Pressure Gauge: ø37.5 Outside Diameter, Back Side Thread, Display Pressure: 1.0MPa, 150PSI, Connection Thread: 1/8 NPT, Option: Both MPa and PSI

PSxx-OMG0001CN

"-M" ( ) "-M" 13 SI kPaMPa 14 15 () 16 () / ( () ) -29No.PS-OMG0001CN-H OUT1 80mA OUT2 7F.S. 3 ( 4dights ) 1 -30No.PS-OMG0001CN-H PSE3 -100100 kPa 0-101 kPa 0100 kPa 01 MPa 0500 kPa 02 kPa 1 -101101 kPa 10-101 kPa -10100 kPa -0.11 MPa -50500 kPa -0.22 kPa 0.2 kPa 0.1 kPa 0.1 kPa 0.001 MPa 1 kPa 0.01 kPa DC1224 V10P-P10 50 mA() PSE30DC15 V(1 M) PSE31DC420mA100 ) 1 26.4V

PFxx-OMO0004CN

62No.PF-OMO0004CN-E IN (58 ) 1 () GND 30msec. 2 1 1 2 -63No.PF-OMO0004CN-E -5% OUT1 (OUT1)80 mA , OUT2 (OUT2)80 mA OFF () () (( 1 )(57 ) () () -64No.PF-OMO0004CN-E PFMB7201 N2 (JISB8392-1 1.1.21.6.2 1) ISO8573-1 1.1.21.6.2 050 2200 L/min 2210 L/min 0999,999,999 L 1 L/min 1 L (50 msec.) 1 L/pulse 2 2 5 00.75 MPa 1.0 MPa 3 5F.S.(00.75 MPa0.35 MPa ) DC1224 V10 P-P10

PFxx-OMP0001CN

OUT1)80 mA OFF, OUT1 (OUT2)80 mA OUT2 OFF () () (( 1 )(54 ) () () -61No.PF-OMP0001CN-F PFMB7501 PFMB7102 PFMB7202 N2 (JISB8392-1 1.1.21.6.2 1) ISO8573-1 1.1.21.6.2 050 5500 L/mim 101000 L/mim 202000 L/mim 5525 L/mim 101050 L/mim 202100 L/mim 0999,999,990 L 1 L/min 10 L (50 msec.) 1 L/pulse 10 L/pulse 2 2 5 00.8MPa 1.2MPa 3 5F.S.(00.8 MPa0.6 MPa ) DC1224 V10 P-P10

PFxx-OMS0001CN

-5% (OUT1)80 mA OFF, OUT1 (OUT2)80 mA OUT2 OFF () (( 1)(58) () () () -65No.PF-OMS0001CN-A PFMC7501 PFMC7102 PFMC7202 N2 (JISB8392-1 1.1.21.6.2 ISO8573-1 1.1.21.6.2) 050 5500 L/min 101000 L/min 202000 L/min 5525 L/min 101050 L/min 202100 L/min 0999,999,990 L 1 L/min 10 L (50 msec.) 1 L/pulse 10 L/pulse 1 2 5 00.8MPa 1.2MPa 2 5F.S.(00.8 MPa0.6 MPa ) DC1224 V10 P-P10

Valve Controller

Description of operation P10-11 6. Cascade connection P12-13 7. Temporary stop operation P14-17 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Valve Controller

Description of operation P10-11 6. Cascade connection P12-13 7. Temporary stop operation P14-17 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Low Profile 2/3-Port Solenoid Valve

Doc. no.SX90***-OMY0004 PRODUCT NAME Low Profile 2/3-Port Solenoid Valve MODEL / Series / Product Number SX90/090 Series Contents Safry Instructions P2,P3 Design Instrucrions P4 Selection P4 Mounting P5 Piping P5 Wrining P6 Air Supply P6 Operating Enviroment P6,P7 Maintenance P7 How to order P8 Specifications P8 Dimensions P9 Specific Product Precautions P9 Troubleshooting P10

LV20-OMY0005

No.LV20***-OMY0005 / / / / / / / / LVA/LVC 1 P2 2 P34 3LVC P56 4LVC () P7 5LVA P89 6LVA () P10 7 P11 8 P12 9 P13 1 2 3 4 5 6 7 8 9 10 11 12 13 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020

R R R REGULATOR FOR CHEMICAL LIQUIDS EGULATOR FOR CHEMICAL LIQUIDS EGULATOR FOR CHEMICAL LIQUIDS EGULATOR FOR CHEMICAL LIQUIDS LVR LVR LVR LVR Series Series Series Series

Flow-rate Characteristics P9 6 Specifications P10 7. Dimensions P11 8. Troubleshooting P12 2 Safety Instructions Safety Instructions Safety Instructions Safety Instructions Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These safety instructions are intended to prevent hazardous situations and/or equipment damage.

