Electric Actuator

Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.

High Vacuum Angle Valve

Refer to maintenance parts 7-1 7-2 8 9 Refer to part no.

Aluminum High Vacuum Angle Valve

Refer to maintenance parts 7-1 7-2 8 9 Refer to part no.

Mechanically Jointed Rodless Cylinders

7 !8 q r y !0 @8 @7 !4 !9 !1 @0 @2 @5 o @4 !

XL

(actuation port [2]-(7) is released) Conversely, by applying pressure to actuation port [2]-(7), the piston (8), sealed by the cylinder seal (13) and the piston seal (9), is operated closing the valve (15) which is sealed by the valve seal (14).

High Vacuum Angle Valve, XL Series

(actuation port [2]-(7) is released) Conversely, by applying pressure to actuation port [2]-(7), the piston (8), sealed by the cylinder seal (13) and the piston seal (9), is operated closing the valve (15) which is sealed by the valve seal (14).

Multi-Axis Step Motor Controller

(Refer to page 12.) 7 4-Axis Step Motor Controller (Parallel I/O/ Type) JXC73/83/93 Series JXC92 JXC73/83/93 How to Order Parallel I/O (JXC73/83) JXC 7 3 2 Controller I/O type I/O cable, mounting Symbol I/O cable Mounting 1 1.5 m Screw mounting 2 1.5 m DIN rail 3 3 m Screw mounting 4 3 m DIN rail 5 5 m Screw mounting 6 5 m DIN rail 7 None Screw mounting 8 None DIN rail Symbol I/O type 7

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Environment

(The lock cable is included when the motor with lock option is selected.) *7 Standard cable entry is (A) Axis side. i Cable length [m]*5, *8 o Driver type*5 25A25ANil Without cable 2 2 5 5 A 10 Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to

Mechanically Jointed Rodless Cylinder Series MY1

$ 7 9m. & -. : 0 ) $ # & !9m1max & 9 &0.08 M1+ !# m M1 max -$! -. $ 7 9M1. & -;:!. : M1 & m1 g X & < & -;:!.

MY1

7 !

MXW

For details, refer to page 8-30-31. 8-7-22

Electric Actuator

Note 7) For an actuator with lock, add the power consumption for the lock.

Title not found

2 1-3/16 1-1/4 1-7/16 1-3/4 1-7/8 2 2-1/4 2-1/2 10 1-3/8 1-7/16 1-5/8 1-7/8 2 2-1/8 2-7/16 2-3/4 15 1-1/16 1-3/4 1-7/8 2-1/8 2-1/4 2-3/8 2-11/16 3 20 2 2 2-1/8 2-3/8 2-1/2 2-5/8 2-7/8 3-1/4 30 2-3/8 2-7/16 2-1/2 2-3/4 2-3/4 2-7/8 3-1/4 3-1/2 40 2-3/4 2-3/4 2-7/8 3 3 3-1/4 3-1/2 3-3/4 50 3-1/8 3-1/8 3-1/4 3-3/8 3-1/2 3-1/2 3-3/4 4 75 3-3/4 3-3/4 3-7/8 4 4 4-1/8 4-3/8 4-1/2 100 4-3/8 4-3/8

Title not found

2 1-3/16 1-1/4 1-7/16 1-3/4 1-7/8 2 2-1/4 2-1/2 10 1-3/8 1-7/16 1-5/8 1-7/8 2 2-1/8 2-7/16 2-3/4 15 1-1/16 1-3/4 1-7/8 2-1/8 2-1/4 2-3/8 2-11/16 3 20 2 2 2-1/8 2-3/8 2-1/2 2-5/8 2-7/8 3-1/4 30 2-3/8 2-7/16 2-1/2 2-3/4 2-3/4 2-7/8 3-1/4 3-1/2 40 2-3/4 2-3/4 2-7/8 3 3 3-1/4 3-1/2 3-3/4 50 3-1/8 3-1/8 3-1/4 3-3/8 3-1/2 3-1/2 3-3/4 4 75 3-3/4 3-3/4 3-7/8 4 4 4-1/8 4-3/8 4-1/2 100 4-3/8 4-3/8

Environment

0 #3 #4 #3 #2 #1 @7 !6 o !7 !8 y t q w e r i u @2 #6 #5 When rod end male thread selected Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

Air Slide Table Series MXW

Use a pipe fitting with 7 mm width across flats or 8 external diameter or less.

MXW Series Long Stroke Slide Table

113 84 187 335 200 275 60 67 MXW25-250 1 640 7 138 109 210 360 225 300 65 80 MXW25-275 1 690 7 163 134 232 395 245 320 60 60 52 MXW25-300 2 740 8 188 159 153 MXW Series Long Stroke Slide Table Auto Switch / Suitable Mounting Position at Stroke End Detection Reed switch: D-A90 (V), D-A93 (V), D-A96 (V) Switch operation range Stroke (mm) Model 25 50 75 100 125 150 175 200 225 250 275 300

CV/MVGQ

7 !8 !

PROFIBUS DP Compatible Fieldbus System

Input area mapping Input data offset (Word) offset (Byte) MSB LSB 7 0 IBn+0 IN7 IN0 IWn+0 IBn+1 IN15 IN8 COM A IBn+2 IN7 IN0 IWn+1 IBn+3 IN15 IN8 COM B IBn+4 IN7 IN0 IWn+2 IBn+5 IN15 IN8 COM C IBn+6 IN7 IN0 IWn+3 IBn+7 IN15 IN8 COM D Output area mapping Output data offset offset (Byte) MSB LSB (Word) 7 0 QBn+0 OUT7 OUT0 QWn+0 QBn+1 OUT15 OUT8 COM A QBn+2 OUT7 OUT0 QWn+1 QBn+3 OUT15 OUT8 COM