MTS

load (N) 20 0.5 Caution on Design MTS20-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st Deflection (mm) Caution 1.

Compact

ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25 0.00 0 5 10 15 20 25 0.00 0 5 10 15 20 25 Load [N] Load [N] Load [N] MXZ20 MXZ20 MXZ20 0.25 0.40 0.25 ST 35, 40 ST 45, 50 ST 45, 50 ST 45, 50 Table displacement [mm] Table displacement [mm] Table displacement [mm] 0.35 0.20 0.20 0.30 ST 25, 30 ST 35, 40 ST 35, 40 0.25 0.15 0.15 ST 25, 30 ST 15, 20 ST 25, 30 0.20 0.1

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Deflection MXH MXU 25 8 MXS 0.2 0.3 MXQ Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 25 st MTS8-30 st MTS25-200 st 0.2 175 st MXF 20 st 150 st 125 st 15 st 0.1 10 st 5 st 100 st MXW 75 st 0.1 50 st 25 st MXJ 0 10 20 30 2 1 0 3 MXP Lateral load (N) Lateral load (N) MXY 32 12 MTS 0.3 0.5 MTS32-200 st 0.2 175 st 150st 125 st

5

st or more D-C73C/C80C/H7C 10 st or more 15 to 64 st 65 st or more 10 st or more 15 to 64 st 65 st or more D-B5/B6/G5/K5 D-G5mW/K59W D-G59F/G5NT 10 st or more 15 to 74 st 75 st or more 10 st or more 15 to 74 st 75 st or more D-B59W 15 st or more 20 to 74 st 75 st or more 15 st or more 20 to 74 st 75 st or more Trunnion type is not available for 80 and 100.

MVGQ

CC MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions RB A A E E Symbol Symbol DB DB Bore size (mm) Bore size (mm) Stroke Stroke J Up to 50 st Over 50 st 30 st or less 30 st or less Over 30 st Over 30 st Up to 50 st Over 50 st 12 12 39 0 8 43 4 16 6 55 D16 16 43 0 10 49 6 22 8 65 20 20 0 14.5 12 10 57 47 61.5 27 10 74 -X 20Data 10-16-7 8 Valve Mounted

Guide Cylinder/Compact Type Series MGC

25 32 40 50 20 25 32 40 50 20 25 32 40 50 100 st or more 119 250 to 400 14 88 125 st or more 131 350 to 500 14 88 150 st or more 136 350 to 600 14 90 200 st or more 156 350 to 800 15 101 250 st or more 202 350 to 1000 16 116 Note 1) Dimensions marked with are not required for the one without rear plate.

Smooth Cylinder/Low Speed Cylinder

75 st or more D-B59W 15 st or more 20 to 74st 75 st or more 15 st or more 20 to 74 st 75 st or more Trunnion style is not available for bore sizes 80 and 100.

15

(No condensation) 11LEFS Sliding bearing LEYGlM 0.29 + (2.20 x 103) x [ST]: 185 st or less 0.34 + (1.92 x 103) x [ST]: Over 185 st 0.48 + (2.91 x 103) x [ST]: 180 st or less 0.55 + (2.62 x 103) x [ST]: Over 180 st Other specifications Actuation unit weight [kg] (*[ST]: Stroke) 11LEJS Ball bushing bearing LEYGlL 0.33 + (1.69 x 103) x [ST]: 110 st or less 0.36 + (1.80 x 103) x [ST]: Over 110

NCQ8

K 2 sides x 4 places O-counter bore R depth M1 E 0.13 + Stroke A + Stroke (Inch) C A Symbol Bore 3/8" to 2"st 1/8"st 1/4"st 1-1/4" to 2"st 1/8" to 1"st W Z R Q P O N M2 M1 K J I H E D 150 (1-1/2") 200 (2") 250 (2-1/2") 2.19 0.56 0.63 0.50 0.70 2.00 2.00 1.38 3/8-24UNF 2.63 0.19 0.50 1.55 2.19 0.22 0.34 0.25 0.20 NPT1/8 2.73 0.56 0.75 0.44 0.70 2.06 2.53 1.44 1/2-20UNF 3.13 0.20 0.63 1.90

MGG

32Stroke Stroke Stroke 1.2 2 1.7 (Ball bushing type) (Ball bushing type) (Ball bushing type) 1.5 1 1.5 500st Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) 600st 400st 1 500st 400st st: Stroke (mm) 1 st: Stroke (mm) 300st st: Stroke (mm) 0.5 400st 300st 200st 0.5 300st 0.5 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 20 40 60 80 100 10 20 30 40 50 60 10 20 30 40 50 Allowable

