SMC Corporation of America
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A5 IN3 A5 IN3 A6 DRIVE A6 DRIVE A7 SVON A7 SVON Internal resistance 10 [k] Internal resistance 10[k] A8 NC A8 NC A9 NC A9 NC Main circuit Main circuit Output signal power Output signal power supply supply A10 NC A10 NC 24 VDC 24 VDC DC2(+) B1 DC2(+) B1 DC2(-) B2 DC2(-) B2 BUSY B3 BUSY B3 B4 ALARM B4 ALARM B5 OUT0 B5 OUT0 B6 OUT1 B6 OUT1 Maximum Output current 10 mA Maximum Output current

ZP3-T (04/06/08) UM:-A5 ZP3-T (04/06/08) B:-A5 ZP3-T (04/06/08) UM:-B5 ZP3-T (04/06/08) B:-B5 ZP3-T (04/06/08) UM:-A10-@ ZP3-T (04/06/08) B:-A10-@ ZP3-T (04/06/08) UM:-A10-04 ZP3-T (04/06/08) B:-A10-04 ZP3A-T3-A12-06 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

ZP3-T (04/06/08) UM:-A5 ZP3-T (04/06/08) B:-A5 ZP3-T (04/06/08) UM:-B5 ZP3-T (04/06/08) B:-B5 ZP3-T (04/06/08) UM:-A10-@ ZP3-T (04/06/08) B:-A10-@ ZP3-T (04/06/08) UM:-A10-04 ZP3-T (04/06/08) B:-A10-04 ZP3A-T3-A12-06 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

ZP3-T (04/06/08) UM:-A5 ZP3-T (04/06/08) B:-A5 ZP3-T (04/06/08) UM:-B5 ZP3-T (04/06/08) B:-B5 ZP3-T (04/06/08) UM:-A10-@ ZP3-T (04/06/08) B:-A10-@ ZP3-T (04/06/08) UM:-A10-04 ZP3-T (04/06/08) B:-A10-04 ZP3A-T3-A12-06 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

B C D E Model no. E [Tightening torque] L[]ZC[]5[] 16 20 15.5 52.5 L[]ZC[]3[] 12 20 8 37 Model no. A B C D L[]ZC[]5[] M10 x 1.25 x 12 deep [24.5Nm] L[]ZC[]3[] M6 x 1.0 x 8 deep [5.2Nm] Model no.

Front matter 1 Vacuum Saving Valve Series ZP2V How to Order ZP2V 03 A5 Connection thread symbol for the pad Fixed orifice size Male thread connection Applicable fixed orifice size Fixed orifice size (mm) Symbol Thread size Symbol 0.5 0.3 0.7 1.0 A5 A8 A01 AG1 AN1 03 05 07 10 0.3 M5 0.5 M8 No.0.8 0.7 R1/8 Male thread 1.0 G1/8 Pad side NPT1/8 Female thread connection Applicable fixed orifice

THREE-PORT VALVES FIVE-PORT VALVES D I R E C T A C T I N G VT S E R I E S (S E E V A LV E S E C T I O N) V A C U U M V E R S I O N SY B O D Y P A R T E D (S E E V A LV E S E C T I O N) H O W T O O R D E R VT S E R I E S H O W T O O R D E R SY S E R I E S VT3 V Refer to series VT307/327 P O R T W AY SY 20 X20 S I Z E 07 17 25 S I Z E E N T E R A S S TA N D A R D P A R T F O R E X T E R N

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

B='=(ij ~~2 ('O-m E -=-'0 ~!!! "":'0 'v' L-4-L-,j-i) . ., :2 ~ Interface ~ ~ i!i regulator .:;,.~ E ... ~ .. SUP gallery block disc: AXT634-10A EXH gallery block disc: AXT634-11A Cb"''lC ~~E i~ ~ L . .

Single vane type Double vane type 90 180 270 90 r a n n o n a g r e g ti n 2 e a o n r a o n 7 ti t g ti 1 a o 0 e a t 8 o r 9 t +4 0 r 0 o 0 y y r e +4 0 +4 0 e Key y K K e K Key Key +4 0 (45) 0 Standard Optional Key 9 e g n ra n o ti a t o r (90) y e K (45) (45) A port A port A port A port B port B port B port B port 100 190 280 100 a r n n g a r n n o g e io e ti at r n a 1 o a n 1

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Symbol: A21 Symbol: A22 Symbol: A26 Symbol: A23 T W1 L L L L CP95 RD 30 DA 30 30 DA H1 H1 DA E NCM H1 Symbol: A5 Symbol: A6 Symbol: A7 Symbol: A8 30 DB DB NCA B C1 H B C T B RD T X LA H C1 DW X L H C1 X L X L K L LB -X W E L 30 30 30 L DC 30 Symbol: A30 Symbol: A29 Symbol: A28 Symbol: A27 20L L H1 Data 30 30 30 30 H1 W H1 DA E DA W Symbol: A9 Symbol: A10 Symbol: A11 Symbol: A12 X C0.5

R S T E E E 24 25 28 29 30 31 37 38 Communication cable Communication cable outlet (also used as signal cable outlet) 27 Series HRG Optional Accessories Note) Please order separately. Necessary to be fitted by customer.