1

Auto Switch Mounting Position Auto Switch Mounting Height D-A7H/J79W D-A80H/F7BAL D-F7/F7F D-F79/F7NTL D-F7W D-A72/A7H/A80H D-A73C/A80C D-F7/F7V/F7W D-F7WV/F7BAL D-J7 D-A73C D-A80C D-F7WV D-F7V D-J79C D-A7/A8 D-A79W D-A73 D-A80 D-A79W D-F7F D-F7NTL Bore size (mm) Bore size (mm) A B A B A B A B A B Hs Hs Hs Hs Hs Hs 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 40.5 39.5 40 39 37.5 36.5

Electric Actuator/Slider Type

A 40 Lead 10: LEYG32 B 20 Lead 20: LEYG32 A 20 10 1400 0 1400 0 0 200 400 600 800 1000 1200 0 200 400 600 800 1000 1200 Speed [mm/s] Speed [mm/s] LEYG32 DV7 (Motor mounting position: In-line) Vertical Horizontal 60 80 Lead 4: LEYG32 D C Lead 4: LEYG32 D C 50 Lead 8: LEYG32 D B Regenerative resistor area 60 40 Work load [kg] Work load [kg] Lead 8: LEYG32 D B 30 40 Lead 16: LEYG32 D A 20 Lead

CA2

D-F5 D-J5 D-F59F D-F5W D-J59W D-F5BAL D-A5/A6 D-A3/ A3C D-A44/ A44C D-G39/ G39C D-K39/ K39C Auto switch model D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A3C D-G39C D-K39C D-A44C D-B5 D-B64 D-F5NTL D-B59W D-A59W Bore size (mm) B A B A B A B A B A B A A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 40 0 2 9.5 11.5 3.5 0 0 0 0.5 1.5 38 40 31 73 69 81 69 72.5 31 80.5 38.5 4.5 6.5 4 2 50 0 2 9.5 11.5 3.5

Hydraulic

MA B D-F9BAL A Proper auto switch mounting positions (mm) 32 to 100 D-Z7, D-Z8, D-Y5 D-Y, D-Y7 D-Y7V, D-Y7WV D-Y7BAL B Bore size (mm) D-Z7 D-Z8 D-Y5 D-Y7 D-Y7W A 10 12 13 16.5 18.5 26.5 B 16.5 18.5 22.5 26 35 44.5 32 40 50 63 80 100 A B D-Y6 D-Y7V D-Y7WV Auto switch mounting heights (mm) SMC D-Y7BAL Bore size (mm) SMC MA 32 40 50 63 80 100 32.5 37 43 51.5 62 74.5 Approx.

Table of Contents

) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

CM2

33.5 200 to 250 132 138 135 131.5 137 133.5 25.5 28 31.5 35.5 22.5 25 28.5 32.5 25 27.5 31 35 60 62.5 66 70 69.5 72 75.5 79.5 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 1.5 1.5 2.5 7.5 D-B5/B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C80 D-C73C D-C80C D-C7/C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C D-B59W D-A3A D-G39A D-K39A D-A44A

Aluminum High Vacuum Angle Valve

5 to 60C Heater With 100C heater With 120C heater D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

MY1

54 20 14 7.5 20 7.5 MY1C20 23 100 4.5 12.5 12.5 46 12 M6 x 1 4.8 100 50 58 M5 x 0.8 25 17 (mm) NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW MY1C16 MY1C20 NE NW PA PB PG Q PP QW QQ RR SS TT UU W WW Model NH VV VV XX Z XX Z NH 27.7 10 30 160 28 56 40 40 3.5 153 7.5 48 9 11 2.5 15 14 68 13 33.7 12.5 32 200 34 60 50 40 4.5 191 11.5 45 10 14.5 5 18 12 72 14 Y 2-d R S D WX Bottom ported (Applicable

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Auto Switch Specifications Grommet PLC: Programmable Logic Controller D-M9, D-M9V (With indicator light) 2-wire load current is reduced (2.5 to 40 mA). Using flexible cable as standard spec.

Style: Pressure Switch, Body Size: 20 (AC20), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: P (MPa/psi Dual Scale), Body Type: Standard

Style: Pressure Switch, Body Size: 20 (AC20), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: P (MPa/psi Dual Scale), Body Type: Standard

Style: Pressure Switch, Body Size: 20 (AC20), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa, Body Type: Standard

Style: Pressure Switch, Body Size: 30 (AC30), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa, Body Type: Standard

Style: Pressure Switch, Body Size: 30 (AC30), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: P (MPa/psi Dual Scale), Body Type: Standard

Style: Pressure Switch, Body Size: 30 (AC30), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: P (MPa/psi Dual Scale), Body Type: Standard

Style: Pressure Switch, Body Size: 30 (AC30), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa, Body Type: Standard

Style: Pressure Switch, Body Size: 30 (AC30), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: P (MPa/psi Dual Scale), Body Type: Standard

Style: Pressure Switch, Body Size: 30 (AC30), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: P (MPa/psi Dual Scale), Body Type: Standard

Style: Pressure Switch, Body Size: 30 (AC30), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: MPa, Body Type: 1 (Slim)

Style: Pressure Switch, Body Size: 20 (AC20), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: P (MPa/psi Dual Scale), Body Type: Standard