Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) Effective thread length FL NA Width across flats B2 G H2 NN Width across flats KA G Width across flats B1 H1 MM NA 20, 25 Eh8 D Standard port 45 Relief port (10-, 21-) Vacuum port (11-, 22-) 1.5 A AL K ZZ + Stroke S + Stroke H F 32, 40 (mm) ZZ H H2 H1 S P I G E D A 12 10 8 6 KA MM NA NN B1 B2 Bore size 13.5 10.5 10.5 10.5 FL K AL F 8 13 0 1/8

SMC Pneumatic Clean Series

Width across flats B1 H1 NN MM NA 20, 25 Eh8 D Standard port 45 Relief port 1.5 AL A F K N N H S + Stroke ZZ + Stroke 32, 40 (mm) ZZ H H2 H1 S P N I G E D A AL F K MM NA NN B1 B2 Bore size 8 13 0 1/8 138 109 107 103 21.5 15 15 15 42.5 34.5 30 24 22 17 17 13 41 32 32 26 88 64 62 62 46.5 37.5 33.5 28 7 5.5 5.5 5 40 32 25 20 24 22 22 18 21 19.5 19.5 15.5 14 12 10 8 20-0.033 6 6 5 50 45 45 41

LFE-OMY0008

[F 1] OUT1 33 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 49 34 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 35 No.LFE*-OMY0008 [F 2] OUT2

KJ

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

44

Width across flat Effective area (mm2) Connection thread R A Weight (g) L M d Model H1 H2 I.D.

Fluoropolymer Piping Equipment

Note 2) For details of the applicable tubing sizes, refer to page 945. 901 LQ1 Series Dimensions Space saving union tee reducing: LQ1T-S-R B side M2 B side M2 H2 2 x B M1 M1 H1 (E2) 2 x B H2 (L2) L2 M1 M3 M3 F F A side C side A side C side 1/4 1/4 1/4 (E1) (E3) G (E3) H1 H3 H3 G H1 L1 L3 L3 (L1) Class 2 to 5 Type T1 Type T2 Class 2 to 5 M2 B side B side M2 H2 (E2) H1 M1 2 x B 2 x B H2 (L2

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

PW Width across flats KA LZ PH GB Width across flats B1 MM E RY BF FY D e C B N BN H1 C B RT AL A K FT ZZ + l + Stroke h + l FX FZ S + Stroke M H ZZ + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BF BN BP BQ C D E GA GB GC GD GL GR H1 J K KA LZ Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 71 96 1/4 1/4 44 16 32 85 15 26 54 10 10 8 M8 x 1.25 6 14 71 50 Up to

KN Series Nozzles for Blowing

Model Nozzle size D L1 L2 Width across flats H1 H2 Weight (g) M L1 L2 M D KNP-1 2.5 4 5 8 63.7 12.7 987.3 7 A 1 m polyurethane tube is included. H2 H1 Polyurethane tubing Needle sensing head/KNP (mm) Applicable tubing O.D. Model Nozzle size D L1 L2 Cassette size H1 Weight (g) L2 M L3 M D KNP-2 0.7 4 5 41 23 4 12.7 987.3 A 1 m polyurethane tube is included.

RHC

MVGQ CC RB J D-X 20Data 10-6-11 11 Series RHC Dimensions: Basic Style 20 to 40 Rc P Rc P GA H2 NN NN GB I H1 MM D NB ND NE C Effective thread E E NF 10 N JD N JC 10 A K F NA S + Stroke F H WH B ZZ + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B C D E

XL

Symbol Temp. range Heater 5 to 60C (41 to 140F) Nil None H0 None High temp. type 5 to 150C (41 to 302F) H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 Indicator A Without heater H0 High temp. type With heater for 80C (176F) H1 With

1

H1 30 H1 30 H1 Symbol: A1 Symbol: A2 Symbol: A4 Symbol: A3 CS1 X X L C76 X L X K F C C0.5 DA RD L 30 30 L 30 C85 C95 E Symbol: A21 Symbol: A22 Symbol: A26 Symbol: A23 T W1 L L L L CP95 RD 30 DA 30 30 DA H1 H1 DA E NCM H1 Symbol: A5 Symbol: A6 Symbol: A7 Symbol: A8 30 DB DB NCA B C1 H B C T B RD T X LA H C1 DW X L H C1 X L X L K L LB -X W E L 30 30 30 L DC 30 Symbol: A30 Symbol: A29

Table of Contents

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

High Vacuum Angle Valve, XL Series

Symbol Temp. range Heater 5 to 60C (41 to 140F) Nil None H0 None High temp. type 5 to 150C (41 to 302F) H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 Indicator A Without heater H0 High temp. type With heater for 80C (176F) H1 With

SMC Pneumatic Clean Series

With air cushion WA 2-M5 x 0.8 Relief port GB 2-P (Rc, NPT, G) GA GA RA MM H1 RA 10 10 Width across flats B1 MM H1 W W Width across flats B1 D D MAX.WH MAX.WH E-0.05 0 E-0.05 0 I AL H + Stroke K A AL C0.1 KA A K F F 8-J S + Stroke H ZZ + 2 Stroke NA (mm) MM NA P RA S WA WH 20 20 20 A AL Bore size B1 C D E F GA H H1 I M6 x 1 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 J K KA M14 x 1.5

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G RE A B Width across flats B1 I REC 2-Eh8 D CX MM AL A F F NA 1.5 1.5 CY N N K H S + Stroke ZZ + Stroke MQQ M RHC Boss-cut MK(2) RS Q G RS H A RZQ ZZ + Stroke MI W S CEP1 CE1 (mm) CE2 AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ A Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod End Male Thread Bore size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14

Miniature Fittings M3, R(PT) 1/8, M5 Series M

H1 (Hex.) Weight (g) Part No. d L1 L2 M O.D.

Series H, DL, L, LL Self-align Fittings

H1 (Hex.) H2 (Hex.)

Prevents Micro-Bubbles

type Locking type C (H1) (H2) 60 A B E C (H1) (H2) 2-P B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SMC A B E L J B 2-P 2-F K Body material: PFA N G A D L K 4-M Non-locking type Locking type 60 C (H1) (H2) A B SMC E J B 2-P (mm) Dimensions A B C D E F G H1 H2

IZ-OMU0031-CN

ON 24 [F 6] OFF 25 [F98] OFF 26 [F99] OFF 27 -18No.IZ*-OMU0031 [F 0] <> [F 0] [F 0] -19No.IZ*-OMU0031 [F 1] OUT1 OUT1 ON OUT1ONOFF <> [F 1] 14 [P_1] [P1H] -20No.IZ*-OMU0031 [H_1] [H1] ON ON OFF OFF [F 1] OUT1 1)((n1H)0.1[kV]) (H1) (H1) [kv] (H1)0.1[kV] 2)((H1)0.1[kV]) [kv] (n1H)0.1[kV] -21No.IZ*-OMU0031 [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1] OUT1(2021) [F 3] 0.4 kV1050 mm20