4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Rc Nil G F VP4 20 20 stations 4(A), 2(B) port N NPTF T NPT Rc 1/4 3/5(R) port Note) For more than 8 stations, supply air to both sides of P port and exhaust air from both sides of R port.

Compressed Air Cleaning Filter Series

JIS B2401G35 3 pcs. 56 Series AMF Dimensions AMF150C to 350C P Q T S R F E D N Bracket L U (Accessory) O K G M V W J B OUT IN C I A Maintenance space (mm) A Model Port size Bracket related dimensions B C D E F G I 98.5 N 56 J 20 K 5 U 6 V 6 L 12 M 6 W 10 O 35 P 70 Q 26 R 54 S 4.5 T 1.6 AMF150C AMF250C AMF350C 10 54 63 7.5 63 10 1/8, 1/4 83 14 73 76 5 76 10 121 66 24 8 6 6 12 6 10 40 80 28

5 Port Solenoid Valve

v v v v v v N COM v v v v v v SI Unit output polarity EX500 Gateway Decentralized System 2 (128 points) EX500 Gateway Decentralized System (64 points) EtherNet/IP DeviceNet PROFIBUS DP EtherNet/IP Nil + COM v v v N COM v v v v SI Unit output polarity EX600 integrated-type (for I/O) serial transmission system (Fieldbus system) DeviceNetPROFIBUS DP CC-Link EtherCAT PROFINET EtherNet/IP

Compact Rotary Actuator Series CRQ2

The rotation angle can be adjusted between 90 and 190. n io r at a n t o 10 g Rotation starting point 10 R e End of rotation 160 L L e R B B L g o n B t at a r 160 io 160 n 10 10 n io r at Da n t o g Rotation starting point End of rotation A A R e Operating size 20 30 40 Operating size 20 30 40 A Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 Rotation starting point 10 10 End of rotation Lmax

CXS

0 0.01 V = up to 100mm/s V = up to 300mm/s 20 40 60 80 100 0.05 Overhang L (mm) Weight m (kg) Graph V = over 400mm/s; up to 10mm 11 2 CXSM CXSL 1 CXSL6 CXSM6 0.5 0 0.01 20 40 60 80 100 32 Weight m (kg) Overhang L (mm) 25 Graph up to 50mm 9 0.1 20 0.05 V = up to 100mm/s V = up to 300mm/s 0.05 0.04 15 0.03 10 Weight m (kg) 0 0.01 20 40 60 80 100 Overhang L (mm) 0.02 Graph V = up to 400mm/s

Dual Rod Cylinder Series CXSJ/CXS

20 30 40 50 100 5 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (4) V = 800 (mm/s) (V = 700 mm/s for 15, 20) CXSJM CXSJL Graph (3) V = 600 (mm/s) CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 10 Mass m (kg) 10 0.1 CX2 0.1 CXW 6 6 CXT CXSJ 0.02 0.02 10 20 30 40 50 100 5 10 20 30 40 50 100 5 CXS Overhang l (mm) Overhang l (mm) Note) V = 700 mm/s for 15, 20.

Air Cylinder

5 V 12 V 3 wire (PNP) M9P IC circuit 2 Wire M9B 3 wire (NPN) M9NW 12 V Solid state switch 3 wire (PNP) M9PW IC circuit Diagnostic indication (2-color indication) 2 Wire M9BW 3 wire (NPN) M9NA 5 V 12 V Relay, PLC Yes 24 V 12 V Water Resistant (2-color indication) 5 V 12 V 3 wire (PNP) M9PA IC circuit 12 V 2 Wire M9BA 3 Wire (NPN equivalent) A96 IC circuit Yes 5 V Reed switch No 12 V 100 V

Air Cylinder Series MB

/M9(V)/M9W(V)/M9A(V)L.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

MGP

m (kg) 25 16 20 25 16 20 16 16 1 1 0.1 10 20 25 26 50 100 200 0.1 10 20 25 26 50 100 200 Stroke (mm) Stroke (mm) 17 l = 50mm V = 400mm/s 18 l =100mm V = 400mm/s 100 50 50 80 100 50, 63 80 50, 63 50, 63 40 50, 63 40 32 40 32 32, 40 32 10 10 25 25 5 5 Load weight m (kg) 20 20 25 16 20 16 25 20 16 1 1 16 0.1 10 20 25 26 50 100 200 0.1 10 20 25 26 50 100 200 25 Series MGP Compact Guide Cylinder

Digital Flow Switch ( compatible)

1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 2 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range Maximum value of rated flow range PF2MC7501 5 L/min 500 L/min PF2MC7102 10 L/min 1000 L/min PF2MC7202 20 L/min 2000 L/min 1: Analogue output accuracy is within 3%F.S. 2: Set the current to the analogue output from the connected equipment to 20 A or

VS 8-2/VS 8-4

Output circuit Surge voltage 24 V 0 V sol.1: Energized 2 V or less R Surge voltage Internal circuit 0V sol.2: De-energized 2 V or less Surge voltage R 24 V 0 V Large capacity Load: Energized 2 V or less R Countermeasure parts Diode (Anode) + (Cathode) Relay Switching element Power supply circuit breaker OFF C Valve R Leakage voltage Power supply 24 VDC Leakage voltage Figure 2.

Digital Flow Switches

0.8 8 OUT1 80 mA 65 180 45 104 79 65 Rc11/2, NPT11/2, G11/2 Rc2, NPT2, G2 46 M6 x 1 9 Load Black 0 V or 75 220 55 114 89 75 56 M6 x 1 9 50 msec 50 msec PF2A7H-(-M) 68 69 Analog output 1 to 5 VDC 4 to 20 mADC 20 5 Analog output [V] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Nil Without cable A Mounting rail S R Left entry Standard cable Robotic cable (flexible cable) Driver type Cable length Nil Without driver Cable entry direction A1 A2 B1 B2 Pulse input type (Incremental encoder) 100 V Pulse input type (Incremental encoder) 200 V Nil Without cable 2 5 Nil 2 m Without cable Right entry R L Pulse input type (Absolute encoder) 100 V Pulse input type (Absolute

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

D Bus voltage (Note 4) 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 -10[V] CW direction Note 1.

Thermo-chiller

Filter Rc1/2 20 m V V 3 Valve Rc1 V Rc1/2 V 4 Valve Rc1/2 V V 9 Y-strainer Rc3/8 #40 V V Install either the strainer or filter. If foreign matter with a size of 20 m or more are likely to enter, select the particle filter, and then prepare it. Filter Rc3/8 20 m V V 5 Flow meter Rc1 V Prepare a flow meter with an appropriate flow range.

SX

S 5 VDC R 3 VDC 1-6-55 56 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x

Step Motor Controller

Control circuit power supply (24 V) L11 Control circuit power supply (0 V) L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) Servo motor power (W) Connect to motor cable (U, V , W) U V W V W 60 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAm-m 2 m or less Note 5) PLC FX3U-mmMT/ES (Manufactured by

Metal Seal/Rubber Seal Series VQ Body Ported

C6 (EXH port) One-touch fitting for 6 U side D side EXH passage blocked R block valve is mounted in the blocking position when ordering an individual EXH spacer incorporated with a manifold. When separately ordering an individual EXH spacer, separately order an R block valve.

Electric Actuator with Integrated Guide

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.