2/3 Port Valve for Various

" # $ # VX21/22/23 VXD21/22/23 $ $ $ $ $ $ VXP21/22/23 VXR21/22/23 % $ $ && &'& && &'& && &'& ($ )* && &'& && &'& !

Air Slide Table

44 66 66 G 23 23 23 23 32 44 31 56 N 4 4 4 4 4 6 8 8 8 HA 55 55 55 65 80 65 88 132 132 Model F 55 46 55 65 75 60 48 60 65 GA 23 23 23 23 32 72 88 97 122 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 MXQR2510 MXQR2520 MXQR2530 MXQR2540 MXQR2550 MXQR2575 MXQR25-100 MXQR25-125 MXQR25-150 Note) Note) Note) Refer to the bottom view of the MXQR25-75. 18 Air Slide Table/Reversible Type Series MXQR Note 1

Air Slide Table Series MXQ

3 4 4 4 H 55 55 55 65 80 44 66 66 G 23 23 23 23 32 44 31 56 N 4 4 4 4 4 6 8 8 8 HA 55 55 55 65 80 65 88 132 132 Model F 55 46 55 65 75 60 48 60 65 GA 23 23 23 23 32 72 88 97 122 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 MXQ2510 MXQ2520 MXQ2530 MXQ2540 MXQ2550 MXQ2575 MXQ25-100 MXQ25-125 MXQ25-150 Note) Note) Note) Refer to the bottom view of MXQ25-75. 118 Air Slide Table Series MXQ With shock

CQ2

B A B A B A B A B A B A B U U U U U U U U U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 9 10 (4.5) 12 19.5 20.5 26.5 23 26 22 7.5 (5.5) 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 12 (10) 9.5 16 22.5 23.5 29.5 26 29 25 (11.5) 20 25 32 40 50 24.5 25.5 31.5 28 31 27 4 7.5 8 7 11 12 6.5 5 27.5 28.5 34.5 31 34 30 11.5 4.5 7.5 8 7.5 12 7 5 31.5 32.5 38.5 35 38 34 27 29 26.5 8 13.5 12 11 10.5 3.5 9 9.5 6.5 8 9

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A B C A B A B A B A B Application Same tubing size 1 2 1 2 1 2 3 1 2 1 2 1 2 Refer to the applicable tubing table.

SV

With External Pilot Specifications (Pitch) SV 22.3 P = 10.5 13.5 59.6 18.1 8.4 12.6 10 SZ 28.6 23 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 45.5 5 3 E 5 3 E 5 3 E 5 3 E 59 SY 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 P 1 P 1 P 1 One-touch fitting PE PE X X SYJ One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" [1(P), 3/5(E) port] Applicable tubing O.D.:

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

For external pilot specification L5 7 VQC (L4) (5) L2 (Rail mounting hole pitch: 12.5) L3 11 18.3 SQ 3/5 R 3/5 R A 4 A 4 A 4 L1 A 4 A 4 (Station n) .

Table of Contents

Calibration is easy with auto-preset function. 4 Installation of a group of sensors as a manifold style at the same site 3 Adsorption confirmation of a workpiece absorbed with water/oil Series ZSE50 Series PSE54 16-3-23 16-2-28 Adoption of a stainless diaphram enables to detect, even though water or oil is adhered to a workpiece and then made ingress to the sensing part.

