Auto Switch Guide

Weight (g) D-F7BA D-F7BAV Auto switch model 0.5 Lead wire length (m) 3 50 50 Auto Switch Internal Circuit 5 81 81 Dimensions OUT (+) Brown D-F7BAL 3.2 mounting hole Main circuit of switch Indicator light 15 OUT () Blue Indicator light/Display method Most sensitive position Operating range D-F7BAVL 3.2 mounting hole Indication Green Red Red 8 Indicator light 15 Optimum operating position

Display Pressure: 7 (0.7MPa), Connection Thread: 02M (R 1/4, M5 Female)

Display Pressure: 10 (1.0MPa), Connection Thread: 02M (R 1/4, M5 Female)

Display Pressure: 4 (0.4MPa), Connection Thread: 02M (R 1/4, M5 Female)

Display Pressure: 2 (0.2MPa), Connection Thread: 02M (R 1/4, M5 Female)

Type: Other Pressure Gauge / Peripheral Accessories, Maximum Indicated Pressure(Mpa): 0.2, Outer Diameter(φ): 42.5, Shape: Back side thread, Maximum Indicated Pressure: 0.2 MPa, Connection screw: R 1/4, Option: With M5 (female thread), Size: 42.5, Transparent cover material: Polycarbonate (Hard coated), Attachment: Without cover ring assembly, Unit Specifications: MPa

Type: Other Pressure Gauge / Peripheral Accessories, Maximum Indicated Pressure(Mpa): 0.4, Outer Diameter(φ): 42.5, Shape: Back side thread, Maximum Indicated Pressure: 0.4 MPa, Connection screw: R 1/4, Option: With M5 (female thread), Size: 42.5, Transparent cover material: Polycarbonate (Hard coated), Attachment: Without cover ring assembly, Unit Specifications: MPa

Type: Other Pressure Gauge / Peripheral Accessories, Maximum Indicated Pressure(Mpa): 1, Outer Diameter(φ): 42.5, Shape: Back side thread, Maximum Indicated Pressure: 1.0 MPa, Connection screw: R 1/4, Option: With M5 (female thread), Size: 42.5, Transparent cover material: Polycarbonate (Hard coated), Attachment: Without cover ring assembly, Unit Specifications: MPa

Display Pressure: 0.7MPa, Connection Thread: R 1/4, M5 Female, Attachment: -

Aluminum High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

Nozzle Type Ionizer

Compressed air for assisting Compressed air for transferring ions Compressed air External air inlet External air Compressed air Long range static neutralization High flow rate nozzle Improved dust removal performance Ionized air Long range static neutralization: Max. 500 mm Offset voltage: 15 V Compressed air for assisting Compressed air for

CATALOG

5, 10, 15, 20, 25, 30 30 25 5, 10, 15, 20, 25, 30, 40 60 32 5, 10, 15, 20, 25, 30, 40 60 40 5, 10, 15, 20, 25, 30, 40 60 Courtesy of Steven Engineering, Inc. !

A

5, 10, 15, 20, 25, 30 30 25 5, 10, 15, 20, 25, 30, 40 60 32 5, 10, 15, 20, 25, 30, 40 60 40 5, 10, 15, 20, 25, 30, 40 60 Courtesy of Steven Engineering, Inc. !

EX500-GPR1A.eng

. : EX500-AP Power supply connector Power supply connector 3 4 5 2 3 4 5 2 1 1 14 15 Cable connection For wiring with solenoid valves or input devices, connect the branch cable with M12 connector to communication ports A D. There are two types of cables different in connector shape ---straight type and angle type.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

Electric Actuator

Cable length (L)[m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 3 5 8 A B C 1.5 3 5 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 10 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 15 20 Actuator side Controller side (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

Mechanically Jointed Rodless Cylinder Series MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1B MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 MY1M 115 38 15 120 48 14 140 60 19 180 72 21 MY1C 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 MY1H 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1HT 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1W 150 50 50 130 60 16 The above values

Pin Cylinders Series CJP2/CJP

5 10 15 4 6 10 15 10 12 19 27 11.5 13.9 22 31 Variation Action Mounting Note 2) Bore size (mm) Mounting Series Bore size (mm) Standard stroke (mm) 5, 10, 15 (20) Note 1) Series Action Standard stroke (mm) 5, 10, 15 5, 10, 15 5, 10, 15 5, 10, 15 4 6 10 16 4 6 10 15 Basic Flange Foot Clevis Trunnion Panel mount type, Embedded type Single acting, Spring return Double acting, Single rod 5, 10

MY1

MY1M/M2 MY1M/M3 MY1M/M1 16 20 25 32 40 50 63 3.0 1.0 MX 2.1 7 6.0 18 200 5.2 1.7 3 10.4 10 26 40 50 20 MTS 9.0 2.4 4.5 15 15 38 MY1M 15 5.0 6.6 23 30 57 100 30 24 MY 8.0 10 33 59 84 10 38 15 14 48 115 120 20 60 CY 19 21 The above values are the maximum allowable values for moment and load.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

15 18.3 15 6 6 9 9 With air cushion Air cushion type is not available for 21-/22-CJ2.