Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Series CY1L Size: 6, 10, 15, 20, 25, 32, 40 To ensure a permanent path Stable operation is possible, even with an eccentric load, by using ball bushings. When smoother operation is required, even with an eccentric load. Series CY1H Size: 10, 15, 20, 25, 32 The use of a linear guide facilitates a large load, large moment and high precision.

One-touch Fittings

Different Diameter Double Union Y Different Diameter Plug-in Y Double Plug-in Y KQ2UD KQ2UD KQ2X KQ2XD Round Type Round Type Round Type Round Type Union Y Different Diameter Union Y Plug-in Y Branch Y KQ2U KQ2U KQ2U KQ2U Round Type Round Type Round Type Round Type Plug-in Reducer Bulkhead Male Elbow Tube Cap KQ2R KQ2LE KQ2C * The supported release button type (oval type/round type) is shown

Step Motor Controller

A1 Light brown Light brown Red Black Red Black Red Black Red Black Red Black Red Black Red Shield Y ellow Light green Light green Gray Gray White White Light brown Light brown Y ellow Y ellow Light green Light green Black Red Black Red Black Red Black Red Black Red Black Red Black LEL Conductor size: AWG28 A2 A3 A4 A5 A6 A7 A8 A9 A10 A11 A12 A13 Y ellow Y ellow Light green Light green Gray

NCG/CG1

A A1 E1 L1 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 16 25 30 30 40 50 55 M8 x 1.25 16 20 36 44 56 64 8 10 10 14 18 22 11.5 14 14 20 27 31 21 25.6 41.6 50.6 64 72 8.5 10.5 16 20 23 24 8 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 34 41 42 56 71 79 20 25, 32 40 50, 63 80 100 +0.4 +0.2 10.3 20 M10 x 1.25 10 +0.4 +0.2 12.8 22 M14 x 1.5 18 +0.5 +0.3 12 M18 x 1.5 28 22 +0.5 +0.3 16 M22 x 1.5 38 28 +0.5

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

e

X LXS X-axis Y-axis Z-axis 5 Z W 4 kg 5 mm 10 mm 20 mm LC6m 20 LZm Y 10 LC3F2 3 Calculation of Load Factor for Static Load Xm m1: Mass D-m m1 m1 max (from 1 of graph m1) = 15.5 (kg) . E-MY Load factor a1 = m1 / m1 max = 4 / 15.5 = 0.26 X M1: Moment m1 M1 max (from 2 of graph M1) = 1.45 (NNm) .

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

22 25 30 UU 118 139 167 202 D (g6) 15 17 20 25 D (g6) 15 17 20 25 H 36 41 50 60 H 36 41 50 60 H 36 41 50 60 UU 134 158 192 232 N 15 17 20 25 D (g6) 15 17 20 25 Size 50 63 80 100 Refer to pages 11-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-

Series VQ Base Mounted Metal Seal/Rubber Seal

An EXH block base ass'y is used in the blocking position when ordering an EXH spacer incorporated with a manifold No. However, do not order an EXH block base ass'y because it is attached to the spacer. When separately ordering an individual EXH spacer, separately order an EXH block base ass'y because it is not attached to the spacer.

A

D I M E N S I O N S A I R C U S H I O N T Y P E L O N G S T R O K E CG1BA A I R C U S H I O N T Y P E Bore P WA WH Wu (mm) 20 M5x0.8 14 23 30 25 M5x0.8 14 25 30 32 18 14 28.5 25 40 18 15 33 20 50 14 16 40.5 20 63 14 16 47.5 20 80 38 22 60.5 20 100 12 22 71 20 For those dimensions not shown please refer to Rubber Cushion Type.

Vacuum Pad

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

Vacuum Pad

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

Vacuum Pad

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

Hydraulic

Cotter pin size C type, 9 for shaft C type, 9 for shaft 3 x 18l 3 x 18l Size Tolerance AD-EI-20 AD-EI-25 AD-EI-32 AD-EI-40 -0.013 -0.035 -0.013 -0.035 -0.016 -0.043 -0.016 -0.043 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 3.2 3.2 4 4 10 10 12 12 +0.058 0 +0.2 +0.1 Y-02 3.2 x 16l 14 5 20 18 M8 x 1.25 36 16 9 20 CDP-1 9 +0.058 0 Y-03 +0.2 +0.1 14 5 20 18 M10 x 1.25 38 18 9 25 CDP-1 9 4 x 20l

Air Cylinder

Applicable bore size A A1 E1 LA LB MM ND NX NZ R1 U1 Included pin part number Retaining ring size Split pin Y-020B 20 46 16 20 25 36 M8 x 1.25 9 9 +0.2 +0.1 18 5 14 CDP-1 Type C 9 for axis Y-032B 25, 32 48 18 20 25 38 M10 x 1.25 9 9 +0.2 +0.1 18 5 14 CDP-1 Type C 9 for axis Y-040B 40 68 22 24 49.7 55 M14 x 1.5 12 16 +0.3 +0.1 38 13 25 CDP-3 3 x 18 L A knuckle pin and retaining rings (split

15

Selection Graph [Graph 2] Allowable load mass by stroke 10 [Graph 1] Allowable load mass by stroke 6 10 10 Load mass [kg] Load mass [kg] y, z + A 200 y, z + A 300 y, z + A 100 1 1 0 100 200 300 400 500 600 0 100 200 300 400 Stroke [mm] Stroke [mm] [Graph 4] Allowable load mass by stroke 20 [Graph 3] Allowable load mass by stroke 15 100 10 y, z + A = 0 Load mass [kg] Load mass [kg] y, z

4/5 Port Solenoid Valve

(A, B port) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 2-2.6 (For mounting) 11 3 28.1 [35.1] 12.7 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) 21 L plug connector (L): SYJ5 20-L-M5 3 4 5 M plug connector (M): SYJ5 20-M-M5 3 4 5 DIN terminal (D): SYJ5 20-D-M5 3 4 5 M8 connector (WO): SYJ5 20-WO-M5 3 4 5 Approx. 300 (Lead wire length

V

(N)VV4Z1 20 S TAT I O N S 1 T H R E A D T Y P E 02 2 Stations to 20 20 Stations PT 00T NPTF D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly