Hydraulic

Different sides Same side Different sides Same side D-C7 D-C8 15 50 10 50 + 45 (n 2) 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) 15 60 10 Air Release D-C73C D-C80C D-H7C 15 + 50 n 2 2 Caution 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) 1.

CA2

mount type> Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL Auto switch model D-P5DWL Hs Bore size (mm) A B A B A 40 50 63 80 100 0.5 2.5 3.5 19.5 23.5 26.5 0 0 1 3 4 15 15.5 20 24 27 Ht B It cannot be mounted on models with bore sizes 40 and 50 mm.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Brake 50W 100W 200W 1 2 3 None With brake Nil K Power supply voltage Stroke 100/110VAC 50/60Hz 100/115VAC 50/60Hz 200/220VAC 50/60Hz 200/230VAC 50/60Hz Without motor Lead screw lead 1 H B C F A D E 8mm 12mm 20mm 5mm 10mm 25mm 40mm 2 0 Lead screw type The tables above show the definition for each symbol only and cannot

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

The load factor for each direction can be obtained as follows. x = 0/250 = 0 y = 50/180 = 0.27 z = 200/1000 = 0.2 5. x + y + z = 0.47 1 1500 1500 1000 800 1000 1000 Lz 600 L3 [mm] L1 [mm] L2 [mm] 400 500 500 200 Ly Lx 0 10 20 30 40 50 60 0 0 10 20 30 40 50 60 0 0 10 20 30 40 50 60 0 Work load [kg] Work load [kg] Work load [kg] 670 Model Selection LEFS Series AC Servo Motor Table Accuracy

SY

50/60Hz 2 200VAC 50/60Hz DOZ is not available. 110VAC 50/60Hz [115VAC 50/60Hz] "S" specification is not available for AC since it is integrated with the rectifier. 3 4 220VAC 50/60Hz [230VAC 50/60Hz] Electrical entry D With connector DIN terminal DO Without connector How to Order Interface Regulators (SY3000, 5000 only) 05 2 P ARBY3000 Series SY3000 Series SY5000 00 2 P ARBY5000 Regulated

MY1

Weight m X-axis Y-axis Z-axis Z 20 W 20 mm 30 mm 50 mm 2 kg 50 Y 30 3.

15

The load factor for each direction can be obtained as follows. x = 0/250 = 0 y = 50/180 = 0.27 z = 200/1000 = 0.2 5. x + y + z = 0.47 1 1500 1500 1000 800 1000 1000 Lz 600 L1 [mm] L3 [mm] L2 [mm] 400 500 500 200 Ly Lx 0 10 20 30 40 50 60 0 0 10 20 30 40 50 60 0 0 10 20 30 40 50 60 0 Work load [kg] Work load [kg] Work load [kg] 790 Model Selection LEFS Series Motorless Type Table Accuracy

Aluminum High Vacuum Angle Valve

Nil: Size 50, 63, 80 only. r Auto switch type Without auto switch (without built-in magnet) Remarks Symbol Nil Auto switch model D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) t Number of auto switches/Mounting position M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Symbol Nil A B C Mounting position Valve open/closed Valve open Valve closed Quantity

Air Slide Table

ST 50 ST 75 0.012 0.400 ST 40, 50 ST 125 0.015 0.010 0.300 ST 30 0.008 ST 100 0.010 0.006 0.200 ST 10, 20 ST 100 to 150 ST 125, 150 0.004 ST 10 to 50 ST 75 0.005 0.100 0.002 ST 100 ST 10 to 75 0.000 0.000 0.000 0 40 20 60 80 0 50 100 0 50 100 Load [N] Load [N] Load [N] (Plate size: t = 12) Lr = 200 mm MXQ25(A)-Z, MXQ20B-Z MXQ25(A)-Z, MXQ20B-Z MXQ25(A)-Z, MXQ20B-Z 0.025 0.020 0.450 ST 10 to

