Basic type / Direct mount type Series CY3B/CY3R

, 200 300 Amount of Adjustment for Adjusting Bolt and Shock Absorber 50, 100, 150, 200, 250, 300 500 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 20 25 32 40 750 1000 Plate B Plate A Adjusting bolt 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 CY3B CY3R 1500 CY1S Shock absorbers 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 900, 1000 1500 CY1L Note) Intermediate

CG1

(33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) A A A A A HS A HS HS B 15 (22.5) 15 (22.5) 15.5 (23.5) 18 (27) 22.5 (34.5) 22.5 (34.5) 31 (45) 31 (45) CA1 20 24 27.5 29 25.5 30 24.5 27 27 27.5 CS1 25 24 27.5 29 25.5 30 27 27 29.5 30 32 25 28.5 30

Table of Contents

24 stations Max. 24 stations.

CA2

Bore size (mm) Standard stroke (mm) 2040 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Intermediate strokes not listed above are also available.

0.4

Station 6 Station 12 Station 18 Station 24 CP Station 7 Station 13 Station 19 S (For P, J kit) VVQZ2000 SSQ1000 4 B P 1 150 For station 1 kit

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors +24 V +24 V Power supply for output Power supply for output 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V 4. Do not install a unit in a place where it can be used as a foothold.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

2.78 2.18 125 (1 1/4") 3/8-24 3.78 0.375 3.38 2.66 3.53 3.13 2.41 150 (1 1/2") 3/8-24 3.75 3.37 2.69 0.375 3.63 3.25 2.57 6-14-18 19 Series NCM Dimensions: Single Acting, Spring Extend Rod side nose mounting Spring extend: NCMB-T ZB1 + ZC per 1" of stroke B dia. pilot NCMB150 MM dia.

MY1

Mass m Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 5mm 0mm 65mm 0.88kg 210 65 111 Z Wb 42.5mm 0mm 150mm 4.35kg 150 Wc 42.5mm 111mm 150mm 0.795kg Wd 42.5mm 210mm 150mm 0.5kg Y 42.5 5 n = a, b, c, d 3 Composite center of gravity calculation m = mn = 0.88 + 4.35 + 0.795 + 0.5 = 6.525kg 1 m X = x (mn x Xn) 1 6.525 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 0.5 x 150) = 138.5mm 1 m Y = x (mn x yn

CL

24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

137.5 123 12.5 6 160.5 150 133.5 13.5 7 173 162.5 144 14.5 8 185.5 175 154.5 15.5 9 198 187.5 165 16.5 10 210.5 200 175.5 17.5 L1 L2 L3 L4 L1 L2 L3 L4 388 Cassette Type Manifold 10-SZ3000 Dimensions: 10-SZ3000 for Plug-in 10-SS5Z3-60FD B1 2 Stations [With External Pilot Specifications] One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8, 5/16" 13.3 (Pitch) P = 10.5 24 13.3 24 36.7

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

, 15/60 Hz Refer to pages 3-3-24 to 3-3-27 for manifold use.

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

Guide Cylinder Series MGG

(mm) Bore size (mm) 63 80 100 Stroke range (mm) B C D E F G H I J K L M N A AA AB AC AD AE AF AP 200 228 30 140 200 13.5 65 117 135 180 66 100 25 25 15 170 50 60 20 depth 14.5 M16 x 2 depth 28 M12 x 1.75 depth 24 75, 100, 125 150, 200 250, 300 230 262 30 170 234 13.5 75 138 160 214 76 115 30 27 15 200 55 70 20 depth 14.5 M16 x 2 depth 28 M12 x 1.75 depth 24 280 304 35 210 274 15 85 153 190

AC Servo Motor Driver (CC-Link Type ）

Here, RY(n 2)B is turned OFF since the position data are handled as absolute values. 5 24 5.

Step Motor Controller

Back page 1 Controller LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Step data input type Page 13 Step Motor (Servo/24 VDC) Series LECP6 Page 24 Programless type Precautions Step Motor (Servo/24 VDC) Series LECP1 12 Controller (Step data input type) Step Motor (Servo/24 VDC) Series LECP6 RoHS How to Order LE C P 6 N Actuator part number Controller (Except cable

Hydraulic Filters

(including O-ring for element) With relief valve Without relief valve 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) Model Element size FH990-04/06 FH990-08/10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28/32 EM520-074N EM620-074N EM720-074N EM820-074N EM920-074N EM030-074N EM130-074N EM520-105N EM620-105N EM720-105N EM820-105N EM920-105N

Environment

VDC) Servo motor (24 VDC) Step motor (Servo/24 VDC) Maximum number of step data 64 points 14 points Power supply voltage 24 VDC Reference page Page 560 Page 560 Page 600 Page 576 Page 590 487 A LEY-X5 Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Dust-tight/Water-jet-proof (IP65 Equivalent) Specifications Step Motor (Servo/24 VDC) Model LEY25 LEY32 Stroke [mm] Note 1) 30, 50, 100

Compact

VDC) Maximum number of step data 14 points (2 stroke end points + 12 intermediate points) 14 points 64 points Power supply voltage 24 VDC Reference page Page 583 Page 576 Page 560 Page 600 179 LEMB Series Step Motor (Servo/24 VDC) Specifications Step Motor (Servo/24 VDC) Model LEMB25 LEMB32 50, 100, 150, 200, 250 300, 350, 400, 450, 500 550, 600, 700, 800, 900 1000, (1100), 1200, (1300)

ZP

8 14 40 33 20 52 7 17 150 250 155 40 4 x 14 4 x 9 88 4 x 16 4 x 10 34 Symbol/Type HB: Heavy-duty (Bellows) Heavy-duty Pad 32, 150 Pad diameter For heavy or large work pieces How to Order ZP2 32 HB N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 Symbol Material NBR Silicone rubber FKM CR 32 150 N S F C Note) Silicone rubber is only applicable to the 32 pad.

Slider Type Ball Screw Drive/11-LEFS Series

VDC) Servo motor (24 VDC) Step motor (Servo/24 VDC) Max. number of step data 64 points 14 points Power supply voltage 24 VDC Reference page Page 560 Page 560 Page 600 Page 576 Page 590 515 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Specifications Step Motor (Servo/24 VDC) Model 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 Stroke [mm] Note 1) 50 to 500