Electric Actuators 70 20 LJ1 LG1 LC1 LX LC6D/LC6C Switches Work piece mounting reference plane 179 171 110 135 52 52.5 Stroke + 131 (table movement range) Stroke + 140 (table movement range) 170 157 7.5 33 37 92 2-T-slot 1 85 90 35 Stroke + 334 2-T-slot 2 90 62 3-8H 10 depth 20 Stroke + 32 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 67 5.8 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-6.6
P, S, T Section 12.8 Alarm code output If an alarm has occurred, the corresponding alarm number is output in 3-bit code. P, S, T Section 9.1 Note. P: Position control mode, S: Speed control mode, T: Torque control mode P/S: Position/speed control change mode, S/T: Speed/torque control change mode, T/P: Torque/position control change mode 1 6 1.
Stainless steel, PPS, NBR FKM O-ring (Body) NBR t Return spring Stainless steel Cover SPCE y Clip Stainless steel q 17-2-66 7 Series VDW10/20/30 Compact Direct Operated 2 Port Solenoid Valve For Water and Air Dimensions VDW11 VDW21 22 20 Lead wire 300 300 Lead wire VC 27 20 21 27 Rectifying device VDW AC type Rectifying device 2-3.5 27 20 AC type 14 2-3.2 20 VQ 20.5 VX2 17 VX Courtesy
(N)VV4Z1 20 S TAT I O N S 1 T H R E A D T Y P E 02 2 Stations to 20 20 Stations PT 00T NPTF D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly
Battery (only for LECSS2-T ) LEC MR BAT6V1SET Note) The LEC-MR-BAT6V1SET is an assembled battery that uses lithium metal battery 2CR17335A.
Spool/Sleeve Adapter plate r Resin t Resin End plate y Resin Piston u Resin Junction cover i Resin Light cover Part no. for mounting bolt and gasket BG-VFS3000 Replacement Parts VFS31 VFS32 VFS33/34/35 Part no. No. Description Material Return spring Gasket Stainless steel NBR VFS3000-17-1 VFS3000-20 VFS3000-20 VFS3000-17-2 VFS3000-20 o !0 !
Refer to LECSC2-T Operation Manual,chapter 6 for details. Recommended Parameter Values [LEF/LEKFS] LEFS25/LEKFS25 LEFS32/LEKFS32 LEFS40/LEKFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para.
Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.
Connector for unit (Plug) 5 t r t r EX600-AXA EX600-AYA EX600-AMB End Plate q t No.
D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !
70 20 LJ1 LG1 LC1 LX LC6D/LC6C Switches Work piece mounting reference plane 179 171 110 135 52 52.5 Stroke + 131 (table movement range) Stroke + 140 (table movement range) 170 157 7.5 33 37 92 2-T-slot 1 85 90 35 Stroke + 334 2-T-slot 2 90 62 3-8H 10 depth 20 Stroke + 32 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 67 5.8 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-6.6
1 u t w y o !2 Bore size 20 Bore sizes 20 & 25 CHQ CHKm CHN CHM CHSm CH2m Description Material Note Parts List No.
Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
(inch) H2 (Width across flats) T D Note) B E Mounting hole M Weight (g) H1 (Width across flats) Min. port size Model KQ2LE01-00 KQ2LE03-00 KQ2LE05-00 KQ2LE07-00 KQ2LE09-00 KQ2LE11-00 KQ2LE13-00 1 8 1/2-20 UNF 1/2-20 UNF 9/16-18 UNF 9/16-18 UNF 3/4-16 UNF 7/8-14 UNF 1-12 UNF 13.5 13.5 15 15 20 23 26 9.6 10.4 11.4 13.2 15.2 17.9 21.7 27 26 32 29 53 85 105 2.5 3 3.5 4.6 6 7 9.6 15.5 16 16.5
(mm) Size Size Q1 = M 15 20 30 40 Q1 = M 15 20 30 40 Thread Shaft type K T K T K T K T Thread M3 x 0.5 2.5 2.5 2.5 2.5 M3 x 0.5 2.5 2.5 2.5 2.5 L1 = L1 = M4 x 0.7 3.3 3.3 3.3 L1 M4 x 0.7 3.3 3.3 3.3 L1 M5 x 0.8 4.2 4.2 M5 x 0.8 4.2 4.2 Q1 Q1 62 Series CRBU2 (Sizes: 10, 15, 20, 30, 40) Made to Order XC1, 2, 3, 4, 5, 6, 7, 30 Shaft type Standard W J K Refer to page 36.
Note) When placing an order for body ported solenoid valve as a single unit, mounting bolt for manifold and gasket are not attached. Order them separately, if necessary. (For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.
-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B
5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 11LEFS 1500 1500 1500 Mep 11LEJS 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless 500 500
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).