MGC

Rc 1/8 20 40.5 70 73 162 25 58 241 14 104 26 55 M8 x 1.25 Rc 1/4 Bracket Mounting Stroke Long Stroke Without Rear Plate Bracket mounting stroke Stroke range (mm) Bore size (mm) Bore size (mm) Bore size (mm) Y R Z 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100 st or more 250 to 400 88 14 119 125 st or more 350 to 500 88 14 131 150 st or more 350 to 600 90 14 136 200 st or more 350 to 800

Guide Cylinder Series MGG

20MGGL 25MGGL 32Stroke Stroke Stroke 1.2 2 1.7 (Ball bushing type) (Ball bushing type) (Ball bushing type) 1.5 1 1.5 500st Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) 600st 400st 1 500st 400st st: Stroke (mm) 1 st: Stroke (mm) 300st st: Stroke (mm) 0.5 400st 300st 200st 0.5 300st 0.5 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 20 40 60 80 100 10 20 30 40 50 60 10 20 30

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

ST 10 20 30 40 50 9+ST 19 29 39 49 59 10+ST 20 30 40 50 60 37+ST 47 57 67 77 87 47+ST 57 67 77 87 97 CXSJ6-10 21-/2211-/12CXSJ6-20 CXSJ6-30 CXSJ6-40 CXSJ6-50 21-/2211-/1221-/2211-/1221-/2211-/1221-/2211-/1278 Dual rod cylinder/Compact type CXSJ 2122CXSJ/ 1112Dimensions / 10 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter

ISO Cylinder

51 to 100 st 101 to 150 st Auto switch model Bore size A dimensions B 5 to 50 st 51 to 100 st 101 to 150 st 8 18.5 18.5 18.5 6.5 10 16.5 16.5 16.5 6.5 12 18 18 18 7.5 8 17 17 17 5 10 15 15 15 5 12 16.5 16.5 16.5 6 D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV 16 18 33.5 49 13.5 [7.5] 16 16.5 32 47.5 12 [6] 16 12.5 28 43.5 8 [2] 20 10.5 (35.5) 60.5

EXxx-OMQ0016

4 to 20 Scale upper limit -32766 to 32767 10 5 5 20 20 Scale lower limit -32767 to 32766 0 1 0 0 4 If the data format is scaled data format, set the Fault Value as follows, regardless of the range setting.

NCQ8

For 075, 106 K Auto switch 2 sides x 4 places O-counter bore R depth M1 E A + Stroke 0.13 A Symbol C W Z R Q P M1 K J I H E D M2 N O Standard Standard Super compact Super compact Bore 1/4"st 1/8"to1"st 1 1/4"to2"st 1/4"to1"st 1 1/4"to2"st 3/8"to2"st 075(3/4") 106(1 1/16") 150(1 1/2") 200(2") 250(2 1/2") 1.69 0.31 1.25 1.56 0.06 0.25 1.22 0.15 0.25 1.31 0.19 0.86 2.25 1.19 1.75 0.46 0.46 #10

Fieldbus system DeviceNet TM compatible SI unit

Enable Generates an error. 1 Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Set the analogue input device range per channel. Analogue input range (Range) Selects the analogue input range. -10..10 V 2 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to PLC per unit.

Air Cylinder Series MB

(n 2) n MB 2 (Different surfaces, Same surface) 20 25 D-Y7W D-Y7WV 1 20 25 20 + 10 (n 2) 20 + 15 (n 2) 25 + 10 (n 2) MB1 n 2 (Different surfaces, Same surface) 20 30 D-Y7BAL CA2 1 20 30 20 + 10 (n 2) 20 + 15 (n 2) 30 + 10 (n 2) n CS1 Note 1) n = 3, 4, 5 Note 2) Center trunnion type is not included.

EXxx-OMO0027

Enable Generates an error. 1 Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Set the analogue input device range per channel. Analogue input range (Range) Selects the analogue input range. -10..10 V 2 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to master per unit. 2s complement 2s complement.

Fieldbus system EtherNet/IP TM compatible SI unit

Enable Generates an error. 1 -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Set the analogue input device range per channel. 2 Analogue input range (Range) Selects the analogue input range. -10..10 V 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to PLC per unit. 2s complement 2s complement.