SMC Corporation of America
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HRX-OM-W004-H Operation Manual Communication function Thermo-chiller Air-Cooled Water-Cooled refrigerated type refrigerated type HRR010-A-10HRR012-A-10HRR018-A-10HRR010-A-20HRR012-A-20HRR018-A-20HRR024-A-20HRR030-A-20HRR050-A-20HRR050-A-40HRR010-W-10HRR012-W-10HRR018-W-10HRR010-W-20HRR012-W-20HRR018-W-20HRR024-W-20HRR030-W-20HRR050-W-20HRR050-W-40Keep this manual available whenever necessary

Clean appearance The flat cable provides wiring on a printed circuit board to the individual valves at the manifold base, enabling the consolidation of external wiring at a touch through a 26 pins MIL connector.

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

1 [UNLoC] [FAL] 3 [LoC] /30 -60No.PF-OMS0001CN-A [000] <> [UNLoC] 5 ( ) 1 1 -61No.PF-OMS0001CN-A , -62No.PF-OMS0001CN-A , ,, (), IN IN -63No.PF-OMS0001CN-A IN (59 ) () GND 30ms 1 -64No.PF-OMS0001CN-A -5% (OUT1)80 mA OFF, OUT1 (OUT2)80 mA OUT2 OFF () (( 1)(58) () () () -65No.PF-OMS0001CN-A PFMC7501 PFMC7102 PFMC7202 N2 (JISB8392-1 1.1.21.6.2 ISO8573-1 1.1.21.6.2

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

Note) Port size 3 8 1 2 Rc , Note) Composed of basic unit (VER 000-A, VS7-8-FG-S-3N) Refer to Best Pneumatics No. 1 for details about solenoid valve. 4 2 ARJ VER 000-A 4 2 AR425 to 935 0.1 to 0.9MPa Note) Set pressure range of A port VEA250, VEA251 Power amplifier AMR DIN terminal Wiring Note) In the case of VER4000, set the inlet pressure by 0.05 MPa or higher than the reguired maximum set

Note) VER 000-A 4 2 AV Set pressure range of A port 0.1 to 0.9 MPa AU VEA250, VEA251 Power amplifier DIN terminal Wiring AF Note) In the case of VER4000, set the inlet pressure by 0.05 MPa or higher than the reguired maximum set pressure.

3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -12No.PF-OMM0004-D 1 DC+ 2 OUT2 3 DC4 OUT1 M8 IN OUT OUT1OUT2 ON UP ON/OFF SET DOWN ON/OFF -13No.PF-OMM0004-D F.S.( 1~5V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 1-5V 1-5V 4-20mA (HYS) ON OFF 90% , () () ,, ,, 10 L/min 10 L ON OFF ON OFF

A E Push type A Push-locking type E Dimensions: Single Dimensions: VZ1120-G-M5-X1 Push type A (Push type A) Manual override Manual override (Non-locking) (Mounting hole for manifold) Push-locking type E (Piping port) Manual override (Push-locking type E) ( ) Pressing makes the valve operate.

Caution When removing a cable with connector, a PCW-04T puller is required. 8

Note 1) At rated voltage Note 2) Plug-in should be ZNR 3-3-68 5 Port Solenoid Valve Base Mounted Series VZ5000 (2) Flow Characteristics/Weight Flow characteristics (1) Port size Valve model Type of actuation Weight (g) 1 4/2 (P A/B) 4, 2 (A, B) 1, 5, 3 (P , EA, EB) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Grommet 200(120) 240(160) C [dm3/(sbar)] Cv b Cv b Single Double Closed center Exhaust

() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694 A B C() A B C() Rc1/81/4 Rc1/81/4

B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W711) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W721) A B C 1 V 1.5 V 5 V 4 mA 5.9 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521 30 250 -69No.PF-OMN0011CN-C / A B C D 0.6 V 1 V 5 V 5.4 V 2.4 mA 4 mA 20 mA 21.6 mA -70No.PF-OMN0011CN-C -71No.PF-OMN0011CN-C 0.58 mm(0.56 mm) (ZS-40-W) -72No.PF-OMN0011CN-C Revision

1/2(15 A) 3/4(20 A) 1(25 A) () 8 340 g 400 g 520 g 680 g 166 [] 20L/min 3(69 []) 4OFF (2 5 ) 5 100 (24 5 100 500 9.5 ) 563% 663% 0.25s0.5s 0.05s 7(69 []) 8 9M12 10DC(-)/+ 65 No.LFE*-OMY0008 100200S/cm 50% () 5S/cm M12 M12 M12 M12 LFE LFE LFE LFE-1 1 1 1-A3 A3 A3 A3 AWG21 0.9 mm PVC 1.7 mm PVC 6 66 No.LFE*-OMY0008 ( ( ( ( ) ) ) ) LFE1 LFE2 0.02 0.02 0.015 0.015 [MPa] [MPa] [MPa]

DC+ OUT1 OUT2 DCISA3-B DC+ OUT1 OUT2 DCVX2 (2 )VX2 -38No.PS-OMT0001CN-E 3 ISA-21ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 2.6 ISA-14 -39No.PS-OMT0001CN-E 3 () ISA-21ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 E210-U01 2 ISA-17 2.6 Y200T-A -40No.PS-OMT0001CN-E 3 () 2 E210-U01 ZS-31-C ZS-31-B Y200T-A ISA-18 2.6 ISA-15 ISA-16ISA-17 ISA-12-41No.PS-OMT0001CN-E 4 80

OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -38No.PF-OMO0004CN-E [F 2] OUT2 OUT2 (31 )(32 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] [oU2][] [2ot][] 40 41 42 43 -39No.PF-OMO0004CN-E a.