Table of Contents B With switch rail Q + Stroke Z + Stroke HR Plug RS H A RZQ 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction A MI W S 12.5 19.5 16 CEP1 CE1 Plug CE2 REBR15 REBR15 ML2B (mm) C J G5-S A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15 12 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 CV REBR25 12.5 9.5 5.2 3 1
Rod Side Trunnion Style (U) CM2U P Bore size Stroke 20 20 25 P P (Head side pressure port) (Head side pressure port) P P Width across flats B2 Width across flats B1 (Rod side pressure port) (Rod side pressure port) 32 to 40 NN Width across flats KA P (Head side pressure port) H1 I TD G G TY D Q K A AL TX TZ MM QY NA P TT N S + Stroke ZZ + Stroke H Z N (Rod side pressure port) D(mm) A AL B1
SIGNALS AND WIRING (Note 2) I/O signals in control modes Related parameter P P/S S S/T T T/P Pin No.
(EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 3 position pressure center 2(B) (A)4 Light/Surge voltage suppressor 5 Electrical entry for D, Y (10-SY500/7000 only) Electrical entry for G, H, L, M, W (EA)5 1 (P) 3(EB) Nil S Z Nil S Z R U Without light/surge
closed center: VFR630 -F(Z) 3 position exhaust center: VFR640 -F(Z) 3 position pressure center: VFR650 -F(Z) 0 1 0 1 0 1 2 position double: VFR620 -F(Z) 263 3-2.3 146 93 (Electrical entry) 45 117 A B A B 72 90 108 PE EA EB PE P Manual override 170 186 4-9 (Mounting hole) (Non-locking) G 1/2 Light/Surge voltage suppressor (For FZ) Other dimensions are the same as the single type. 3-5-97
1 0 0 / 2 0 0 / 3 0 0 B A S E M O U N T E D P L U G L E A D T Y P E 5 VQZ P O R T S I Z E {2(A) P O R T} : VQZ100 Symbol Port Size CP Without Sub-Plate 01 Rc(PT)1/8 S E R I E S 1 VQZ100 Body Width 10mm 2 VQZ200 Body Width 15mm 3 VQZ300 Body Width 18mm P O R T S I Z E {4(A), 2(B) P O R T} : VQZ200/300 Symbol Port Size Without Sub-Plate (VQZ1000/2000/3000) 01 Rc(PT)1/8 (VQZ1000/2000) 02 Rc(
Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-
48 R P R P R P VS Refer to page 4-4-61 for dimensions with connector cable.
P P P P P P Rc1/8 NPT1/8 G1/8 P P P P P P Rc1/4 NPT1/4 G1/4 P P P P P P Rc1/4 NPT1/4 G1/4 P P P P P P Rc3/8 NPT3/8 G3/8 P P P P P P Rc3/8 NPT3/8 G3/8 P P P P Through-hole (Std.)
ARBY3000 Series SY3000 Series SY5000 00 2 P ARBY5000 Regulated port Regulated port Pressure gauge connecting port Pressure gauge connecting port P port A port (P port control type A port regulated) B port (P port control type B port regulated) P port A port (P port control type A port regulated) B port (P port control type B port regulated) P A1 B1 P A1 B1 Pressure gauge (G15-10-01) Plug
For the allowable voltage fluctuation for S, Z and T types (with power saving circuit), please observe the following range because they have voltage drop due to internal circuit. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position pressure center 3 position pressure center S and Z types 24 VDC: -7% to +10% 12 VDC: -4% to +10% T type 24 VDC: -8% to +10% 12 VDC: -6% to +10% (B) 2 (A) 4 (B) 2 (A) 4 Bracket
D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.
Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.
Operating pressure P (MPa) P 0.7 MPa MTS 4.
Wall mounting z P. 26 P. 58 y x y Wa: Connection plate t = 10 (880g) x z MY1C40-500 3. Ceiling mounting 4.
4 port base mounted 10-SYJ3000 Common SUP/Common EXH Common SUP/ Individual EXH R P A P. 299 B Type 32 4 port base mounted 10-SYJ3000 P R A P. 299 B Type 40 5 port base mounted 10-SYJ5000 P. 327 10-SYJ7000 P. 357 Type 41 10-SYJ3000 5 port base mounted P. 299 10-SYJ5000 P. 327 10-SYJ7000 P A P. 357 B Type 42 5 port base mounted 10-SYJ5000 P. 327 10-SYJ7000 B B R P A P. 357 Type 43 5 port
wire (NPN) 3-wire (PNP) P P A96V A96 s s s s 5V p P P F9NV F9N IC circuit 5V 12V p P P F9PV F9P s p P P 12V F9BV F9B 2-wire s Relay PLC Grommet Yes 24V s 3-wire (NPN) 3-wire (PNP) p P P F9NWV F9NW Diagnostic indication IC circuit 5V 12V p P P F9PWV F9PW 2-color display p P P F9BWV F9BW 2-wire 12V s Lead wire length symbols 0.5m/ Nil (Example) F9NW 3m/ L F9NWL 5m/ Z F9NWZ Solid state switches
P 2 x P (Hexagon socket head taper plug) MY2H TT UU Cushion needle TT UU 1 0 (Port) G NW P 2 x P (Hexagon socket head taper plug) A GB MW MY3A MY3B (Hexagon socket head taper plug) N Z + Stroke MY3M WW WW P (Hexagon socket head taper plug) P XX XX (Hexagon socket head taper plug) P P (Port) (Port) Centralized piping type 2 x ZZ (Hexagon socket head taper plug) 2 x ZZ (Hexagon socket head
Driver for Non-standard Motor Regenerative Absorption Unit Series LC7R Teaching Box Dedicated AC Servomotor Controller Series LC1 P. 205 P. 200 P. 185 P. 196 Features 5 Electric Actuator Line-up of Products Short Stroke Electric Actuator Series LX Series LX Stepper motor High Rigidity Slide Table Type Series LXS Low Profile Slide Table Series LXF Guide Rod Type Series LXP P. 250 P. 210 P
Rod Trunnion (U) CM2U Bore size P Stroke 20 20 25 P P (Head side pressure port) (Head side pressure port) P P Width across flats B2 Width across flats B1 (Rod side pressure port) (Rod side pressure port) 32 to 40 NN Width across flats KA 0.025 0.061 P (Head side pressure port) H1 I TD G G NA TY D Q TT N K A AL TX TZ MM QY NA P H Z N (Rod side pressure port) S + Stroke ZZ + Stroke (mm) Bore