High Power Cylinder:

61.5 B 32 36 44 53 A 18 22 22 24 I 26 31 38 47 H2 8 8 9 11 Bore (mm) 20 25 32 40 WH S 192 193 195 201.5 Rc(PT) P 1/4 1/4 3/8 3/8 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 NF 13 17 17 22 K 5 5.5 5.5 7.5 NB 30 36.9 43.9 47.3 JD 30.5 25.5 28.5 23 NA 26 32 38 41 JC 43 39 36 32 NE 33.5 37 43.5 52.5 ZZ 252 257 265 277 N 22 27

PFxx-OMO0004CN

) H1(H2) H1(H2) H1(H2) 0 OFF 0 ON 0 OFF 0 ON -31No.PF-OMO0004CN-E ( )OUT2 3 3 3 3 3 3 ON OFF ON OFF OU2 -32No.PF-OMO0004CN-E <>OUT1 [F 1] [F 1][oU1] [oU1][] [1ot][] 34 35 36 38 -33No.PF-OMO0004CN-E a.

PFxx-OMS0001CN

) H1(H2) H1(H2) H1(H2) 0 ON 0 OFF () 0 ON 0 OFF () -29No.PF-OMS0001CN-A ( )OUT2 3 3 3 3 6 6 6 6 zhi chi ON OFF ON OFF OU2 -30No.PF-OMS0001CN-A <>OUT1 [F 1] [oUt1][()] [oU1] [] [1ot] [] 32 33 34 36 -31No.PF-OMS0001CN-A a.

PF-OMN0011_C

[F 1] OUT1 -31No.PF-OMN0011CN-C H_1(H_2) H1(H2) H1(H2) 0 ON 0 0 ON -32No.PF-OMN0011CN-C H_1(H_2) H1(H2) H1(H2) 0 OFF 0 0 OFF -33No.PF-OMN0011CN-C [F 2] OUT2 OUT2 OUT1 1. PLS ACCUMU WIN tWIN HYS tHYS 2. 2_P/2_N(35 ) 3. P2dH n2dH P2dL n2dL P2AH n2AH P2AL n2AL tnL/tPL tnH/tPH Ht (38 ) P2L/n2L P2H/n2H H2 (36 ) (37 ) tn/tP H_t (38 ) P_2/n_2 H_2 (36 ) 4.

LV50-OMQ0002

) Hysteresis H1(H2) n1L (n2L) n1H (n2H) Instantaneous flow Accumulated increment output mode Count up from "0".

LFE-OMZ0011

. -33No.LFE*-OMZ0011 # List of output mode Hysteresis H_1 (H_2) Hysteresis mode Instantaneous flow Window comparator mode Hysteresis H1(H2) Hysteresis H1(H2) Instantaneous flow Accumulated increment output mode Accumulated flow Count up from "0". Turns ON when the set value is reached Return to the set value by reset.

LFE-OMZ0013

Use the accumulated pulses to obtain the accumulated flow based on the accumulated volume per pulse (page 62). -28No.LFE*-OMZ0013 Hysteresis H_1 (H_2) Hysteresis mode Instantaneous flow n_1 (n_2) Window comparator mode Hysteresis H1(H2) Hysteresis H1(H2) n1H n1L Instantaneous flow (n2H) (n2L) Accumulated increment output mode Count up from "0".

KQ2

Bulkhead Male Elbow: KQ2LE Model H1 (width across flats) KQ2LE04-00 H2 (width across flats) 14 17 Applicable Effective area (mm2) Nylon Urethane Applicable tubing Note) Mounting T (M) Mass (g) B E D M tubing O.D.

SI Unit for Vacuum Manifold

Hysteresis H2 10988 10P2-P1 10P2-P1 100 Setpoint P1 11989 H1+1P2-H2 H1+1P2-H2 600 Hysteresis H1 10988 10P1-1 10P1-1 50 Setpoint P3 312000 H3+12000 H3+11000 40 Hysteresis H3 101999 10P3-1 10P3-1 10 Caution The Pressure parameters should be set so that each value meets the above conditions. The condition of P3 differs depending on the Pressure range parameter. -20No.EX-OMY0014-A 4.1.6.

PFxx-OMJ0005CN

) H1(H2) 0 On H_1(H_2) H1(H2) H1(H2) 0 On -26No.PF-OMJ0005CN-I [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1]OUT1 [---] -27No.PF-OMJ0005CN-I [F 3] (N2)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES] [F 5] -30No.PF-OMJ0005CN-I [F 6] <> [F 6] [dSP] [F 6] 9 L3 3 1 "0" -

ASP

Applicable tubing O.D. d L2 L3 M AQ ASV AK D2 L1 VCHC ASS T2 L4 H1 ASR ASQ (Hexagon width across flats) H2 KE (Hexagon width across flats) TMH D3 A1 L5 D1 A2 T1 Inch Size L4 (1) Mass (g) A1 (2) A2 (2) D3 L3 L2 L1 M d T1 D1 H1 H2 D2 Max. Min.

S Couplers

H2 H1 H1 H2 13 26 M L1 L1 M L3 When connected Min. hole size Min. hole size Applicable hose I.D./O.D. 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Applicable hose I.D.

Compact and Lightweight

ZQ L4 ZR ZB H2 Connection thread 2 ZA VAC.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

KJ

(inch) H2 (Width across flats) T D Note) B E Mounting hole M Weight (g) H1 (Width across flats) Min. port size Model KQ2LE01-00 KQ2LE03-00 KQ2LE05-00 KQ2LE07-00 KQ2LE09-00 KQ2LE11-00 KQ2LE13-00 1 8 1/2-20 UNF 1/2-20 UNF 9/16-18 UNF 9/16-18 UNF 3/4-16 UNF 7/8-14 UNF 1-12 UNF 13.5 13.5 15 15 20 23 26 9.6 10.4 11.4 13.2 15.2 17.9 21.7 27 26 32 29 53 85 105 2.5 3 3.5 4.6 6 7 9.6 15.5 16 16.5

F

Applicable Connection Model T H1 H2 L1 L2 Mounting M Minimum Tube OD Thread UNF (Width (Width Hole Hole Applicable Connection Model T (M) H1 H2 L1 L2 Mounting M Effective Tube OD mm Thread (Width (Width Hole Orifice (mm 2) Inch Rc(PT) Across Flats) Across Flats) Diameter Rc(PT) Across Flats)Across Flats) Nylon/Ureth 1/8 1/4 KQE01-35 1/2-20 17.46 17.46 31.5 15 14 15.5 2.5 3.2 14 KQE23-02 M12x1

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Stroke adjustment unit A MYH L2 25 6N Intermediate fixing spacer Intermediate fixing spacer Stroke adjustment unit Nil Without spacer Bore size 6 7 Short spacer 25 32 40 25 mm 32 mm 40 mm Unit type Long spacer Spacer length Symbol Mounting position Left Right Left Right Left Right Spacer delivery type Stroke adjustment unit Nil N Unit installed Spacer only A1 A2 L1 L2 H1 H2 A unit Spacers

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

across flats) (Hexagon width across flats) H2 Applicable tubing O.D. d (Hexagon width across flats) Applicable tubing O.D. d A L4 L4 A L3 D1 D1 L3 M D2 L2 L1 M T D2 L2 L1 T Metric Size Min.

•

I lube OUlslde dia. od Inch size H1 (Width across flats) H2 (Widlh across lIats) , _ l4'. W~igh L2 L..3, ~L ~ "A1 '" , 'A2 oM II'. I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M ..

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.