JXCx-OMT0023

50 20 50 7 20 8.

Table of Contents

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Air Slide Table

Double-ported type Model Stroke 10 20 30 40 50 75 100 125 150 MXQ6A-Zmm(6, 7, 8, 9) u u v v v MXQ8A-Zmm(6, 7, 8, 9) u u v v v v MXQ12A-Zmm(6, 7, 8, 9) u u v v v v v MXQ16A-Zmm(6, 7, 8, 9) u v v v v v v v MXQ20A-Zmm(6, 7, 8, 9) u v v v v v v v v MXQ25A-Zmm(6, 7, 8, 9) v v v v v v v v v Adhesive application points Height interchangeable type Auto Switch Mounting Made to Order Model Selection

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 B A u !7 !6 y q w t !5 r e i u !2 !3 In-line motor type: LEY D 25 32 63 !2 #0 @9 When rod end male thread selected u u !0 @6 @7 @8 @7 @5 Component Parts No. Description Material Note No.

smcmaintenancepartslist

For 20 to 63, remove the lock piston seal. d. For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

Air Cylinder Series CM2

Bore size Built-in Magnet Cylinder Model Without auto switch Auto switch 20 25 32 40 20 mm If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch.

Step Motor Controller

Power supply cable (LEC-CK1-1) is an accessory.

Smooth Cylinder/Low Speed Cylinder

Standard stroke (mm) Bore size 12, 16 20, 25 Standard stroke 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Double acting Action D Built-in Magnet Cylinder Model If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

D3 For 3 stations 10 SS5V U 1 05 16 1 D P D20 For 20 stations Note) For D0, only DIN rail mounting bracket is attached.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Size Port size A B C D E F I J K L M Grommet Grommet with PCB T U T U 50 3/4 110.6 29 36 71 18 4.5 17 51 32.5 38.5 35 51.9 28.5 57.6 38 60 1 131 33 42 95 21 4.5 20 59.5 45.5 49.5 42 60.4 31.1 66 41 Specific Product Precautions Size Port size Conduit DIN terminal DIN terminal without connector M12 connector Bracket mount dimensions T U T U V T U T U a b d e f 50 3/4 59.2 48.9 60.7 55.3 67

Vacuum Pad

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free

Vacuum Pad

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free

Vacuum Pad

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free

Vacuum Pad

Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made

Vacuum Pad

Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made

Vacuum Pad

Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made

Vacuum Pad

Flat pad P. 11 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

u u u u u u u u u u u u u u u u u u U U U U U U U u u u U U U U U U U U U U U U U U U U u u u U 5 V,12 V IC circuit Reed switch Solid state switch 12 V Diagnostic indication (2-color display) 5 V,12 V IC circuit Relay, PLC Grommet 24 V Yes 12 V 5 V,12 V IC circuit Water-resistant (2-color display) 12 V Magnetic field resistant (2-color display) 2-wire (Non-polar) 3-wire (NPN equivalent

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

50 20 7 15 7.

Modular Design with Uniform Body Style

Rubber accelerator u u Others Thread-lock fluid Seawater Leak tester u : Essentially safe : Some effects may occur. u: Effects will occur.