High Purity Chemical Valve

Dimensions LLAmA-mm-C Stations 4 x Mounting hole for W Y Dimensions (mm) A S K Model LLA2A LLA3A LLA4A LLA5A 11.5 L1 24 L2 L3 29 Sensor (Breathing port) U 34.5 2 x R (mm) H G Station 2 3 4 5 Model C Symbol P N L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3 62 93 124 155 E V LLA2A 75 106 137 168 Pitch = B A (OUT) port n x Q 118 149 180 211 P (IN) port 2 x Q 74 111 148 185 (Max.

Series AS-FM/AS-M/ASD-FM

Dimension AS220M01 02 AS120M H (width across flats) 8 L1 T2 24.8 (Max. 29.8) M5 x 0.8 28.2 (Max. 33.2) L2 A D1 9 10.3 L3 10 M5 x 0.8 10-32UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 Model D1 D2 Min. Min. Max. Max.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number

AC Servo Motor Driver (Network card type ）

(a) Delta connection For the 3-phase (L1/L2/L3) delta connection, an instantaneous power failure occurs in the voltage between a pair of lines (e.g. between L1 and L2) among voltages between three pairs of lines (between L1 and L2, L2 and L3, or L3 and L1).

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

VCHC AS1201F, AS1211F AS2201F-01, AS2211F-01 AS2201F-02, AS2211F-02 ASR ASQ Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations AS4201F, AS4211F AS3201F, AS3211F Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (L/

0.

port) 1/4, 3/8 [1(P), 3(R) port] 13 (14) 21 (19) 47 ( ): VQZ315-lGl1-01 L-type plug connector (L): VQZ3l5l-lLl1DIN terminal (Y): VQZ3l5l-lYll102 03 02 03 86.1 [88.3] (Lead wire length) Approx. 300 57 [64] Max. 10 94 54.1 Pg7 Applicable cable O.D. 3.5 to 7 Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC 86.3 78.8 67.5 02 03 M-type plug connector

Electric Actuators

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 10 LXP M6 x 1 7.4 12 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.

Stainless Steel One-touch Fittings Series KG

L1 L2 M Nylon Urethane Weight (g) D 1 8 KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 5.6 15 23 11 16 14 11 13 15 17 13.1 13.1 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 10 5.6 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14 14 15 8 18.0 18.5 26.1

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 LEFS25(L,R)T6 LEFS32(L,R)T7 LEFS40(L,R)T8 /LEKFS25(L,R)T6 /LEKFS32(L,R)T7 /LEKFS40(L,R)T8 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

ASS Dimensions ASR AS220M-01 02 AS120M ASF H 8 (Hexagon width across flats) L1 T2 24.8 (MAX. 29.8) 28.2 (MAX. 33.2) M5 x 0.8 L2 A L3 D1 9 10.3 10 M5 x 0.8 10-32 UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 D1 D2 Model Min. Min. Max. Max.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

01, AS2211FG-01 AS2201FG-02, AS2211FG-02 Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle rotations AS4201FG, AS4211FG AS3201FG, AS3211FG Inlet pressure 0.5 MPa Inlet

VZ5000

MAX. 10 Applicable cable O.D. 3.5 to 7 3-3-71 Series VZ5000 2 Position Double VZ5240 Grommet (G), (H) VZ5240G H 01 02 Manual override (Non-locking) (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm (PE port) 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) 2-Rc 1/4 (5(R1), 3(R2) port) L plug connector (L) VZ5240-LM plug connector (M) VZ5240-M01 02 01 02 (Lead wire length) 300 (Lead wire length

SQ1000/2000

L RUN SERIAL UNIT L ERR.

AC Servo Motor Driver (CC-Link Type ）

(b) Cable internal wiring diagram MR-J3ENCBL2M-L/-H MR-J3ENCBL5M-L/-H LE-CSE-SA LE-CSE-RA LE-CSE-SB LE-CSE-RB MR-J3ENCBL10M-L/-H Driver Encoder side Servo amplifier connector side connector P5 LG 1 2 3 P5 6 LG MR MRR MR MRR 3 4 5 4 BAT BAT 9 2 Plate SD 9 SHD 13 6 13.

KG

(mm) (1) Weight (g) D1 D2 L1 L2 A M Nylon Urethane KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 M5 x 0.8 7 9.5 16 13.5 15 13 3.5 3.5 2.7 10 19 4 1 8 1 4 22 26 23 25 10 14 7 11.5 10.4 10 18 16 4.2 4.2 M5 x 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 3.5 3.5 16 14.5 17 23 25.5

AC Servo Motor Driver (CC-Link Type ）

(b) Cable internal wiring diagram MR-J3ENCBL2M-L/-H MR-J3ENCBL5M-L/-H LE-CSE-RA LE-CSE-SA LE-CSE-SB LE-CSE-RB MR-J3ENCBL10M-L/-H Driver Encoder side Servo amplifier connector side connector P5 LG 1 2 3 P5 6 LG MR MRR MR MRR 3 4 5 4 BAT BAT 9 2 Plate SD 9 SHD 13 6 13.

Speed Controller with One-touch Fitting

36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 20 (21) AS321F-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS321F-02-12(S)A 12 18.5 29.7 40 34.5 17

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

L n L: Dimensions n: Stations 2 3 4 5 6 7 8 9 10 L1 L2 L3 L4 160.5 160.5 173 185.5 198 210.5 210.5 223 235.5 150 150 162.5 175 187.5 200 200 212.5 225 125.4 135.4 145.4 155.4 165.4 175.4 185.4 195.4 205.4 17.5 12.5 14 15 16.5 17.5 12.5 14 15 46 Series SJ2000/3000 EX510 Gateway System Serial Transmission System Plug-in Connector Type Dimensions SS5J3-60S6BlDB-l Stations (Pitch) P = 10 12.8

JXCx-OMT0023

PA13 Selection of command input pulse form Pulse train form Forward rotation command Reverse rotation command Setting Forward rotation pulse train Reverse rotation pulse train PP 00 NP Positive logic PP Signed pulse train 01 NP L H PP A-phase pulse train B-phase pulse train 02 NP PP Forward rotation pulse train Reverse rotation pulse train 10 NP Negative logic PP Signed pulse train 11 L H

Fieldbus System

= 25n + 184 * L2 is the dimension without I/O Unit.