Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.
control terminal LC3F2 1 C2 02 1 3 Blue DC () Driver power supply (0 V) 4 2 3 1 Cable type Cable length 01 02 1 m 2 m Cable length 60 5 60 5 Cable for CN2 control terminal C2 CN2 Control Terminal Table Pin number 1 Terminal Function Common terminal Optional cable color White COM ON: Motor output OFF: No motor output ON: Adjusted thrust OFF: 100% thrust (Max. thrust) ON: A-PHASE (Retracted
PROFIBUS DP V1 9.6 k/19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 M 156 k/625 k/2.5 M /5 M/10 M Communication speed [bps] 10 M/100 M 125 k/250 k/500 k Configuration file Note 2) GSD file EDS file EDS file Communication specifications Input 896 points 108 words 4 stations occupied (8 times setting) Input 57 words Output 57 words Input 256 bytes Output 256 bytes Input 200 bytes
Dimensions Panel mount union reducing: LQ1P-R Panel thickness (Max. t) J W1 W2 M1 M2 B side A side H2 H1 E2 E1 L1 L2 Class 4 and 5 Panel hole diameter K Metric Size Model A side B side E1 E2 H1 H2 J K L1 L2 M1 M2 Min. port size t W1 W2 Applicable tubing O.D.
Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 21. Press the [] key. Displays screen for setting the function of the Contact output signal 3.
Bore size Stroke Head Flange (G): ClM3G R0.5 Effective thread length 2 x FL 4 x FD Mounting hole H2 2 x P 2 x NN G G Width across flats B2 2 x FD Mounting hole Width across flats KA C2 D H1 Corner of the cover I Eh8 FY B MM AL A H Z + Stroke S + Stroke F 1.5 Width across flats B1 Width across flats lNA 20 to 32 FX FZ FT 40 ZZ + Stroke Head Flange (G) (mm) AL 14.5 A 12 B 34 B1 13 B2 26 C2
G Za2 D2 Ea Ea Eb Eb 4-MM E1 E1 E2 E2 C2 P Q2 Section Za2 detail (Adjustable range) B2 F2 D G Section Z detail (Adjustable range) F B3 B2 B1 C1 Zb2 JJ B F Z H K2 Counter bore depth H H L Thread length A2 Section Za2 detail (Adjustable range) A A 2 x 2 x LD J C Mounting direction (1) Mounting direction (2) C2 (mm) (mm) Adjustable range Applicable cylinder MY1B25 MY1B32 MY1B40 Mounting direction
MY2H G D Za MY3A MY3B 4 x MM E1 E1 MY3M E4 E4 E3 E3 C E2 E2 F B G D Section Za detail (Adjustable range) Section Z detail (Adjustable range) Q P Zb JJ F B3 K B2 H B1 C1 Z B F A L 2 x 2 x LD Section Zb detail (Adjustable range) H A H A holding bolt (mm) B C D F G 90 H A Model MY-J50 MY-J63 Applicable bore size MY1B50 MY1B63 110 110 55 70 126 37 J C2 C 131 130 65 80 149 100 37 K L P Q E3 E4
Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.
direction (2) C2 C K 20 20 JJ M8 x 1.25 M10 x 1.5 LD 11 14 L 7.5 9.5 E4 2.5 2.5 P 16 19 Q E3 2.5 2.5 Model MY-J50 MY-J63 Applicable bore size MY1B50 MY1B63 (mm) 8 9.5 Mounting direction (2) Common G H 3.2 4.5 4.5 Applicable bore size Model D J 35 40 47 MM 5.5 6.5 6.5 A 63 76 92 B C 39 47 56 F 100 124 144 MY1B25 MY1B32 MY1B40 MY-J25 MY-J32 MY-J40 40 55 74 78 94 112 60 80 100 F Mounting direction
Note 2) The direction of rod end width across flats (;K) differs depending on the products.
Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.
Note 2) The direction of rod end width across flats (K) differs depending on the products.
Switch mounting bracket: Part no. 110C K Heat resistant tarpaulin Maximum ambient temperature for the rod boot itself. 1574 Valve Mounted Cylinder: Non-rotating Rod Type Double Acting Series CVM5K Mounting Bracket Part No.
: Moment center position distance compensation amount My L1 A2 L3 C2 (mm) B2: Moment center position distance compensation amount MXW8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 A2: Moment center position distance compensation amount Mr (mm) (mm) W Mp MXW8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 MXW8 MXW12 MXW16 MXW20 MXW25 10 10 14 20 28 W W 8-7-2 3 Long Stroke Slide Table Series MXW Dynamic
MXS MXQ 8 x M5 x 0.8 thread depth 13 Note) MXF 6H9 + 0.030 0 depth 5.5 (Insert) 6H9 + 0.030 0 depth 5.5 7 MXW MXJ 72 98 48 MXP MXY Y Y 25 160 40 L 40 40 MTS 11 24 24 K A 60 50 32.5 Z A Bottom through-hole 5.1 N x M6 x 1 thread depth 12 (N-1) x H G H 7 GG HH 6H9 + 0.030 0 depth 5.5 NN x M6 x 1 thread depth 12 Bottom through-hole 5.1 F E 6H9 + 0.030 0 depth 5.5 (mm) DHH H J K L E N F NN G Z
: Correction value for moment center distance L1 A2 L3 C2 My (mm) A2: Correction value for moment center distance MXW 8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 B2: Correction value for moment center distance (mm) Mr (mm) W Mp 10 10 14 20 28 W MXW 8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 MXW 8 MXW12 MXW16 MXW20 MXW25 W Dynamic moment Moment due to impact of load at end of stroke.
F AL I B2 C2 D H2 HX A Bore size (mm) 20 25 32 40 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 41 75 60 4 7 34 5 13 15.5 28 8 18 57.5 13 26 30 5 8 45 75 60 4 7 40 5.5 13 19.5 33.5 10 22 63.5 17 32 37 6 8 45 75 60 4 7 40 5.5 13 19.5 37.5 12 22 68 17 32 37 6 8 50 82 36 66 5 7 52 7 16 21 46.5 14 24 76 22 41 47.3 8 10 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100
Load impedance = 1 mA 2 pcs. 3 k = 6 V Example: Load impedance is 3 k. Leakage current from switch is 1 mA.
Series SY3000/5000 Valve Replacement Parts 1 How to Order Port Block Assembly Mounting screw 0V 6A SY One-touch fitting Series 3 5 Thread type Nil F N T 3000 5000 Rc G NPT NPTF Pilot type Nil R A, B port size Thread piping Symbol Port size M5 01 Except M5 Internal pilot External pilot Option for mounting Nil 1 Applicable series SY3000 SY5000 M5 x 0.8 1/8 Standard (Valve mounting screw not