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[F 1] OUT1 -31No.PF-OMN0011CN-C H_1(H_2) H1(H2) H1(H2) 0 ON 0 0 ON -32No.PF-OMN0011CN-C H_1(H_2) H1(H2) H1(H2) 0 OFF 0 0 OFF -33No.PF-OMN0011CN-C [F 2] OUT2 OUT2 OUT1 1. PLS ACCUMU WIN tWIN HYS tHYS 2. 2_P/2_N(35 ) 3. P2dH n2dH P2dL n2dL P2AH n2AH P2AL n2AL tnL/tPL tnH/tPH Ht (38 ) P2L/n2L P2H/n2H H2 (36 ) (37 ) tn/tP H_t (38 ) P_2/n_2 H_2 (36 ) 4.

) Hysteresis H1(H2) n1L (n2L) n1H (n2H) Instantaneous flow Accumulated increment output mode Count up from "0".

. -33No.LFE*-OMZ0011 # List of output mode Hysteresis H_1 (H_2) Hysteresis mode Instantaneous flow Window comparator mode Hysteresis H1(H2) Hysteresis H1(H2) Instantaneous flow Accumulated increment output mode Accumulated flow Count up from "0". Turns ON when the set value is reached Return to the set value by reset.

Use the accumulated pulses to obtain the accumulated flow based on the accumulated volume per pulse (page 62). -28No.LFE*-OMZ0013 Hysteresis H_1 (H_2) Hysteresis mode Instantaneous flow n_1 (n_2) Window comparator mode Hysteresis H1(H2) Hysteresis H1(H2) n1H n1L Instantaneous flow (n2H) (n2L) Accumulated increment output mode Count up from "0".

Bulkhead Male Elbow: KQ2LE Model H1 (width across flats) KQ2LE04-00 H2 (width across flats) 14 17 Applicable Effective area (mm2) Nylon Urethane Applicable tubing Note) Mounting T (M) Mass (g) B E D M tubing O.D.

Hysteresis H2 10988 10P2-P1 10P2-P1 100 Setpoint P1 11989 H1+1P2-H2 H1+1P2-H2 600 Hysteresis H1 10988 10P1-1 10P1-1 50 Setpoint P3 312000 H3+12000 H3+11000 40 Hysteresis H3 101999 10P3-1 10P3-1 10 Caution The Pressure parameters should be set so that each value meets the above conditions. The condition of P3 differs depending on the Pressure range parameter. -20No.EX-OMY0014-A 4.1.6.

(mm) HX H2 Q H1 NN F H MM ZZ QY I K N NA S AL D A B2 B1 Eh8 Bore size (mm) 20 25 32 40 Stroke range 0 0.033 20 8 5 13 41 116 14 28 5 15 24 62 8 18 26 Up to 300 13 19.8 65.3 15.5 M8 x 1.25 M20 x 1.5 0 0.033 26 8 6 13 45 120 14 5.5 15 30 62 22 10 22 32 Up to 300 17 70.5 33.5 19.5 M26 x 1.5 M10 x 1.25 0 0.033 26 8 6 13 45 122 16 5.5 15 64 12 22 32 Up to 300 17 76.5 37.5 25.8 34.5 19.5 M26 x

10 2 x 5 14.5 0.2 0.2 24 +0.033 0 26H8 ( ) 114.2 3 3 127 133 240 (Motor cable entry: Basic type) 230 (Motor cable entry: Entry on the left side) Dimensions [mm] 5H8 ( ) depth 5.5 24 Model H1 H2 H3 LER50 16 5.5 15.5 LERH50 26 15.5 25.5 +0.018 0 2 x M10 x 1.5 x 20 2 30 163 Controllers JXCm Series For details, refer to page 182 and onwards.

Style (B) CLM2B Bore size Stroke Basic style Rc BP locking port for pressurizing (Plug cap with breathing port at spring lock) Rc BP unlocking port Unlocked when pressurized Rod side cylinder port Rc P Manual unlocking cam Lock nut Width across flats B2 Width across flats B1 Head side cylinder port Rc P S + Stroke ZZ + Stroke Boss-cut With rod boot e ZZ + Stroke 9 9 l f h A BP D E BZ GA H2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com S + Stroke ZZ + Stroke Boss-cut With rod boot e ZZ + Stroke 9 9 l f h A BP D E BZ GA H2 I H1 AL B2 B1 BN BC F BQ 1/8 1/8 1/8 1/8 GC GB GK GD GQ GL H GR Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8 1/8 1/8 8 20 20 8 80 18 55 13 26 5

) H1(H2) 0 On H_1(H_2) H1(H2) H1(H2) 0 On -26No.PF-OMJ0005CN-I [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1]OUT1 [---] -27No.PF-OMJ0005CN-I [F 3] (N2)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES] [F 5] -30No.PF-OMJ0005CN-I [F 6] <> [F 6] [dSP] [F 6] 9 L3 3 1 "0" -

to 450 to 450 to 500 0 26 20 57.5 69 69 76 73.5 0.033 64.5 83.5 0.033 0 0.033 0 0.033 26 64.5 70 83.5 100.5 90.5 32 Boss cut (mm) MM Bore 20 25 32 40 N 15 15 15 NA 24 30 S 127 137 139 167 Bore ZZ 168 182 184 217 H1 5 6 6 8 K 5 5.5 5.5 7 PL 20 24 24 24 PW 38 41 41 41 I 28 H 41 45 45 50 PH 19.5 24 24 24 ZZ 181 195 197 233 P Z 37 41 41 45 GR 4 7 7 7 PG 22 27 27 29 GQ 4 7 7 8 GL 6 9 9 11 NN H2

80 100 L1 X C1 H2 Rod end nut Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.

L1 X C1 H2 Rod end nut Dimensions for cylinders with a rubber bumper are the same as the standard type above.

Applicable tubing O.D. d L2 L3 M AQ ASV AK D2 L1 VCHC ASS T2 L4 H1 ASR ASQ (Hexagon width across flats) H2 KE (Hexagon width across flats) TMH D3 A1 L5 D1 A2 T1 Inch Size L4 (1) Mass (g) A1 (2) A2 (2) D3 L3 L2 L1 M d T1 D1 H1 H2 D2 Max. Min.

Single Rod Series CLM2 Axial Foot (L) CLM2L Bore size Stroke CL MLG CNA CNG MNB CNS (mm) CLS Bore Stroke range A 18 22 22 24 AL 15.5 19.5 19.5 21 B 40 47 47 54 B1 13 17 17 22 B2 26 32 32 41 BC 38 45 45 52 BN 80 90 90 BP 1/8 1/8 1/8 1/8 BQ 1/8 1/8 1/8 1/8 BZ D 8 10 12 14 F 13 13 13 16 GA GB 8 8 8 11 GC 8 9 9 8 GD 55 GK 3.5 4 4 4 GL 6 9 9 11 GQ 4 7 7 8 GR 4 7 7 7 H 41 45 45 50 H1 5 6 6 8 H2

80 100 L1 X C1 H2 Rod end nut Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.

S Bore size Stroke M5 x 0.8 Manual override RE A B Width across flats B1 REC CX CY Mounting hole Width across flats B2 Width across flats NA MQQ M S + Stroke LS + Stroke ZZ + Stroke RHC MK(2) Single acting, Spring extend: CVM3L T Bore size Stroke RS Q G RS H A H + Stroke RZQ MI W S CEP1 Z + Stroke ZZ + 2 x stroke CE1 CE2 ML2B Bore size (mm) B2 MM LZ LY LX LT LH LD H1 B1 LC H B K F AL NA H2

L1 X C1 H2 Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.