TABLE OF CONTENTS

.T .

NVZseies

stations exhausl hom bolh sides of manllold. 20 20 stations BLnk pHl.3dy DXT20I -r 5-14 NW3Z5-2!Ol NW3Z5-21R{)l Applkrbl. valvo6 . NW3Zs-21-O1-007 Nvzsl2-OOO-o1T NVz5i2M-OOO-017 . NW3Z5-21R-O1-007 NVzslzR-elCO 01T NW3 ott, statpns t 20 20 stations ll there are more than I stations, supdy air and exhaust from trcth sides of manifold.

3 Way,3 Port Solenoid Valve NVZ Series

stations exhausl hom bolh sides of manllold. 20 20 stations BLnk pHl.3dy DXT20I -r 5-14 NW3Z5-2!Ol NW3Z5-21R{)l Applkrbl. valvo6 . NW3Zs-21-O1-007 Nvzsl2-OOO-o1T NVz5i2M-OOO-017 . NW3Z5-21R-O1-007 NVzslzR-elCO 01T NW3 ott, statpns t 20 20 stations ll there are more than I stations, supdy air and exhaust from trcth sides of manifold.

Vacuum Regulator

16.5 S T 35 R 10.5 R 5 Elbow fitting Panel cut Panel plate thickness: Max. 3 34 15.4 x 5.4 One-touch fitting 83 Air 63 15.5 4.5 (mm) Fitting Part Dimensions 14.5 22 Fitting size VAC/SET Straight R Elbow S Elbow T Elbow U 11 14 Elbow V Rc 1/8 Pressure gauge port 50 19.1 33.1 6, 1/4" 8, 5/16" 10 12 19 20 26 28 7.5 10.5 Pressure switch 5 Series IRV10/20 Dimensions/IRV20: Standard Connections

Direct Solenoid

Direct Solenoid Series NVS 3105, 4014/ 402/3/ 4/ 54 ,.,4:,.t .,r".,,,. 't;"iii:l:lr:'ir'i' .l l:r':].l:'.:ri:]"r''irr':''i ' r.i' 'r "i "" ' r' ,.it:.i:ur,,r':.,'l:.,t:i:rr'].i:,i::.!t'.:.,i,l.:a,,l'.::ra,'.i,," " . r' i l ,,,.:,:].::.i::.::rl::]rr:,;,:::t,:,,,t,.i:.i:t.:fi:l':,rill..ia,it,"l'-'.:l:...:', ,'l.it:la:::lt]i:ri:t,:i;:i.:i:.,'i:r':::l'.'rt:ail.:r'.,t'...':.'

Modular Type Filter Regulator Series AW

t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

21- AF-A 10- Series Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard:Selectoneeachfora to e. Option/Semi-standardsymbol:Whenmorethanonespecificationisrequired,indicateinalphanumericorder.

Air cylinder

(Same side) 20+55(n2)/2 n=2, 4, 6, 8 D-F5NT 10 1 switch 20 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7H D-Y7W 1 switch, 2 switches (Different side, Same side) 15 10 10+40(n2)/2 n=2, 4, 6, 8 Other qty. 15+40(n2)/2 n=2, 4, 6, 8 1 switch, 2 switches (Different side, Same side) D-Y69 10 D-Y7PV D-Y7WV 10+30(n2)/2 n=2, 4, 6, 8 Other qty. 1 switch, 2 switches (Different side, Same side) 20 D-Y7BA 20+45(n2)/2 n=

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.05 to 3 L/min 0.15 to 3.15 L/min 5 V 20 mA 30% 70% PF2M705 92% 8% 0.1 to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA

Air Pilot Operated Series NVSA

@nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

Series MLGP

t e 2 ) 1 pcs. 15 D-P3DW(A) 2 pcs. 15 1 pc. 5 N o t e 2 ) N o t e 4 ) 2pcs.

Air Pilot Operated

@nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

ALB900

Description Type Model ALB900-10 ALB900-20 ALB900-30 VBA Oil can be replenished by merely opening and closing the oil filler plug without stopping the air line.

Air cylinder

Fig. 6 How to remove rod seal Fig. 7 How to remove piston seal 3) Tube gasket Pull out with the precision screwdriver. 20 3-2-3. Grease C a u t i o n Use SMCs recommended grease.

rep-modular-e

1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

I

E l e c t r i c a l c a b l e m u s t n o t b e s u b j e c t e d t o excessive force. 2 When connecting the switch, use a spanner on the h e x a g o n f i t t i n g . N E V E R u s e t o o l s o n t h e s w i t c h body. 3 Do not use switch near corrosive materials. 4 The switch is not liquid sealed.

Ｖ cylinder

Modify the mounting. 19 20 21 4. Construction Standard product: Double acting/single rod Table 12. Parts list No. Description Qty No.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

B T 0604 20 Refer to Best Pneumatics No. 6 for details on valves.

Cylinder with lock

Apply grease to the seal groove and outer circumference by rubbing grease into them as shown in Fig. 20. 3) Tube gasket ( in Fig. 18) Install with care not to twist the tube gasket. A little less than 1 mm Fig. 19. Rod seal Fig. 20.