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

10

n (Same surface) 70 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 75 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 1 70 75 80 85 90 D-F5l/J59 D-F5lW D-J59W D-F5BA D-F59F 2 (Different surfaces, same surface) 90 95 110 115 120 130 n (Same surface) 90 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-F79F D-F7NTL D-BAL D-A79W D-F7WV D-F7V D-F7BAVL D-J79 D-F7W D-J79W D-A7 D-A80 D-A7H D-A80H D-F7 12 to 25 32 to 50 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 32 to 50 Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H D-A80H D-A73C D-A80C D-F7 D-F79F D-J79 D-F7V D-J79C D-F7W D-J79W D-F7WV D-F7BAVL D-F7BAL D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL

CQ2

D-J79W D-F7F D-F7NTL D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V 12 to 25 CU 32 to 50 CQS CQ2 MU D-A9 D-F9 D-A9V D-F9V D-F9WV D-F9W D-F9BAL 32 to 50 Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F7F D-F7NTL D-A7H D-A80H D-A73C D-A80C D-F7 D-J79 D-F7V D-J79C D-F7BAL D-F7W D-F7F D-J79W D-F7WV D-F9W D-F9WV D-F9BAL D-F9WV D-F9W

ISO Cylinder

D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-A9l D-A9lV D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-A9l*2 D-A9lV (n 2) 2 15 + 35 (n = 2, 4, 6) *1 *1 *1 *1 10 15 45 45 + 45 (n 2) (n = 2, 4, 6) 10 15 45 45 + 15 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 Band mounting Band mounting (n 2) 2 15 + 40 D-C7l D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6) D-C7l D-C80 10 15 50 50 + 20 (n 2) (n = 2, 4, 6) (

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-H7C D-B5, D-B6, D-B59W Auto switch Auto switch Hs Hs Single Acting, Spring Return Single Acting, Spring Extend Bore size (mm) A B All stroke A Bore size (mm) B Auto switch model Auto switch model 150 200 Hs Hs All stroke 150 200 125 125 50 100 50 100 25 75 25 75 20 20 30 105 95.5 55 80 45.5 70.5 55 80 45.5 70.5 24.5(27) 24.5(27) 20.5 D-C7 D-C8 D-C73C D-C80C D-C7 D-C8 D-C73C D-C80C 25 25

CXS

CXS -R 10 15 ZZ SS Z (Z) Manual lever insertion 1.7 Dual-Double-Rod Type CXSW K KK Hexagon (O) (Z) (mm) O K Width across flats 12 Model CXS10-R 6.5 8.5 Width across flats 13 CXS15-R (mm) Symbol ZZ Z SS KK 50 Stroke 10 20 50 40 30 10 20 30 40 50 10 50 40 30 20 10 20 30 40 Model 19.5 80 90 100 115 125 30 97 107 117 132 142 24.5 40 50 CXS10-R 20.5 90 100 110 120 130 35 109 119 129 139 149 45

Free Mount Cylinder

(D)UKC32 Rc 1 8 Rc 1 8 14 18 26 32 40 50 3 4 8 10 9 10 8 10 16 20 20 22 33 43.5 33.5 34 12 5 to 50 19 21.5 15.5 5 to 50 Model H J L P Q QA R S SA T Y Z MM ZC(D)UKC16 ZC(D)UKC20 ZC(D)UKC25 ZC(D)UKC32 ( ): In the case of a mounted auto switch.

MB

CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Auto Switch Mounting Height (mm) MB D-Z7/Z-80 D-Y59 D-Y7P D-Y7W D-F5, D-J5 D-F59F D-F5W, D-J59W D-F5BAL, D-F5NTL D-A5 D-A6 D-A59W D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV Bore size D-Y7BAL D-A44 D-P5DWL MB1 (mm) Ht Hs

V

1 3 Position/Exhaust Center 2 2 Position T H R E A D P O R T I N G Rc* Remove (N) when ordering N NPT F G* Remove (N) when ordering 02 1 4 (Body Size 2) 03 3 8 (Body Size 3) 04 1 2 (Body Size 4) 06 3 4 (Body Size 4) D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E 200 D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E 300 D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E

Battery-less

The load factor for each direction can be found as follows. x = 0/400 = 0 y = 50/250 = 0.2 z = 200/1500 = 0.13 5. x + y + z = 0.33 1 1000 2000 2000 800 1500 1500 Lz 600 L3 [mm] L1 [mm] L2 [mm] 1000 1000 400 Ly 500 500 200 Lx 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 18 LEF Series Battery-less Absolute (Step Motor 24 VDC