Aluminum High Vacuum Angle Valve Heater: 422 A XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.
B port) 2n2-One-touch fitting (Pitch) Applicable tubing O.D.: 8 (A, B port) 2n1-Rc 1/4 (Mounting hole) 4-4.5 P = 20.5 13.5 10 16.5 9.4 21 19.5 76.8 22.4 11.5 SV B A B A B A B A B A B A B A 19 20.5 EA EB P SZ EB EA P 20 20 21 21 SY 62.5 60 (5.5) 141.1 93.8 30 SYJ 128.1 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside
x 0.8 2-P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2-P through A1 H E 4-T counter bore 0.5 B S Z (mm) S Z T QA R Q A A1 P GB MM B C D E GA L J H GC Bore size 5 30 40 50 5 10 15 20 25 30 40 50 15 20 25 10 4.5 2 16 12 9 4 20 16 12 11 5.5 4.5 26 20 40 32 8 6 30 27 6 5 16 14 19 16 22 19 21.5 19 116 126 135 145 M6 x 1.0 M5 x 0.8 14 12.5 40 36.5 81 72.5 86 77.5
ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 1 Key e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Model CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 L Screw M6 48 M8 52 M8 60 M10 80 11-4-4 70 Series CRB1 Rotary
ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 1 Key e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Model CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 L Screw M6 48 M8 52 M8 60 M10 80 11-4-4 70 Series CRB1 Rotary
ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 1 Key e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Model CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 L Screw M6 48 M8 52 M8 60 M10 80 11-4-4 With One-touch Fittings
(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 18.8 39.3 18 18.8 39.3 40.1 R R 3/5 3/5 4 A 4 A 4 A 3/5 4 A 4 A 4 A R R 3/5 4 A 4 A 4 A 4 A 4 A 4 A 63.3 79.8 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing
T VMG Union Y P. 60 KCU Use to branch line in the same direction. 2 branched ports has a self-seal function. Check adaptor P. 60 KCJ Use to add the selfseal mechanism to the usual One-touch fittings, Series KQ. Bulkhead union P. 60 KCE Use to connect tubes through a panel. One of two ports has a self-seal function.
A B P A B P A B P VFR3000 VFR4000 ARBF5050 VFR5000 1.0 MPa (1) 0.1 to 0.83 MPa (2) 0.05 to 0.83 MPa 5 to 60C (No freezing) (3) 1 8 0.16 0.46 0.72 0.83 5.5 5.1 12 11 M5 x 0.8 Rc 21 18.5 11 35 31 26 18.5 22 12 31 31 40 55 36 45 24 44 38 32 38 40 90 77 P A P B A EA B EB Effective area at supply side (mm 2) S at P1 = 0.7 MPa/P2 = 0.5 MPa 31 Effective area at exhaust side (mm 2) S at P2 =
1 8 Rc 1 8 Rc 1 8 Rc 1 8 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 33.5 34 34.5 6.6 5 to 50 19 21.5 23 8 5 to 50 11.5 5 to 50 L H J P Q QA R S SA T W Y Z Model ZC(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 ( ): In the case of a mounted auto switch.
AFD20-A) and NPT1/4 (applicable to the AFM30-A/40-A, AFD30-A/40-A).
valve P. 193 Water-cooled condenser P. 192 A Accumulator P. 193 Adjustment sensitivity (Hysteresis) P. 197 Air-cooled condenser P. 192 Analog communication P. 199 ARW width (Anti-Reset Windup width) P. 197 Auto-tuning P. 197 B Band width, Temperature upper/lower limit width P. 197 Breaker P. 198 C Capillary tube P. 192 Cascade pump P. 194 CE marking P. 199 Centrifugal pump P. 194 CFC refrigerant
OUT IN OUT IN A G H H M M AR50, 60 AR30, 40 J G J G A A IN OUT IN OUT H M M H Parts list Material Note No.
4 port base mounted 10-SYJ3000 Common SUP/Common EXH Common SUP/ Individual EXH R P A P. 299 B Type 32 4 port base mounted 10-SYJ3000 P R A P. 299 B Type 40 5 port base mounted 10-SYJ5000 P. 327 10-SYJ7000 P. 357 Type 41 10-SYJ3000 5 port base mounted P. 299 10-SYJ5000 P. 327 10-SYJ7000 P A P. 357 B Type 42 5 port base mounted 10-SYJ5000 P. 327 10-SYJ7000 B B R P A P. 357 Type 43 5 port
P. 44 KQ2K P. 50 KQ2W Bulkhead union Bulkhead connector P. 56 KQ2E P. 56 KQ2E Use to connect male thead and tube through a panel. Use to connect tubes through a panel. Nipple Reducer nipple P. 57 KQ2N P. 57 KQ2N Use to connect Onetouch fittings that are different tubing O.D.s. Use to connect Onetouch fittings.
A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60
B FB EB H 4-counterbore depth C 4-J depth JK HI S + Stroke HO TT T HP HG MM thread depth M PA H 2-P Hollow shaft for piping HP HG 2-P d D LD A 5.5 NN GP PW PW QW GP PB W HT HT (11) RW HB HS HB HA L G G View A REAL15 HS Z + Stroke Q + Stroke A N N (mm) HP HO HI HG HB HA H GP G FB FA EB EA d D C B Model A REAL15 REAL20 REAL25 REAL32 REAL40 39 38 14 16 4 6.5 40 65 6.5 6 3 13 6 12 16.6 5 9.5
P RS H A RZQ W W > WV P > PV Determination of allowable load weight & pressure MI W S Inclined operation CEP1 (For vertical operation, refer to page 10-2-30.)
Bore size (mm) Series Variations 16 20 25 32 40 50 63 80 100 125 2 Finger 4 Finger 3 Finger Series MHS2 Gripping of diverse workpieces P.544 Series MHS3 Axial gripping of cylindrical workpieces P. 552 Long stroke Series MHSL3 Accommodates a wide range of workpiece diameters P. 586 Series MHS4 Positioning of square workpieces P. 596 540 MHSL3 Long Stroke P. 586 Opening/Closing stroke more
A A A A A A A A 44.5 R P 34.5 26.5 28 25 B B B B B B B B 18.5 19 11 2n-C3, C4, M5 6 7.5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting 18.4 P = 10.5 M5: M5 thread Note 1) Built-in silencer types are equipped with a 1 (P) SUP port on both D and U sides. 3 position needs two stations.