0604 3-3-23 23

Air Cylinder Series CA2

H H + Stroke B C ZZ + 2 Stroke CJ2 CM2 e e e d d CG1 f 10.2 10.2 l l + Stroke f l f 10.2 h + l h + l + Stroke S + Stroke h + l MB ZZ + l + 2 Stroke ZZ + 2l + 2 Stroke (mm) MB1 Stroke range (mm) A Bore size (mm) 40 50 63 80 100 AL B B1 C D E F G H1 J K KA M MM N Without rod boot With rod boot CA2 Up to 500 20 to 500 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 11 M14 x 1.5 27 Up to 600 20

CA2

9 f l 9 f l + Stroke h + l + Stroke h + l S + Stroke h + l MB ZZ + l + 2 strokes ZZ + 2l + 2 strokes Stroke range (mm) A Bore size (mm) MB1 AL B B1 C D E F G H1 K KA J M MM N Without rod boot With rod boot 40 60 8 6 up to 500 20 to 500 30 27 22 44 16 32 10 15 M8 x 1.25 14 11 M14 x 1.5 27 CA2 50 70 11 7 up to 600 20 to 600 35 32 27 52 20 40 10 17 M8 x 1.25 18 11 M18 x 1.5 30 63 85 11 7 up