High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

200 LEY 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60

5

30 34 30 31 30 30 30 30 30 37.5 35 42.5 33 37 71.5 81.5 38.5 31.5 38 31.5 73 69 81 69 50 34 34 38 34 35 34 34 34 34 34 41.5 39 46.5 37.5 42 76.5 86.5 42 35.5 42 35.5 78.5 77 86.5 77 63 41 41 44 41 41.5 41 41 41 41 41 50 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 80 49.5 49 52.5 49 50 49 49.5 49 49.5 49 58 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 61 56

Guide Cylinder Series MGG

(mm) Bore size (mm) 63 80 100 Stroke range (mm) B C D E F G H I J K L M N A AA AB AC AD AE AF AP 200 228 30 140 200 13.5 65 117 135 180 66 100 25 25 15 170 50 60 20 depth 14.5 M16 x 2 depth 28 M12 x 1.75 depth 24 75, 100, 125 150, 200 250, 300 230 262 30 170 234 13.5 75 138 160 214 76 115 30 27 15 200 55 70 20 depth 14.5 M16 x 2 depth 28 M12 x 1.75 depth 24 280 304 35 210 274 15 85 153 190

CY1

CY1R6 CY1R32 400 300 200 40 30 20 H Allowable driving force Fn (N) Allowable driving force Fn (N) 2. Find the distance Lo (cm) from the point of the load where driving force is applied, to the center of the cylinder shaft. 100 H H 20 30 40 50 10 L Useable range 5 3.

C76

AM C e f K KK Stroke Bore 51 to 100 101 to 150 102 113 151 to 200 115 126 201 to 300 140 151 301 to 400 165 176 401 to 500 190 201 32 40 90 101 12 14 35 46 30 35 10 12 M10 x 1.5 M12 x 1.75 20 24 Item I Wh Bore Stroke 1 to 50 12.5 12.5 51 to 100 25 25 101 to 150 37.5 37.5 151 to 200 50 50 201 to 300 75 75 301 to 400 100 100 401 to 500 125 125 1 to 50 57 64 51 to 100 70 77 101 to 150 82 89

C76

0 0.033 32 40 M30 x 1.5 G 1/8 30 58 23.8 10 9 12.2 M10 x 1.5 38 0 0.039 M38 x 1.5 G 1/4 35 69 28.3 12 M10 x 1 12 14.2 M12 x 1.75 With Rod Boot (mm) AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to

Series AP500

40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa 00

LEY-OM007

] [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.181.25 1.42 1.68 1.86 2.03 2.21 2.382.56 2.09 2.20 2.49 2.77 3.17 3.46 3.74 4.03 4.32 4.60 4.89 LEY 16 D LEY 25 D LEY 32 D [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg)

5-Port Solenoid Valve

SY7000221-1A [for 10 valves (30 pcs.)] SY7000222-1A [for 10 valves (30 pcs.)]

Combination Cylinder

25 28.5 33 35 40 40 50 178 193 196 221 30 30 35 35 16 17 17 17 55 62 62 70 198 215 218 241 11 11 11 12 to 200 to 300 to 300 to 300 0.25 Stroke 105.5 Long stroke/Refer to p.3.1-28 and 3.1-29 for mounting dimensions except table below.

Electric Grippers

Pushing force 100% Gripping force F [N] 120 Basic 70% 110 100 90 80 70 60 50 40 30 0 20 10 30 40 50 60 Pushing force/Trigger level [%] 80 Pushing force and trigger level range 40% 40 0 0 50 100 150 200 250 Gripping point L [mm] LEHZ40 Pushing speed [mm/sec] Gripping force accuracy: 20% (F.S.) 250 Compact Pushing force 100% Gripping force F [N] 200 110 100 90 80 70 60 50 40 30 0 20 10 30 40

CL

1.25 M14 x 1.5 Up to 200 Up to 300 Up to 300 Up to 300 15.5 19.5 19.5 27 M4 x 0.7 depth 7 4 5 5.5 6 6 8 8 10 12 16 10 14 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40

AC Servo Motor Driver (CC-Link Type ）

OFF: Lock is activated. 4 30 4.

MLGP

m (kg) Load weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40

MLGP

m (kg) Load weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40

Membrane Air Dryer

pressure dew point (oC) Outlet air atmospheric pressure dew point (oC) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 P1 = 0.5 MPa 10 P1 = 0.5 MPa 10 P1 = 0.7 MPa P1 = 0.7 MPa 20 20 30 IDG30A IDG20 IDG30HA 30 IDG20H 40 50 40 0 100 200 300 400 500 0 100 200 300 Outlet air flow rate (L/min [ANR]) Outlet air flow rate (L/min [ANR]) IDG50A, 50HA IDG60, 60H Outlet air atmospheric pressure dew point (oC) Outlet

IDG

200 300 400 500 AMG Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) AFF IDG50 (Type B products group) IDG60 (Type A products group) AM 0 P1 = 0.3 MPa P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) Misc. 10 10 P1 = 0.5 MPa P1 = 0.5 MPa 20 20 P1 = 0.7 MPa P1 = 0.7 MPa 30 30 40 40 50 50 0 200 400 600 800 0 200

Rotary Table/

Size: 10 to 50 Size: 1 to 7 Size: 70 to 200 Note) Only sizes 10, 20, 30 and 50 are available in clean series.

5 Port Solenoid Valve Series VQZ1000/2000/3000

or less 25 or less 30 or less 30 or less 18 or less 20 or less 10 or less 12 or less 28 or less 30 or less 28 or less 30 or less 28 or less 30 or less 21 or less 33 or less 10 or less 15 or less 33 or less 35 or less 33 or less 35 or less 33 or less 35 or less 12 or less 12 or less 10 or less 10 or less 20 or less 25 or less 20 or less 25 or less 25 or less 14 or less 15 or less 10 or less

Table of Contents

BG F 1N X430 03 AR 30 BG F N X425 03 Regulator Regulator For high/low temperature Body size Body size For high pressure 25 30 40 50 60 20 25 30 40 50 60 X430 X440 Low temperature High temperature Thread type Thread type Rc NPT G Rc NPT G Nil N F Nil N F Port size Port size Body size Port size Body size Symbol Port size Symbol 25 30 40 50 60 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04