JXCx-OMT0023

limit 3 T PD13 *DI6-1 Input signal device selection 6L (CN1-8) P, S, T PD14 *DI6-2 Input signal device selection 6H (CN1-8) P, S, T PC09 MBR Electromagnetic brake sequence output P, S, T PD15 *DO1 Output signal device selection 1 (CN1-9) P, S, T PC10 ZSP Zero speed P, S, T PD16 *DO2 Output signal device selection 2 (CN1-10) P, S, T PC11 *BPS Alarm history clear P, S, T PD17 *DO3 Output signal

Electric Actuators

1 85 90 35 Stroke + 334 2-T-slot 2 90 62 3-8H 10 depth 20 Stroke + 32 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 67 5.8 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-6.6 92 58 10 10 Stroke + 216 11.5 The body mounting reference plane should be used as a standard when mounting onto equipment.

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VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

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. 3 8 10 stations 10 Base type 01T, 10: 2 to 10 stations Base type 01C, 01F: 2 to 8 stations Symbol Porting specifications (A, B) Passage Symbol R1, R2 P 1 Side 2 Bottom Common Common Caution Option When using an exhaust cleaner, mount it downwards.

CATALOG

T I N G I N D I C AT O R Red LED = Output is OFF Green LED = Output is ON 10 M 5 M S E T T I N G P O I N T 5 M N O Z Z L E T Y P E The detection nozzle should have an I.D. of between 1.0~2.0mm and 2mm in depth.

Electric Actuator/Slider Type

V Servo motor power (V) W Servo motor power (W) U V W 22 Series LECSS-T Control Signal Wiring Example: LECSS2-T For sink I/O interface LECSS2-T 10 m or less Note 4) CN3 5 DICOM CN8 13 MBR RA1 Note 9) Short-circuit connector (Provided as an accessory) Electromagnetic brake interlock RA2 9 INP In position 15 ALM RA3 10 m or less Failure Note 3) Main circuit power supply Note 10) Note 4) CN3

AC Servo Motor Driver (CC-Link Type ）

At power-on, "888" appears instantaneously, but it is not an error. 10 13 10. TROUBLESHOOTING 10.4.3 Remedies for warnings CAUTION If an absolute position counter warning (AE3) occurred, always make home position setting again. Not doing so may cause unexpected operation.

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(End plate) (End plate) t t Series Part no. SX3000-77-1A SX5000-77-1A 10-SY3000 10-SY5000 Series Part no. SX3000-77-1A SX5000-77-1A 10-SY3000 10-SY5000 port EXH port Plug (White) These are inserted in unused cylinder ports and SUP, EXH ports. Purchasing order is available in units of 10 pieces. t 11 15 t 11 15 Series Assembly part no.

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Note) D: Max. diameter Applicable tubing T (with seal) Male Branch Tee: KJT Connection thread (T) UNF NPT 10-32 UNF <10-32 UNF> <10-32 UNF> Applicable tubing O.D.

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1 85 90 35 Stroke + 334 2-T-slot 2 90 62 3-8H 10 depth 20 Stroke + 32 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 67 5.8 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-6.6 92 58 10 10 Stroke + 216 11.5 The body mounting reference plane should be used as a standard when mounting onto equipment.

Magnetically Coupled Rodless Cylinder

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

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Refer to pages 12-10-4 to 12-10-5 for the details on effective holding force and allowable overhanging distance. Misc. D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

ZP

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

Compact Hydraulic Cylinder

20 18 13 26 10 8 16 10 12 12 8 10 10 41 5 8 31 5 25 to 300 15.5 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 5.5 25 to 400 19.5 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 7.5 25 to 500 21 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 7.5 25 to 500 21 (mm) Bore size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151

CRB2/CRBU2/CRB1

sizes 10 15 Applicable sizes 10 Shaft types Description Shaft types S, Y J, K, T J, K, T J, K, T J, K, T Symbol Symbol 20 30 40 15 20 30 40 XA39 Shaft through hole Shaft through hole Shaft through hole S, Y K, T J S, Y K, T J XA31 XA33 XA37 XA45 XA47 Shaft-end female threads Shaft-end female threads Stepped round shaft Middle-cut chamfer Machined keyway XA40 XA41 XA42 Shaft through hole

V100

Number No. r t y u i SS070A 01 1A O-ring FKM 10 SS070A-80A-1 VFN Port size Clip Stainless steel 10 SS070A-80A-2 With 3.18/2 barb fitting With 4/2.5 barb fitting 01 02 Metal joint Stainless steel SS070A-80A-3 10 Leaf spring Stainless steel 10 SS070A-80A-4 Mounting bracket Stainless steel 10 SS070A-80A-5 < U Side End Plate Assembly > w U side end plate assembly no.

5 Port Solenoid Valve

9 y t @0 u 10 Seal (Length) Polarity Terminal 015 no.

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Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Note 10) For an actuator with lock, add the power consumption for the lock.