Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: Analog Communication

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: Circulating Fluid Automatic Recovery

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+N

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+N+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: DeviceNet Communication

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N+Y

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N+Y+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: NPT Fitting

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Y+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Y

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

4 y q q KE i !5 i !5 AS-FG AS-FP AS-FM AS321F-02 Meter-out type AS3201F-02 Meter-in type AS3211F-02 AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

•

. +' ) PH otport 4' ; ~Y!l1bOl Cylir!

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W CRA1 CRQ2 (mm) MSQ L2 Y L2 max Size (mm) E3 = E1 = Y = 10 L1 X L3 max Size 3 to 8 Y 1 5 (8 Y) to (Y 1) MRQ L2 = L4 = 10 15 3 to 14 X 1 3 to 9 Y 1.5 9 (14 X) to (X 1) 6 (9 Y) to (Y 1.5) L1= 15 20 3 to 18 X 1.5 3 to 10 Y 1.5 D10 (18 X) to (X 1.5) 7 (10 Y) to (Y 1.5) L3 = 20 30 3 to 20 X 1.5 5 to 13 Y 2 10 (20 X) to (X 1.5) 8 (13 Y) to (Y

Table of Contents

Applicable shaft type: W CRA1 CRQ2 (mm) MSQ L2 Y L2 max Size (mm) E3 = E1 = Y = 10 L1 X L3 max Size 3 to 8 Y 1 5 (8 Y) to (Y 1) MRQ L2 = L4 = 10 15 3 to 14 X 1 3 to 9 Y 1.5 9 (14 X) to (X 1) 6 (9 Y) to (Y 1.5) L1= 15 20 3 to 18 X 1.5 3 to 10 Y 1.5 D10 (18 X) to (X 1.5) 7 (10 Y) to (Y 1.5) L3 = 20 30 3 to 20 X 1.5 5 to 13 Y 2 10 (20 X) to (X 1.5) 8 (13 Y) to (Y

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W CRA1 CRQ2 (mm) MSQ L2 Y L2 max Size (mm) E3 = E1 = Y = 10 L1 X L3 max Size 3 to 8 Y 1 5 (8 Y) to (Y 1) MRQ L2 = L4 = 10 15 3 to 14 X 1 3 to 9 Y 1.5 9 (14 X) to (X 1) 6 (9 Y) to (Y 1.5) L1= 15 20 3 to 18 X 1.5 3 to 10 Y 1.5 D10 (18 X) to (X 1.5) 7 (10 Y) to (Y 1.5) L3 = 20 30 3 to 20 X 1.5 5 to 13 Y 2 10 (20 X) to (X 1.5) 8 (13 Y) to (Y

Air Cylinder

8 K K i w e y y u !1 !7 !9 !8 CJP CJ2 CJ2 JCM CM2 With auto switch CM3 10, 16 Rubber bumper CG1 K w e u y !0 t r i !6 !5 !1 !7 CG3 JMB MB MB1 With auto switch CA2 10, 16 Air cushion CS1 CS2 w e u y o t !0 r i !6 !5 !1 !3 !4 !2 !7 K With auto switch Component Parts No. Description Material Note 10 Piston seal NBR No.

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Aluminum High Vacuum Angle Valve

Note 2) A coating of vacuum grease [Y-VAC3] is applied to the valve seat of the vacuum part.