Vacuum Pad

D D 10 14 B B 24 31 A 8 11 A 7 10 Model ZP3-T035U;K3-B3 ZP3-T035U;K6-B3 Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Vacuum Pad

D D 10 14 B B 24 31 A 8 11 A 7 10 Model ZP3-T035U;K3-B3 ZP3-T035U;K6-B3 Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Vacuum Pad

D D 10 14 B B 24 31 A 8 11 A 7 10 Model ZP3-T035U;K3-B3 ZP3-T035U;K6-B3 Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

V100

20 <U side end plate assembly> L 52 30 10 U side end plate assembly part no.

Valve Single Unit

When a longer DIN rail is desired than the specified stations, specify the station number to be required. (20 stations maximum) D U D side U side 2 to 10 stations 20 20 stations This also includes the number of b l a n k i n g plate assembly.

Modular Design with Uniform Body Style

5000 0 10 5000 15000 Flow rate [L/min (ANR)] 0 15000 Flow rate [L/min (ANR)] 90 AL20-D to AL60-D Series Dimensions AL20-D T N S J M U Bracket (Option) D R C B V Q IN OUT 2 x P (Port size) A Clearance for maintenance G S N T U D M J AL30-D to AL40-06-D R C V Q IN OUT 2 x P (Port size) B A E Clearance for maintenance G AL50-D to AL60-D T N S J M D U Bracket (Option) R V Q C B IN OUT 2 x P

ZP3

to 16 w q ZP3 B N 10 9 Model A B C q Pad dia.

Compact Cylinder

9.5 12.5 15.5 16 18 13 11 13.5 B 10 10.5 12.5 13 13.5 19 21.5 20.5 A 10 13 16 16.5 18.5 13.5 11.5 14 B 10.5 11 13 13.5 14 19.5 22 21 B 15.5 16 18 18.5 19 24.5 27 26 A 7.5 10 13 13.5 15.5 10.5 8.5 11 B 7.5 8 10 10.5 11 16.5 19 18 A 11.5 6.5 4.5 7 B 7 12.5 14.5 13.5 A 15 18 21 21.5 23.5 18.5 16.5 19 A 7.5 10 13 13.5 17 12 10 12.5 A 11.5 14 17 17.5 21 16 14 16.5 Bore size 12 16 20 25 32 40 50

AC Servo Motor Driver (Pulse input type/Positioning type ）

frame 10 A 20 Note 1.

High Vacuum Angle Valve

magnet) Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-7 1.3 x 10-9 (FKM) None A B C Note 1) Standard lead wire length is 0.5 m.

AC Servo Motor Driver (Network card type ）

Connect the driver power output (U/V/W) to the servo motor power input (U/V/W) directly. Do not let a magnetic contactor, etc. intervene. Otherwise, it may cause a malfunction. CAUTION Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U V V M V M V W W W W 3 2 3.

smcmaintenancepartslist

Note) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g). Order with the following part number when only the grease pack is needed.

Table of Contents

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

Table of Contents

u u s s s d d d i i i MHL g g g o o o n n n r r r P P P A A A 9 9 9 w w w 9 m 9 9 I m I 1 1 n 9 9 9 9 n 9 9 MHR d u d u r u a a a r u o 9 9 9 s o s F tr F ie tr ie r r r 1 1 1 D r D r d d d e e e e v v s s o o i i g n g n n n n n a a H H Rotary Gripper MRHQ 10/16/20/25 MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

AC Servo Motor Driver (CC-Link Type ）

A 10 CONTENTS 1.

Table of Contents

The air from P portmoves to needle valve u, where its flow is adjusted, and flows to A port. The meter-in control of needle valve u slowly moves the cylinder from A to B.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Switch D-A9 D-M9 D-M9W Auto switch Auto switch B A B A 22 22 U U (24.5) ( ): For D-A93 type D-H7 D-H7W D-H7NF D-H7BAL D-C7 D-C8 RSQ RSG RS MI U U B A 26 B A 29 D-C73C D-C80C D-H7C U U B A 36.7 B A 38.2 Auto Switch Proper Mounting Position Auto Switch Mounting Height Auto switch model (mm) (mm) Auto switch model D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-C7 D-C80 D-C73C D-C80C D-H7BAL D-H7W

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

T MODEL SC 120 80 4 46.2 1 ERR T/R RUN (35) 0 10.6 Drawing shows a SC case. 4 x M5 mounting hole D side U side n Stations 8 7 6 5 4 3 2 1 C10 [3(R) EXH port] C10: 10 One-touch fitting EXH EXH R DIN rail clamp screw R 24.5 9.5 B B B B B B B B P X X P 31.6 49 16 A A A A A A A A (12) P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

T MODEL SC 120 80 4 46.2 1 ERR T/R RUN (35) 0 10.6 Drawing shows a SC case. 4 x M5 mounting hole D side U side n Stations 8 7 6 5 4 3 2 1 C10 [3(R) EXH port] C10: 10 One-touch fitting EXH EXH R DIN rail clamp screw R 24.5 9.5 B B B B B B B B P X X P 31.6 49 16 A A A A A A A A (12) P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting

AC Servo Motor Driver (CC-Link Type ）

Connect the servo motor power terminal (U, V, W) to the servo motor power input terminal (U, V, W) directly. Do not let a magnetic contactor, etc. intervene. Driver Servo amplifier Servo motor Servo amplifier Servo motor Driver U U U U V V M V M V W W W W Do not connect AC power directly to the servo motor. Otherwise, a fault may occur.