MB

C0.5 file chamfer AL B MM R sphere TP R sphere DC 30 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 30 C 30 DA DA C0.5 R sphere DA DA C AL MM 30 A H T W1 A H C A H H Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 DA MM 30 AL MM 30 H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 DA 30 30 DA L RD 30 MM 30 MM MM DB DB T T C B A H A A A L K H W H H

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

0.4

Note) The minimum bending radius of the D-sub connector cable is 20 mm. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 COM 572 VQC Series Plug-in Unit Base Mounted F IP40 compliant VQC1000/2000 Series Kit (D-sub connector) (L4) (L3) L2 L1 VV5QC11 (5.25) 63.5 51 35 28 1.5 P = 10.5 Manual override 13 (12) Indicator light 1.5 SV (5.5) SYJ B A A B A B A B A B A B A 2 93.5

5

B A B A B A B A B A B A B Hs Hs Hs Hs 20 33 32 29 28 28.5 27.5 29.5 28.5 25 24 23.5 22.5 26.5 23.5 20 25.5 24.5 27 27.5 25 32.5 32.5 28.5 28.5 28 28 29 29 24.5 24.5 23 23 26 26 25 28 27 29.5 30 32 34 33 30 29 29.5 28.5 30.5 29.5 26 25 24.5 23.5 27.5 26.5 32 31.5 30.5 33 33.5 40 36 35 37.5 38 40 39 36 35 32 34.5 31.5 35.5 32.5 31 28 29.5 26.5 32.5 29.5 50 41.5 40.5 43 43.5 50 46 44 42 40 41.5

MNB

D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 CL 40 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 50 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 CL1 63 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 80 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5 4 MLGC 100 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5

MNB

Series MNB Cylinder with Lock Double Acting, Single Rod Proper Auto Switch Mounting Position D-F5W D-J59W D-F5 D-J5 D-F5BAL D-F59F D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W, D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 CL 40 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 50 1.5 4 2 4.5

10

Position (Standard type) Auto switch model D-Y59l D-Y69l D-Y7P D-Y7PV D-Y7H D-Y7lW D-Y7lWV D-Z7l D-Z8l D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-F5l D-J59 D-F59F D-F5NT D-A5l D-A6l D-A59W D-G39 D-K39 D-A3l D-A44 D-A9l D-A9lV D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3

Sine Rodless Cylinder Series REA/REB

The cylinder mounting surface must have a flatness of 0.2 mm or less, and the cylinder must be mounted so as to be smoothly operated with a minimum operating pressure (0.18 MPa or less) for a full stroke.

V

(Except for 110VAC) C O I L V O LTA G E With indicator light and surge voltage suppressor. } 3 110VAC 5 24VDC 6 12VDC VVQ0-P-4-C4 I N D I V I D U A L SUP S P A C E R VVQ0-57A-4 DIN R A I L M O U N T E D B R A C K E T [-D] VVQ0-R-4-C4 I N D I V I D U A L EXH S P A C E R ACCESSORIES MANIFOLD OPTIONS 23 04 06 08 01 03 B U I LT I N S I L E N C E R, D I R E C T E X H A U S T [-S] 1 N A M E P L

Base Mounted Metal Seal/Rubber Seal Series VQ

Unused A Unused A A A B A B A B A B A B A B A VQC Double Double Double Double Single Single Single Single Single Single SI unit SI unit SQ Stations 1 2 3 4 5 Stations 1 2 3 4 5 VQ0 Single/Double mixed wiring (Option) Double wiring (Standard) VQ4 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System VQ5 VQZ ADDRESS NO. STATION NO.

VCL

A B C D E F G H J L Port size Valve model VCS21 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04A 1/2 VCS41 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting

MGG

A A A A A A B B 16 (23) B 21 (29) B B 18 (26) B B 21.5 (29.5) 20.5 (28.5) 19.5 (27.5) 17.5 (24.5) 20 27.5 27.5 27 24.5 25.5 27 28.5 27 24 30.5 29.5 21.5 (29.5) 20.5 (28.5) 19.5 (27.5) 17.5 (24.5) 16 (23) 21 (29) 18 (26) 25 30 30 29.5 27 25.5 27 28.5 27 24 30.5 29.5 22.5 (30.5) 21.5 (29.5) 20.5 (28.5) 17.5 (25.5) 16 (24) 22 (30) 19 (27) 32 33.5 33.5 33 30.5 26.5 28 29.5 28 25 31.5 30.5 24.5