reduces flow setting time

30.2 (30.3) 23 (24) AS221FS-02-03 (S) 5/32" 8.2 AS221FS-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FS-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FS-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8"

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

20.9 30.2 (30.3) 23 (24) AS221FSG-02-03 (S) 5/32" 8.2 AS221FSG-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FSG-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FSG-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FSG-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FSG-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-02-

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

AS22l1FG-02-03(S)A 5/32" 8.2 AS22l1FG-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 18 (18) AS22l1FG-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 19 (20) AS32l1FG-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS32l1FG-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS32l1FG

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

ASS Dimensions ASR AS220M-01 02 AS120M ASF H 8 (Hexagon width across flats) L1 T2 24.8 (MAX. 29.8) 28.2 (MAX. 33.2) M5 x 0.8 L2 A L3 D1 9 10.3 10 M5 x 0.8 10-32 UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 D1 D2 Model Min. Min. Max. Max.

Prevents Micro-Bubbles

A (OUT) port A A LLH2A-03-02-C 1 set 1 set Manifold base part no. Non-locking Locking LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.

Series AS-FM/AS-M/ASD-FM

Dimension AS220M01 02 AS120M H (width across flats) 8 L1 T2 24.8 (Max. 29.8) M5 x 0.8 28.2 (Max. 33.2) L2 A D1 9 10.3 L3 10 M5 x 0.8 10-32UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 Model D1 D2 Min. Min. Max. Max.

High Purity Chemical Valve

Dimensions LLAmA-mm-C Stations 4 x Mounting hole for W Y Dimensions (mm) A S K Model LLA2A LLA3A LLA4A LLA5A 11.5 L1 24 L2 L3 29 Sensor (Breathing port) U 34.5 2 x R (mm) H G Station 2 3 4 5 Model C Symbol P N L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3 62 93 124 155 E V LLA2A 75 106 137 168 Pitch = B A (OUT) port n x Q 118 149 180 211 P (IN) port 2 x Q 74 111 148 185 (Max.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

L2 Metric Size L5 (1) A (2) M1 Weight (g) d T Model H D1 D2 D3 L1 L2 L3 L4 Max.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

connector (20 pins) PH: Flat cable connector (10 pins) Connector entry direction Note Symbol 02 Note Symbol 02 Stations Stations 1: Perpendicular connector 2: Lateral connector 2 stations 2 stations Double wiring specification ... ... ... ... ... ...

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

AS-F L3 Applicable tubing O.D. d D1 TMH M1 ASD AS L6 D2 AS-FE L1 KE AS-FG D4 AS-FP L4 AS-FM H AS-D AS-D (Hexagon width across flats) AS-T D3 ASP D4 ASN A1 L5 AQ A2 L6 ASV AK VCHC T ASR ASQ Metric Size d Model H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 A1 A2 M1 T Weight (g) 17 ASD230F-M5-04D ASD230F-M5-06D ASD330F-01-06SD ASD330F-01-08SD ASD430F-02-06SD ASD430F-02-08SD ASD430F-02-10SD ASD530F-02-06SD

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

ASD430F-02-06ST ASD430F-02-08ST ASD430F-02-10ST ASD530F-02-06ST ASD530F-02-08ST ASD530F-02-10ST ASD530F-02-12ST ASD530F-03-06ST ASD530F-03-08ST ASD530F-03-10ST ASD530F-03-12ST ASD630F-04-10ST ASD630F-04-12ST 12.9 13.7 13.7 18.5 17 18.5 21 17 18.5 21 22 17 18.5 21 22 21 22 17.5 20.6 22.9 28.2 25.2 28.2 31 25.2 28.2 32.6 34.4 25.2 28.2 32.6 34.4 32.6 34.4 29.4 32.5 38.5 44.8 43.5 46.5 49.3

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Elbow type Meter-out AS3201F-02 Meter-out AS3311F-02 Meter-out AS3301F-02 Component Parts Component Parts No.

VZS

M plug connector 2 position double: VZS3250-M(Z)-01 02 3 position closed center: VZS3350-M(Z)-01 02 3 position exhaust center: VZS3450-M(Z)-01 02 3 position pressure center: VZS3550-M(Z)-01 02 DIN terminal 2 position double: VZS3250-D(Z)-01 02 3 position closed center: VZS3350-D(Z)-01 02 3 position exhaust center: VZS3450-D(Z)-01 02 3 position pressure center: VZS3550-D(Z)-01 02 164 (3 position

SZ3000

L2 5 (Rail mounting hole pitch 12.5) L1 (Station n).

AC Servo Motor Driver (Pulse input type/Positioning type ）

(a) Delta connection For the 3-phase (L1/L2/L3) delta connection, an instantaneous power failure occurs in the voltage between a pair of lines (e.g. between L1 and L2) among voltages between three pairs of lines (between L1 and L2, L2 and L3, or L3 and L1).

Compact Manifold Regulator Series ARM5

L2-10.5 L1=(28 x n)+36 18 28 28 5.3 L2 dimension DIN rail part no.

VM

plunger VM220-02-05 VM230-02-05 Polyacetal roller Hard steel roller Roller plunger VM220-02-06 VM220-02-06S VM230-02-06 VM230-02-06S Cross roller plunger VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Polyacetal roller Hard steel roller Toggle lever VM220-02-08 VM230-02-08 VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y VM220-02-30R VM-30AR Red Push button (Mushroom) VM-30AB Black

30

(mm) Connection thread Rc T (M) Width across flat M Weight (g) Mounting hole L1 L2 Model H1 H2 KQB2E23-02 KQB2E04-01 KQB2E04-02 KQB2E06-01 KQB2E06-02 KQB2E06-03 KQB2E08-01 KQB2E08-02 KQB2E08-03 KQB2E10-02 KQB2E10-03 KQB2E12-03 KQB2E12-04 KQB2E16-03 KQB2E16-04 3.2 3.4 1/4 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 3/8 1/2 3/8 1/2 17 14 17 11 12 31 25.8 30.9 24.2 31.6 33 26.3 32.4 34 31.6 33.6

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Body side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O. Sub-plate side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O.

Table of Contents

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.