C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

CS1

40 90 59 43 14 39 36 40 32 to 1200 3/4 M40 X 1.5 60 63 41 90 115 18.5 204 162 M18 X 1.5 20 17 23 45 70 48 39 44 50 40 to 1200 3/4 1 Lube Non-lube M45 X 1.5 60 63 90 115 18.5 46 20 226 182 M20 X 1.5 17 50 48 44 25 74 39 50 40 to 1200 M56 X 2 71 67 140 25 56 277 225 23 M24 X 1.5 110 60 60 20 55 30 86 49 63 50 to 1200 1 M64 X 2 80 76 65 140 30 330 270 M30 X 1.5 23 130 37 70 96 60 20 49 68 80

KQ2

(inch) Min. port size Applicable tubing Note) B E T (UNF) D Mounting hole Mass (g) M Model KQ2LE01-00 KQ2LE03-00 KQ2LE05-00 KQ2LE07-00 KQ2LE09-00 KQ2LE11-00 KQ2LE13-00 1 8 1/2-20 1/2-20 9/16-18 9/16-18 3/4-16 7/8-14 1-12 15.5 16 16.5 17 18.5 21 22 17.46 17.46 17.46 17.46 22.23 25.4 28.6 13.5 13.5 15 15 20 23 26 27 26 32 29 53 85 105 9.6 10.4 11.4 13.2 15.2 17.9 21.7 2.5 3 3.5 4.6 6 7 9.6

Regulator Valve

Not suitable for use as an emergency shutoff valve, etc. AC coil VEX1101, VEX1201, VEX1301 20% or less of rated voltage VEX1501, VEX1701, VEX1901 15% or less of rated voltage The valves presented in this catalog are not designed for safety applications such as an emergency shutoff valve.

o

(8.3-2O0OHz) o External Pilot Tape,/ NVJ300R An external pilot supply is required when main valve pressures are lower than 20 PSl.

o

(8.3-2O0OHz) o External Pilot Tape,/ NVJ300R An external pilot supply is required when main valve pressures are lower than 20 PSl.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(8.3-2O0OHz) o External Pilot Tape,/ NVJ300R An external pilot supply is required when main valve pressures are lower than 20 PSl.

LEJ-OM004xx

(reference value) 11-LEJS40* Speed 600mm/sec Speed 1200mm/sec 100,000,000 100,000,000 10,000,000 10,000,000 ISOclass8 ISOclass8 0/mi n( AN R ) ISOclass6 1,000,000 1,000,000 ISOclass7 ISOclass7 Particl concentration[Particls/m 3] Particl concentration[Particls/m 3] 100,000 100,000 0/mi n( AN R ) ISOclass6 10,000 10,000 ISOclass5 ISOclass5 50/mi n( AN R ) 20/mi n( AN R ) 1,000 1,000 ISOclass4

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

10 to 16 20 to 50 Pad dia.

CV/MVGQ

247 280 292 Z 101 111 115 138 144 Z 93 103 107 129 135 ZZ 221 231 239 271 283 40 50 63 80 100 15 0.032 0.059 15 0.032 0.059 18 0.032 0.059 25 0.040 0.073 25 0.040 0.073 38 20 20 20 24 24 45 50 57 69.5 79.5 23 23 28 35 43 85 95 110 140 162 77.5 87.5 102 124.5 144.5 115 125 146 190 212 8 0 0 0 0 18 18 18 20 20 43.5 49 63 73 The minimum stroke of the one with rod boot is 20 mm or more. 10-15

HEC-OM-R008

Do not use an open tank. Sep W TW UW VW . ZW AW BW . Oct X TX UX VX . ZX AX BX . Nov y Ty Uy Vy . Zy Ay By . Normal When high head pump option selected Dec Z Tz UZ VZ . ZZ AZ BZ . 5 Installation Continued 5 Installation Continued 6 Operation Continued 7 Outline Dimensions (mm) 6.3.1 Level 1Settings HECR002 HECR002-A5-E(option) No.

CV/MVGQ

For detailed specifications, refer to page 10-20-1.

Electro-pneumatic proportional valve

Install an air filter. Install an air filter just before near the electro-pneumatic proportional valve. Select an air filter with a filtration size of 5 m or smaller. 3. Take measures to ensure air quality, such as by installing an aftercooler, air dryer, or drain catch.

NVZseies

-(OG) NW$21-20-(OH) L type plug connec-tor M typ plug connector /NW4Z1-20-(OL) /NW4Z1-20-(OM) 11.91(3m) f]: with indicator light ancj surge voltage suppressor Symbol (intmal pilot tpe) N.C.

3 Way,3 Port Solenoid Valve NVZ Series

-(OG) NW$21-20-(OH) L type plug connec-tor M typ plug connector /NW4Z1-20-(OL) /NW4Z1-20-(OM) 11.91(3m) f]: with indicator light ancj surge voltage suppressor Symbol (intmal pilot tpe) N.C.

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: U (Conforming to UL Standards)

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: MU (M+U)

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: T (High-pressure Pump Mounted)

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: M (Applicabe to DI Water Piping)

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: Y (w/Feet and No Rack Mounting Brackets)