Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

LVQ

PA PA t A B A B B A A B Description No.

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

Free Mount Cylinder

A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc1/8 Bore size (mm) Standard stroke NN T S Z K KA L MM P Q R 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8

Possible to transfer a workpiece at low-speed.

The rotation angle can be adjusted between 90 and 190. n io r a at n t g o Rotation starting point e R End of rotation DL L R B B L e o g t B a n ti a o r n n o r a ti n a g t Rotation starting point End of rotation o A A e Operating size 20 30 40 Operating size 20 30 40 R A Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 Rotation starting point End of rotation Lmax 24 27 31.5 Lmax 24 27 31.5 Size

Air Cylinder NCA1 Series

X B 5 S T D. R O D T H R E A D S T D.

NCA1

X B 5 S T D. R O D T H R E A D S T D.

Table of Contents

High Precision, Digital Pressure Switch for General Fluids Dimensions Bracket A A 30 20 ZSE ISE 20 PSE 45 Z I SE3 55 4.5 11.5 40 15 PS 4.5 Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6.5 1.6 ZSP 20 41.5 ZS-24-A Bracket A View A ISA2 IS Bracket D ZSM

LJ1H

A: Stroke + 124 A: Stroke + 32 20 0.02 92 0.02 A 92 92 A Positioning hole 2 x 8H10 4 x T-slot Recommended dimension 8 (Refer to JIS B0952.) 67 Long positioning hole LJ1H30 M8 bolt M8 bolt 30 30 2 x T-slot Recommended dimension 8 (Refer to JIS B0952.)

7

fitting P A B D E F I J K Model Conduit terminal Conduit Flat terminal C L T 52.5 (58) 52.5 (58) 99.5 U V T 58.5 (64.5) U T U 10, 3/8", 12 91 (97) 22.5 3 A VXD2 68.5 47.5 23 30 45 20 6 13.5 41.5 25 33 Model Mounting bracket dimensions One-touch fitting P a b d e f 10, 3/8", 12 58 65 67 52 25.5 VXD2 3 A ( ): Denotes the Normally Open (N.O.) dimensions. 139 VXD Series For Air/Water/Oil 3 A

Compact Cylinder

Note 2) ( ): Same dimensions as for those of -X202 Dimensions: Applicable to CQ2B -10D(C)Z Only Double acting, Single rod Single acting, Spring return Single acting, Spring extend 20 32 A B L A B L B A L Symbol Bore size Symbol Bore size Symbol Bore size 20 32 33 29.5 3.5 20 32 33 29.5 3.5 20 32 43 29.5 13.5 A B L A B L A B L 36.5 33 3.5 36.5 33 3.5 46.5 33 13.5 With Auto Switch: Applicable

Air Cylinder

(mm) Auto switch model Bore size (mm) 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V) Auto switch model Bore size 20 25 32 40 D-A9l(V) 6 6 6 6 BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9l(V) D-M9lW(V) D-M9lA(V) 3 3 4 3.5 D-M9lA(V) Note 2) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of

MG

Contents 16 20 to 100 Contents Kit no. Nickel plated Nickel plated !3 Hexagon socket head taper plug Slide Bearing Felt Holder Ball bushing 16 20 25 32 40 50 63 80 100 MGP50-A-PS MGP63-A-PS MGP80-A-PS MGP100-A-PS MGP16-A-PS MGP20-A-PS MGP25-A-PS MGP32-A-PS MGP40-A-PS Set of nos. above @3, @4, @5 @6, @7, @8 Set of nos. above @3, @4, @5 @6, @7, @8 !4 !5 !6 !

CJ2

(mm) Material: Iron A 15 15 CX 3.2 6.5 BA 12 18 GB 18 23 BB 12 18 H 20 20 CD(cd) 3.3 5 CA 14 20 KA 4.2 5.2 CB 14 20 MM M4 X 0.7 M5 X 0.8 NA 5.5 5.5 NB 22.5 27.5 R 5 8 U 8 10 Part No.

Thermo-chiller/Rack Mount Type

Part number Applicable model A dimension [mm] Weight [kg] HRR010-m-20-mUY 330 HRR012/018-m-10-mUY 417 HRR012/018-m-20-mY HRR024/030-m-20-mY 506 HRR050-A-20-mUY 815 HRR050-W-20-mUY 637 HRR-KS001 Approx. 7 83 mm A Adjuster foot Caster (O.D.: 63) 303 mm 372 mm 494 mm 428 mm 544 mm Mounting view (HRR012/018-A) Anti-quake bracket A Anti-quake bracket B Hexagon nut Hexagon bolt Caster adjuster-foot

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I>A 0>6 Flat type Ftat w~h rib (mm) FI t Iype ' Ratw rib (mm) Model "A"8 C D i e F G l:M5xO.B I: ~ Y 'A Y "6 F C D e G Model Flat lat lh.rib . H J H J .

Basic type / Direct mount type Series CY3B/CY3R

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a w 0.0 10 0 20 10 t i o o n L Operation cycles a t e l u g c e i t 1 n r a e p r a Non-contact construction w t Particulate generation from the linear guide unit has been reduced with the use

Shock Absorbers and Rate Controls

Pdrt Numlel llodel (Rel) A I D T H I K UFfll0xl ut 6363109 0 tli0. l l'l( E ) M l O x l r,50 .41 .24 .25 1.000.98 0.49 IVA.20 N/A Ut l2rl ut5588189 0H,r. r 5 (BI M l 2 x l t.50 .47 .24 .15 1.000.980.49 N/A.20 N/A UlV2.20 ut3935095 ([n)0EM.25(B) rr.?0 uNt 1.50 .56.28 -t) t.001.00 0.50 fl/A .?0 il/a UtjA6.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

A B A B ~rr-T'11\ llrT-T-tllFm ~ A II U III ~ EAPEB ' EA P EB Pressure center A B ~T\lIlll~ Plug-in 'tYpe EA PEB (Additional function achieved by USing external pilot option).

Environment

A 20 11LEFS 10 15 Lead A 10 11LEJS 5 Lead H Lead H 5 25A0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEC LEFS32/Ball Screw Drive LEC S Horizontal Vertical LEC SS-T 30 50 Lead B LEC Y 40 Work load: W [kg] Work load: W [kg] Lead B 20 Motorless Lead A 30 Lead A LAT 20 10 Lead H Lead H LZ 10 0 0 LC3F2 0 100 200 300 400 500 600 0 200 400 600 800 1000