One-touch Fittings [inch] Model T (M) Weight [g] X Y Nylon Urethane 11 mm or less Metric Size M, R, Rc Inch Size UNF, NPT Inch Size M, R, Rc Metric Size G Metric Size R, Rc Inch Size NPT Inch Size R Metric Size Uni Inch Size Uni H T 3/16 KQ2E05-00Mm1 M14 x 1 17 8.4 11 27.3 15 13.3 7.8 6.5 3.5 30.5 m: A (Brass), N (Brass + Electroless nickel plating) L M M Sealant/Gasket Seal Face Seal Gasket Seal Release button
0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !
(Values at the initial period) Value for high voltage type (1.5 W) Value for low voltage type (0.5 W) Dusttight/Low jetproof type (IP65) is available on T, L, S and M kits of VQ2000.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
) UM:-A12-06 ZP3-T (10/13/16) B:-A12-06 ZP3-T (015/02/035) U:-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.
) UM:-A12-06 ZP3-T (10/13/16) B:-A12-06 ZP3-T (015/02/035) U:-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.
) UM:-A12-06 ZP3-T (10/13/16) B:-A12-06 ZP3-T (015/02/035) U:-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.
Example) 90-AW30K-03B-1N q w e r t y Series compatible with secondary batteries 90 Material restriction q Symbol Body size Description 30 40 60 w K With backflow function With backflow function + Nil N F Thread type Rc NPT G e + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 r Port size + Nil B Note 2) Note 1) Mounting Without mounting option With bracket With set nut (for panel fitting) a Option t H +
AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage Electrical entry Light/surge voltage suppressor Manual override VQZ1000 2 position
Minimum Auto Switch Mounting Stroke (in) D-M9, D-M9W D-M9V, D-M9WV No. of auto switches D-A9 D-A9V D-F9BAL Model NCDQ8A(B)-(C)(M) NCDQ8A(B)-S(M) NCDQ8A(B)W-(C)(M) NCDQ8A(B)Z-(M) 2 1 0.25(1/4") 0.62(5/8") 0.62(5/8") 0.25(1/4") 1.00(1") 0.37(3/8") 2 0.87(7/8") 0.25(1/4") 0.37(3/8") 0.25(1/4") NCDQ8A(B)-T(M) 1 0.37(3/8") 0.37(3/8") 37 Series NCQ8 Auto Switches/Proper Mounting Positions and Height
T (M) L2 L1 M Nylon Urethane 1 4 13 13 M12 X 1 3.2 KQ2E23-02 3.4 2.9 17 14 14 31.5 15 15.5 1 8 KQ2E04-01 11 5.6 4 16 13 16 27.5 31 M12 X 1 4 14 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 15 35 KQ2E04-02 17 KQ2E06-01 11 28 31.5 30 15 17 M14 X 1 19 KQ2E06-03 17 33.5 29 KQ2E06-02 15 6 13.1 10.4 17 17 17 KQ2E08-01 7.5 27.5 28 26.1 18.0 8 18.5 19 KQ2E08-02 13 33 27 17 M16 X 1 19 KQ2E08
e q t IN OUT e q r IN OUT w r w AR30(K), AR40(K) q t e AR50(K), AR60(K) IN OUT r w q t e IN OUT r w AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A AC Component Parts AF No.
w d d it it e e h h c c la la o o u u p p t t e e r r r r e e e e m m b b o o n n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.
Description Body Material Note Baking finish q Aluminum alloy w w Baking finish Aluminum alloy Housing e Baking finish Aluminum alloy Drain guard y r Foam rubber Float IN t Pilot valve Stainless steel + Rubber y Lever Resin u Flushing button Brass t i Orifice r o Diaphragm Rubber Replacement Parts 10-1 e No. Description Part no. ADH-D400 Note 10-2 !
0 r t !1 y q e u o w i Male thread Parts List Remarks Remarks Description Material No.
215 775 1200 470 (423 to 517) [Unit: mm] (Note) Model D H T E d W T D L Max.
(mm) Note) Effective area (mm2) Connection thread Rc Mounting plate thickness 7 mm or smaller Width across flat T (M) M Weight (g) Mounting hole L2 L1 Model H1 H2 KQG2E23-02 KQG2E04-01 KQG2E04-02 KQG2E06-01 KQG2E06-02 KQG2E06-03 KQG2E08-01 KQG2E08-02 KQG2E08-03 KQG2E10-02 KQG2E10-03 KQG2E12-03 KQG2E12-04 KQG2E16-03 KQG2E16-04 3.2 14.8 9.7 14.8 7 13.7 14.9 8.1 13.1 14.6 13 14.4 14.4 19.7 13.3
Refer to page 642 for the lead wire length of L and M plug connectors. Refer to page 645 for the connector assembly with cover for L and M plug connectors. 616 3 Port Pilot Solenoid Valve 10-SYJ500 Construction r w t q y e r w t q y e N.C. N.O.
Load proportion is ((load weight x 9.8)/theoretical force) x 100% Conditions of Speed Chart System Solenoid valve Speed controller Tubing diameter x Length Silencer A B C D E F G H I J K 10 x 1 m 12 x 1 m 12 x 1 m SGP15A x 1 m SGP15A x 1 m SGP20A x 1 m SGP25A x 1 m SGP25A x 1 m SGP32A x 1 m SGP40A x 1 m SGP50A x 1 m VEX VEX3 2-02 1 2 AS4000-02 AN200-02 AS420-03 AS420-04 AS420-04 AS500-06