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200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow

MGP

63 MGPA -400 50 63 0.6 Plate displacement mm Plate displacement mm 0.3 50 63 MGPA -300 50 63 MGPA -300 0.5 MGPA16-150 MGPA16-150 MGPA16-100 0.25 MGPA16-100 0.4 50 63 MGPA -200 50 63 MGPA -150 50 63 MGPA -100 50 63 MGPA -200 0.2 MGPA16-75 MGPA16-75 50 63 MGPA -150 0.3 0.15 50 63 MGPA -100 MGPA16-50 MGPA16-50 0.2 0.1 MGPA16-10 MGPA16-10 0.1 0.05 50 63 MGPA -50 50 63 MGPA -50 0 0 0 10 20 30

AC Servo Motor Driver

PB21 For manufacturer setting 0.00 PB22 Do not change this value by any means. 0.00 5 26 5. PARAMETERS Control mode No.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

225 48 200 213 4 175 188 15 150 163 313 125 138 288 23 100 113 263 36 75 100 238 54 12.5 37.5 50 88 75 250 225 54 200 213 4 175 188 17 150 163 313 125 138 288 23 100 113 263 36 75 100 238 54 12.5 25 37.5 50 88 87 250 225 69 200 225 5 175 200 24 150 175 325 125 150 300 25 100 125 275 51 75 112 250 64 12.5 25 37.5 50 100 87 250 225 69 200 225 5 175 200 24 150 175 325 125 150 300 25 100 125

LJ1H

Applicable strokes:150, 250, 350, 450, 550, 650, 750, 850, 950, 1050 Example) LJ1S2021SC-150-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Mounting orientation Load movement direction Model Pitching Rolling Yawing 5.5 6.0 8.5 a = 500 LJ1S20 150 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a a = 1000 L1 (mm) L2 (mm) L3 (mm) 100 a = 2000 Pitching Rolling

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Standard Stroke Bore size (mm) Standard stroke (mm) Manufacturable Note) maximum stroke (mm) 6 300 50, 100, 150, 200 10 500 50, 100, 150, 200, 250, 300 50 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 6000 63 Note) Please contact SMC if it is used by exceeding the maximum stroke length.

REA/REB

Content 15 CYR15EAbove numbers 26, 27, 28, 29, 30 25 CYR25E32 CYR32ENote 1) indicates the stroke.

Sine Rodless Cylinder Series REA/REB

CYR10E25 , 26 , 27 , 28 (2) 15 CYR15EAbove nos. 27 , 28 24 , 25 , Note 1) indicates the stroke. Note 2) 15 has internal magnets in the body. 946 Sine Rodless Cylinder Direct Mount Type Series REAR Construction: 20 to 40 8 9 4 5 7 6 3 1 25 23 21 22 11 12 13 18 14 20 30 26 15 19 10 24 2 27 28 29 17 16 Component Parts Component Parts No. Description Material Note No.

Series VQ Metal Seal/Rubber Seal Body Ported

6.3 (0.35) 15 or less 20 or less Metal seal VQ1340 4.5 (0.25) 20 or less 26 or less Closed center 57 VQ1000 Rubber seal VQ1341 6.3 (0.35) 25 or less 33 or less Metal seal VQ1440 4.5 (0.25) 20 or less 26 or less Exhaust center Rubber seal VQ1441 6.3 (0.35) 25 or less 33 or less Metal seal VQ1540 4.5 (0.25) 20 or less 26 or less Pressure center Rubber seal VQ1541 6.3 (0.35) 25 or less 33 or

MXS

40 50 75 100 125 150 10 MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 100 115 155 180 80 10 5 30 13+0.15S 160 190 235 285 150 35 15 45 9 40 40 415 26+0.17S 340 340 400 500 340 50 30 60 20 80 90 930 690 43+0.21S 600 610 670 800 600 80 50 105 30 120 160 1800 1450 1150 55+0.21S 1020 1050 1150 1300 1000 170 100 205 71 140 310 3350 2800 2250 1700 166+0.45S 1740 1750 1900 2160 1720 215 150 300 125 240 540

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150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 HA AT ID AMG AFF AM Misc. 14-15-3 1 Water Cooled Aftercooler Series HAW Model/Standard Specifications Series HAW can cool high temperature compressed air from compressors down to 40C or less and efficiently remove moisture from the air.

Air Slide Table Series MXQ

Solid State Auto Switch: D-M9B, D-M9N, D-M9P, D-M9BW, D-M9NW, D-M9PW Stroke B Stroke E Model A 10 20 30 40 75 100 125 150 10 20 30 125 75 100 40 50 150 50 B MXQ6 0.5 0.5 0.5 7.5 7.5 9.5 9.5 9.5 17.5 17.5 10 MXQ8 26 2 2 6 10 25 12 12 16 20 36 35 11.5 MXQ12 34.5 34.5 18.5 8.5 8.5 15.5 15.5 28.5 18.5 18.5 25.5 44.5 44.5 25.5 15.5 MXQ16 27.5 45.5 45.5 24.5 14.5 14.5 14.5 20.5 34.5 24.5 24.5

MXS Series Air Slide Table

54.5 28 A 15 54.5 24.5 80 24.5 (mm) Stroke adjustable range Retracting 5 15 25 35 30 15 35 35 35 A dimension (Retracted side mounting) Extending Model Shock absorber at retraction end MXS25-10 MXS25-20 MXS25-30 MXS25-40 MXS25-50 MXS25-75 MXS25-100 MXS25-125 MXS25-150 26 36 46 46 43 27 48 46 46 Stroke 100 to 150 A Shock absorber at extension end Max. 35 Shock absorber at retraction end Dimensions

Air Slide Table Series MXS

end Shock absorber 10 20 30 40 50 75 100 125 150 Extension end Retraction end MXS6 (L) MXS8 (L) MXS12 (L) MXS16 (L) MXS20 (L) MXS25 (L) 10 5 30 180 155 115 100 80 13+0.15S -X 15 35 9 45 40 40 410 285 235 190 160 150 26+0.17S 30 50 20 60 80 90 890 660 480 385 325 325 325 43+0.21S Individual -X 50 80 30 105 120 160 1700 1370 1090 760 640 580 570 570 55+0.21S 100 170 71 205 140 310 3190

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

(mm) BF VA 4H9 4H9 5H9 6H9 6H9 ZD 6 10 12 16 20 UC M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 ZH M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 ZG 15 16 18 22 26 ZF 20 21 28 32 41 BG ZE 5 8 10 14 17 CC 9.5 13.5 17.5 20 25 VB 4 4 5 6 6 AJ 9 9 11 13 13 UE 5.5 5.5 6.6 8.6 8.6 AH 9 12 15 18 20 UD 10 10 12 16 16 AG 26 27 33 35 45 FX 22 26 32 40 50 AF 35 36 44 48 58 BE 30 38 48 58 68 ZJ 3.5 4.5

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Clean appearance The flat cable provides wiring on a printed circuit board to the individual valves at the manifold base, enabling the consolidation of external wiring at a touch through a 26 pins MIL connector.

Vacuum Pad

Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10

Vacuum Pad

Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10

Vacuum Pad

Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10

Vacuum Pad

Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10