High Vacuum L Type Valve

Valve size Valve size Material 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043 AS568-045 Standard AS568-233V B2401-V85V Valve seal 1 (2) Special AS568-233 B2401-V85 Valve seal 2 (3) Standard B2401-P8V B2401-P10V Special B2401-P8 B2401-P10 Note 1) Add the seal material symbol shown on page 8 at the end of the model number (in place of ).

XL-OMY0001

AS568-039V AS568-025** AS568-030** AS568-035** AS568-039** B2401-V15V B2401-V24V B2401-P42V AS568-227V 1 B2401-V15** B2401-V24** B2401-P42** AS568-227** B2401-P4V B2401-P5V B2401-P6V B2401-P8V 2 B2401-P4** B2401-P5** B2401-P6** B2401-P8** 63 80 AS568-043V AS568-045V AS568-043** AS568-045** AS568-233V B2401-V85V 1 AS568-233** B2401-V85** B2401-P8V B2401-P10V 2 B2401-P8** B2401-P10

High Vacuum L Type Valve

B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043 AS568-045 Standard AS568-233V B2401-V85V Valve seal 1 (2) Special AS568-233 B2401-V85 Valve seal 2 Standard B2401-P8V B2401-P10V (3) Special B2401-P8 B2401-P10

High Vacuum L Type Valve

B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043 AS568-045 Standard AS568-233V B2401-V85V Valve seal 1 (2) Special AS568-233 B2401-V85 Standard B2401-P8V B2401-P10V Valve seal 2 (3) Special B2401-P8 B2401-P10

XLA Series

** AS568-045 ** AS568-050 ** AS568-167 ** Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Valve seal (2) Specific AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** Note1) List the optional seal material symbol after the model number, except for the standard sealant material (FKM: compound no. 1349-80). e.g) AS568-025-XN1 Note2) Refer to the Chapter 4,Construction and Dimensions(P10

XL-OMY0003

A6063SUS316LSUS304 FKM 245250Hz 30m/s /H4 H5 , 510% 4 XL-OMY0003 O 0.1mm0.2mm O 5 P9 O 6 P10 P13 5 XL-OMY0003 2.2 16 25 40 50 (5150) XLH16-30-1 XLH25-30-1 XLH40-30-1 XLH50-30-1 1FKM:No.1349-80 XLH16-30-1-XN1 / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401-V15V B2401-V24V B2401-P42V AS568-227V B2401-V15

FGE-C

O 1 (O P71) V (V P71) 6/12 FGX-OM-L009-B FGESL Series IN/OUT -0.1MPa (P10) (M12) IN OUT O O V 40 () () () 7/12 FGX-OM-L009-B 1 G1/8 () (R1 R2) IN (Rp1/4) (R3/4) DRAIN OUT (Rp1/4) (R1 R2) (R3/4) 1 1 SUS304 O FGE-OP007 8 NBR FKM O (NBR) (FKM) M10X1.5 1 SUS304 M10 SUS304 SUS304 SUS316WPA FGE-OP005 SUS316 SUS304 SUS304 FGD-OP001 SUS316 FGE-KT001 NBR O FGE-KT002

CG1-OM0227

AF AR 1) 5 2) 3) 5 4 4) 1 ( )ISO VG-32 2-2. 1) 2) 3) 4) 5) 6) 7 8) 9) 10) 3 1) 2) 3) 4) 5 5) (40) 2-3. 1) 2) 1) 1 P10[3. ] () (fR)[N] [mm] 1. 6 (MPa)=(MPa)+{(kg) 2)} X /(mm ,, 2) 3) 4) ( ) 5) 6) 7)()1 1 Nm CG120 1.5 1.52.2 CG125 2.9 2.53.5 CG132 2.9 6.08.6 CG140 4.9 10.814.6 CG150 11.8 1925 CG163 24.5 3040 CG180 24.5 --CG1100 42.2 --8) 9) 10) 11) 12) 7

2 PORT SOLENOID VALVE FOR DUST COLLECTOR

Trouble shooting -P10 7. Disassembly / Assembly Procedure -P11 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

LOCK UP VALVE 3-PORTS

Spare Parts List 290301 Diaphragm Assy NBR 1 Part number Part name Material Quantity 29038 Diaphragm NBR 1 29063#1 Valve NBR 1 JIS B 2401, P3 O ring NBR 2 JIS B 2401, P7 O ring NBR 1 JIS B 2401, P10 O ring NBR 1 JIS B 2401, P34 O ring NBR 1 -9- #1 -9-10-10- Revision A Format change and content review B Drawing update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249