Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: M (Applicable to Deionized Water Piping)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: MS (Applicable to Deionized Water Piping + Conforming to CE/UL Standards)

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: MS (Applicable to Deionized Water Piping + Conforming to CE/UL Standards)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: B (w/Earth Leakage Breaker)

An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values. 

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: SW (Conforming to CE/UL Standards + SI Unit Only)

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10 to 32 Graph (3) V = 200 mm/s Graph (4) V = 400 mm/s 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (5) V = 600 mm/s Graph (6) V = 700 mm/s (800 mm/s for 10) 2 0.6 20 32 25 0.4 1 15 20 Weight m (kg) Weight m (kg) 0.5 15 0.2 10 10 CXSM CXSL CXSM

Air Slide Table

L1 = 20 mm OK (L1 max. overhang = 30 mm) L2 = 10 mm OK (L2 max. overhang = 15 mm) L3 = 50 mm OK (L3 max. overhang = 100 mm) V = mm/s MXQ8B-10, 20, 30Z (Rubber stopper) V = mm/s MXQ8B-10, 20, 30Z (Rubber stopper) 2.5 2.5 Therefore, the MXQ8B-30ZD can be used. 2.0 2.0 Load mass m [kg] Load mass m [kg] V = mm/s MXQ8B-10, 20, 30Z (Rubber stopper) V = mm/s MXQ8B-10, 20, 30Z (Rubber stopper) 1.5

SY

... ... 20 stations 2 to 20 stations 20 C44 C46 Note 1) An asterisk () indicates order made products.

Electric Actuator/Slider Type

Speed: V [mm/s] Vertical LEFS40/Ball Screw Drive Horizontal 60 60 Lead 10 50 50 Work load: W [kg] Work load: W [kg] 40 40 Lead 20 30 30 20 20 Lead 10 10 10 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] 2 Series LEFS SpeedWork Load Graph (Guide) Step Motor (Servo/24 VDC) The following graph shows the values when moving force is 100%.

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Fixed 4% F .S.

ZP

2 A B Stroke 20 to 50 mm Dimensions: 10 mm Stroke (mm) C D F H J A B E I Model ZPR20F10-0-A14 20 22 12.5 15.5 29.3 58.5 46.5 50 126.5 ZPR25F10-0-A14 25 28 ZPR32F10-0-A14 13 16 29.8 59 47 127 32 35 Additional Dimensions by Stroke (mm) (mm) Q: 6 Q: 8 Model R S R S J I H Stroke ZPR20F10-0-A14 20 3 +10 0 ZPR25F10-0-A14 30 +7 12.8 24.3 15.2 26.2 +20 ZPR32F10-0-A14 50 +25 +52 +40 13-11-115 Series

ZP

a ZQ sl or an l f ea te d ZF id wo pe rk ZP ty su nt ZCU oi rf ac l j AMJ al e s B Misc.

Electric Actuators

/Ball Screw Specification (Horizontal) LXFH5BC LXPB2BC/LXSH2BC LXPB5BC/LXSH5BC 30 30 30 Transfer load Transfer load Ultimate speed (mm/s) Ultimate speed (mm/s) Ultimate speed (mm/s) Ultimate speed (mm/s) 3kg 10kg 20 20 20 LJ1 LG1 LC1 LX LC6D/LC6C Switches Transfer load 2kg 6kg 10kg 1kg 3kg 6kg 10 10 10 0kg 0kg 3kg 0kg 0 0.01 0.02 0.03 0.04 0 0.01 0.02 0.03 0 0.01 0.02 0.03 Time (s) Time (

Table of Contents

ZF Symbol S Pad dia. 02 to 16 L 20 to 50 ZP ZCU With buffer AMJ Misc.

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MHK2 Size: 12, 16, 20, 25 How to Order MHK 2 20 Standard type M9N S D 1 F MHKL 2 20 S D 1 F M9N Long stroke type Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of auto switches Number of fingers Nil S 2 pcs. 1 pc.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

CATALOG

Adjustable Air Cushion B O R E S I Z E 20 3/4 25 1 32 1 1/4 40 1 1/2 50 2 63 2 1/2 Stroke/inch S T R O K E Stroke/Hundredths of an inch S T R O K E STOCK STROKE LIST FOR ALL STYLES SERIES NCG S Y M B O L S R U B B E R C U S H I O N E D B O R E S I Z E S TA N D A R D S T O C K E D S T R O K E M A X I M U M S TA N D A R D S T R O K E 20 1, 2, 3, 4, 5, 6, 8 20 25 1, 2, 3, 4, 5, 6, 8, 10, 12

MY1

Horizontal Vertical (downward) Vertical (upward) Air cushion stroke Unit: mm Caution m s Bore size (mm) Cushion stroke m s Type of impact 16 12 s 20 15 Do not operate with the stroke adjusting unit fixed in an intermediate position.

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Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.