Air cylinder

(See page 22 to 23, Table 5,6.) < Applicable Auto switches > Solid state auto switch D-M9N(V)M9P(V)M9B(V) D-M9NW(V)M9PW(V)M9BW(V) D-M9NA(V)M9PA(V)M9BA(V) Reed auto switch D-A90(V)A93(V)A96(V) Figure 4.

ZQ-OM01401

) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01 1 2 (: PD ) C 02 2 2) (10) S (4) : 08 8 (2) (PV) 1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B

Cylinder with lock

(P.20) < Applicable Auto switches > Solid state switch D-M9N(V)M9P(V)M9B(V) D-M9NW(V)M9PW(V)M9BW(V) D-M9NA(V)M9PA(V)M9BA(V) Reed switch D-A90(V)A93(V)A96(V) How to mount and move the auto switch Fig. 8 Note 1) For the tightening of the mounting screws (M2.5), use a precision screwdriver with a handle diameter of approximately 5 to 6 mm.

VFS

1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

AWM20 to AWM40

u r u Drain Drain Component Parts No.

AWM20 to AWM40

u r u Drain Drain Component Parts No.

Air cylinder (Series compatible with secondary batteries)

(See page 15, Table 8.) < Applicable Auto switches > Solid state auto switch D-M9N(V)-900M9P(V)-900M9B(V)-900 D-M9NW(V)-900M9PW(V)-900M9BW(V)-900 Reed auto switch D-A90-900 Fig 4. How to Mount and Move the Auto Switch Fig 4.

HRX-OM-Y098

-A-20 .

Air cylinder

(See page 21 to 24, Table 5,6.) < Applicable Auto switches > Solid state auto switch D-M9N(V)M9P(V)M9B(V) D-M9NW(V)M9PW(V)M9BW(V) D-M9NA(V)M9PA(V)M9BA(V) Reed auto switch D-A90(V)A93(V)A96(V) Figure 4.How to Mount and Move the Auto Switch (1) Fix it to the detecting position with a set screw by installing an auto switch mounting bracket in cylinder tie-rod and letting the bottom surface of

HRX-OM-W060

. 8-1 8.1.2 Refrigerant with GWP reference. 8-2 8.1.3 Communication specifications . 8-2 8.2 Dimensions . 8-3 8.2.1 HRL100-A-20 . 8-3 8.2.2 HRL200-A-20 . 8-4 8.2.3 HRL300-A-20 . 8-5 8.3 Flow Diagram . 8-6 8.3.1 HRL-A-20 . 8-6 8.4 Cooling Capacity . 8-7 8.4.1 HRL100A20 CH1 . 8-7 8.4.2 HRL200A20 CH1 . 8-7 8.4.3 HRL300A20 CH1 . 8-8 8.4.4 HRL100/200/300-A-20 CH2 . 8-8 8.5 Pump Capacity . 8-9

25

Comparison of potential amplitude between AC type and dual AC type (Installation height of sensor: 300 mm) 40 AC type Surface potential of workpiece (V) 20 25 V or less Dual AC type IZS42 0 20 40 Time Independent Dual AC type is implemented.

Flow Sensor Series PFMV

Max. current rating No load voltage (V peak) 5.0 0 to 20 [V] 100 Above 20 to 30 [V] Peak voltage (2) A circuit using max. 30 Vrms or less (42.4 V peak), which is powered by UL1310 or UL1585 compatible Class-2 power supply. 963 Series PFMV5 Specific Product Precautions 2 Be sure to read before handling.

3

For the analog output type, when ON the output will be 5 V or 20 mA, and when OFF, it will be 1 V or 4 mA.

DOC1001322

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-27 DOC1001322 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

IZx-OMP0064

B5 White Unused 1) NPN type Ionizer (IZS41, IZS42) When an ionizer (IZS41) is used in DC mode, make sure to ground the F.G. cable (green) and 0 V cable (blue) Shield Green: F.G. +24V F.G. Brown (2pcs.): +24 VDC + DC/DC + +24 V Power supply 24 VDC Blue (2pcs.): 0 V 0 V 0 V 0 V F.G. PLC INPUT Internal circuit F.G.

In-line Air Filter

ZFC1 ZFC3 ZFC5 ZFC7 1 2 V 2 3.2 V V 3 4 V V 4 6 V V 5 8 V 6 10 V 7 12 V Option Nil None B With bracket Inch size A 1/8" V V B 5/32" V V D 1/4" V V E 5/16" V F 3/8" V Max. Operating Pressure and Operating Temperature Specifications Model ZFC1l ZFC3l ZFC5l ZFC7l Max. operating pressure [MPa] 1.0 Port size (Applicable tubing O.D.)

MGC

CXT MX MXU MXS MGCLl40-R Stroke MXQ MXF MXW MXP MG MGP MGQ MGG MGCLl50-R Stroke MGC MGF CY1 MY1 3.20-9 Series MGC Basic/With Rear Plate Bore (mm) Stroke range (mm) AF F AE E AD D C B AP G H AC AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 M5 X 0. 8Depth10 5.6 25 90 62 45 15.5 9.5Depth6 24 106 22 M6 X 1Depth10 13 11 84 M6 X 1Depth12 6.8 30 103 65 45 16.5 26.5 11Depth8 M8 X 1.25Depth14 120

pa

SUP = 0.2 MPa 20 SUP = 0.2 MPa VX2 10 10 VX 0 0 10 30 40 50 20 60 VX3 10 20 Discharge rate (l/min) Discharge rate (l /min) VXA Selection from Flow Characteristic Graph (PA3000) VN Required specifications example: Find the pilot air pressure and pilot air consumption for a discharge rate of 6 l/min and a total lifting range of 25 m.

MHx-OMM0057

1.5~2 SMC AF AR 4. 4-1 13 - 4-2 1 15 2 16 3 17 B 4 18 5 19 6 20 7 21 U 8 22 R 9 A 23 C 10 B 24 11 A 25 12 13 14 MHL2-10D MHL2-16D MHL2-20D MHL2-25D MHL2-32D MHL2-40D 26 27 28 29 30 NBR MHL10-PS MHL16-PS MHL20-PS MHL25-PS MHL32-PS MHL40-PS ) 262627282930 1 14 - 4-3 1 U U 2 R B B R 3 15 - 4-4 1 2 O O O 3 16 - Revision history 4-14-1, Sotokanda, Chiyoda-ku

CG1x-OM0006N

GR-R-010(10g) 1 2 3) , 4 7 1 100 4 3g 1cm 1 2 100mm 7. 4. g 20 25 32 40 (mm) 100st 2 3 3 34 50st 0.5 0.5 0.5 1 19 3-2-4. 1) 8 8 2(9) 9 3) , 6 1mm 8. 9. 20 3-3. 3-3-1.