3

D-DN

Standard Combinations

D-DN This catalog is printed on recycled paper with concern for the global environment.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Symbol Port specifications Porting specifications (A,B) trA FB I 2 Common Common Side Bottom Series 1N313 Serial I rN313 AB I Allen Bradley DN I DeviceNet MB I l\4itsubishi PB I Prolibus 2 i 32 outputs/32 inputs AB2 Accessories D-sub cable with connectors on both ends.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

High Vacuum L Type Valve

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

IZx-OMX0087

Negative ions are generated by setting "dn". Refer to 4-4-3. Frequency set mode for further details. 4-3. High voltage power supply module CH number setting When multiple high voltage power supply modules are connected to one controller, the CH number must be set for each high voltage power supply module to identify the information and set time.

High Vacuum L Type Valve

B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90 257

XL-OMV0002

B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

VR4151/4152

A Guide Clip Gasket Spring Cassette assembly Seal Valve Valve Valve U-shaped seal NBR H-NBR NBR H-NBR H-NBR Electroless nickel plated Electroless nickel plated Timing of Motion Circuit Diagram The time lag for operation is different depending on the operating pressure.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

D-DN

IZx-OMT0049

N None E 0.5 G 1 H 2 Straight Power supply cable length Symbol Length (m) Power supply cable layout direction / Length J 3 Symbol Layout direction Length (m) K 5 3 3 N None M 10 5 5 J 3 P 0.5 10 15 10 15 K 5 Straight Q 1 M 10 R 2 Angle N S 3 S 3 To use AC adapter, specify "N", and select AC adapter with the option number.

High Vacuum L Type Valve

B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2 90 257

Unit Manifold Valve

D-DN This catalog is printed on recycled paper with concern for the global environment.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Applicable bore A B C D E F G H 0.56 J NCM-L075 0.81 1.36 0.12 0.63 0.75 0.27 0.98 1.89 3/4", 7/8", 1 1/16" NCM-L150 1.00 1.75 0.12 0.75 0.94 0.27 1.50 0.75 2.52 1 1/4", 1 1/2" NCMK-L150 1.00 1.75 0.12 0.88 0.94 0.27 1.50 0.75 2.52 1 1/4", 1 1/2" NCM-L200 1.5 2.5 0.25 1.38 1.13 0.34 1.63 1.00 3.126 2" Note) NCM-L075 will not fit NCM075S (Single Acting).

XLDV Series

M5 A 3(R) EXE H A mm Model A B C D E Fn Fd G H XLDV25 50 123 48 41.5 7.5 40 26 38.5 XLDV40 65 170 66 53.5 15.0 55 41 48.5 XLDV50 70 183 79 57.5 17.5 75 52 55.0 XLDV63 88 217 100 72.2 20.0 87 95 70 66.5 XLDV80 90 256 117 82.6 26.5 114 110 83 75.0 XLDV100 108 321 154 95.2 38.0 134 130 102 93.5 XLDV160 138 335 200 101.2 40.0 190 180 153 116.5 10 XL-OMM0005-A 6 Period and Scope of Warranty The

Low torque Metal seal type Rotary joint

Printed in Japan. 1st printing June, 2002 D-MITAKA P-80 (DN) This catalog is printed on recycled paper with concern for the global environment.

2-Color Display

D-DN

9.8

D-DN

Information

L6 A Note) Model Applicable tubing O.D. d H Weight (g) D L1 L2 L3 L4 L5 M T Min. Max. Min.