IR1000/2000/3000

(kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160

PSxx-OMG0005CN

2030 10 1% * -7No.PS-OMG0005CN-E 0 01 28 C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D

High-precision Digital Pressure Switch

[F80] Power saving mode completed In power saving mode, when buttons are pressed the display is normal, but if no buttons are pressed for 30 seconds, it will revert to power saving mode.

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

lPSMt

INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.

Pneumatic Positioner IP300/IP3100

INSTALLATION B D Installation Transmission Din & Feed-back lever Fig. SINGLE-ACTING ACTUATOR SIGNAL PRE-Y%i-rpur SIGNAL RANGE INSTALLATION STYLE IREF. FIG. 1) OUT 1 OUT2 Direct ? OPEBATION ACTUATOR 315 DSi used pruggeo 1/2 Solit D c pruggeo used 1/2 Solit B 3-15 osi c USEO plugged '1l2 Solit B 3-15 nsi pruggeo used '112 Solit D Fig. Reverse = ) Y INSTALLATION STYLE (REF.

Style: Pressure Switch w/ T-Spacer, Body Size: 30 (AC30), Thread Type: N (NPT), Port Size: 02 (1/4), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: 30 (AC30), Thread Type: N (NPT), Port Size: 02 (1/4), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: P (MPa/psi Dual Scale)

Style: Pressure Switch w/ T-Spacer, Body Size: 30 (AC30), Thread Type: N (NPT), Port Size: 02 (1/4), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: AC30, Thread Type: NPT, Port Size: 1/4, Set Pressure Range: 0.1 to 0.6 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: AC30, Thread Type: NPT, Port Size: 1/4, Set Pressure Range: 0.1 to 0.6 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa/psi Dual Scale

Style: Pressure Switch w/ T-Spacer, Body Size: AC30, Thread Type: NPT, Port Size: 1/4, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa

2

IDF6E-20 IDF8E-20, IDF11E-20 (mm) Dimensions 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 A B C D E F Model IDF22E-20 IDF37E-20 IDF22E-30 IDF37E-30 IDF55E-30 IDF75E-30 IDU22E-30 IDU37E-30 IDU55E-30 IDU75E-30 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 30 mA 25 46 125 10 A 60 39 200 V type 60 81 148 50 36 73 133 IDF75E

Secondary Batteries

-900, D-M9BWSDPC-900 and D-A90L-900.

Digital Pressure Switch

-10Pa m3/s Cable specifications Conductor area 0.15 mm2 (AWG26) Insulator Outside diameter 1.0 mm Color Brown, Blue, Black, White, Gray (5 core) Sheath Finished outside diameter 3.5 -78No.PS-OMU0009-D Dimensions 02 type -79No.PS-OMU0009-D F02 type C01 type A2 type B2 type -80No.PS-OMU0009-D 02L type -81No.PS-OMU0009-D F02L type C01L type A2L type B2L type -82No.PS-OMU0009-D Bracket mounting

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

V

www.stevenengineering.com I 6.16 VACUUM VACUUM PADS SERIES ZP ZP SERIES VACUUM PADS 288 Standard Options 12 Diameters 4 Types 6 Materials D I M E N S I O N S ZP VA C U U M PA D S D I M E N S I O N S ZP VA C U U M PA D S D I M E N S I O N S ZP VA C U U M PA D S F L AT T Y P E PA D Part No Type A C B D E F Y ZP02U U02 2 2.6 1.2 7 12 0.8 ZP04U U04 4 4.8 1.6 7 12 0.8 D E E P T Y P E PA D ZP06U

Digital Flow Switch (Integrated display type)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM710--C/E 10 (5) PFM710--D/F 10 (5) PFM725--C/E 25 (12.5) PFM725--D/F 25 (12.5) PFM750--C/E 50 (25) PFM750--D/F 50 (25) PFM711--C/E 100 (50) PFM711--D/F 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -57No.PF-OMJ0006-J Pressure loss (at 350 [kPa]) -58No.PF-OMJ0006

20

D H1 KNH-R02-100 KNH-R02-150 KNH-R02-200 1 1.5 2 R1/4 14 52 46 D H1 A L1 Reference dimensions after R thread installation Low noise nozzle with male thread: KNS [mm] Connection thread L1 A Width across flats Nozzle size Part no.

AZ1000

40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa 00