Element Type: Step Type, Element Size: 500mm, Seal Material: FKM, Filtration: 5µm (Cylindrical, Step Type, Option: G [Gauge (G46-15-02M, Wetted Part: Brass)]

Element Type: Step Type, Element Size: 250mm, Seal Material: FKM, Filtration: 5µm (Cylindrical, Step Type, Option: G [Gauge (G46-15-02M, Wetted Part: Brass)]

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 15 (1.5MPa), Connection Thread: 02M (R 1/4, M5 Female)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 15 (1.5MPa), Connection Thread: 01 (R 1/8)

Table of Contents

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

Vacuum Pad

P.49 Features 2 : Series ZP3 (: Series ZP2 C: Series ZP Vacuum Pads Series ZP3/ZP2/ZP Pad Diameter List New New Pad type Symbol 0.8 1.1 1.5 2 3 3.5 4 5 6 7 8 9 10 11 13 14 15 Note) C ( C U C C C C ( Note) Note) Note) Note) Note) Note) Note) Note) MU ( ( ( ( ( ( ( ( Flat Note) Note) Note) EU ( ( ( ( ( Note) AU ( ( ( ( ( Flat with rib C C C ( ( ( Flat with groove UM Thin flat UT C C ( (

V

-02 10 1.9 34 0.5 0.4 0.9 0.7 0.02 0.7 0.5 3/8 VXD2130-03 10 2.4 43 0.5 0.4 0.9 0.7 0.02 1 1 3/8 VXD2140-03 15 4.5 80 1.5 0.7 0.7 1 1 0.02 0.02 0.5 1/2 VXD2130-04 10 2.4 43 0.5 0.4 0.9 0.7 0.02 1 1 1/2 VXD2140-04 15 5.5 100 0.7 0.7 1 1 0.02 1 1 3/4 VXD2150-06 20 9.5 170 0.7 0.7 1 1 T E C H N I C A L SPECIFICATIONS E N E R G I Z E D C L O S E D T Y P E S E R I E S VXD 1MPa = 145PSI Minimum

Series SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

VFS

head cap screw: M4 x 53 (AXT335-37-1) 3 8 Rc Common Common 1 3 8 Rc 15 Rc , Rc 1 4 3 8 15 stations Base model Model Applicable valve model Pilot exhaust Pilot common EXH Gasket VFS320-02 03 31 VFS330-02 03 Type 30 Type 20 Note) Also VFS320 is possible to manifold.

Compact 5-Port Solenoid Valve

2 stations Double wiring1 Symbol Stations Note 02 2 stations Double wiring1 Symbol Type Page F D-sub connector (25 pins) Symbol Type 1 Upward 2 Downward 15 15 stations 02 2 stations Specified layout2 11 11 stations 02 2 stations Specified layout2 IP40 FW IP67 FC IP20 P Flat ribbon cable 26 pins PG 20 pins PH 10 pins PC Flat ribbon cable Compact type (Up to 30 solenoids available) (Up to

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note 2) ( ): Denotes without sub-plate. 10-SV3000 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Weight (g) Note 2) Flow rate characteristics Note 1) Port Valve model Actuation type M12 waterproof connector (Cable length 300 mm) size C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv Single 250 (121) 4.1 0.41 1.1 4.1 0.29 1.0 2 position Double 253 (124) 10-SV300--02 Closed center 3.0 0.43 0.80 2.6 0.41 0.72

SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

48 L plug connector (L): 10-SYJ74M-L01 02 M plug connector (M): 10-SYJ74M-M01 02 DIN terminal (D): 10-SYJ74M-D01 02 M8 connector (WO): 10-SYJ74M-WO01 02 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 89.6 MAX.10 58[65] 91.5 84 42.6 62.5 72.7 M8 x 1 45 69.1[76.1] Approx. 300 (Lead wire length) 80.6[82.8] Pg7 90.6 70.8[73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48 48 48 12

ZP

With adapter 2 to 8 w q ZPT 02 U N A5 e Vacuum inlet (Male thread) Width across flats E C A5 M5 x 0.8 A6 M6 x 1 D Model A 15.5 A B2 C D E Vacuum inlet direction q Pad dia.

CG5-S

A A A A A A 10 Formic acid (25%, Room temperature) C C C C B D 11 Organic solvent Citric acid A B C C D A 12 Acetic acid (10%, Room temperature) B B A A C C 13 Lactic acid (5%, 20C) A B A B D A 14 Linseed oil A C C B A A 15 Polassium chloride A A A A C B 16 Calcium chloride A A A A A B 17 Other (oil, gas, etc.)

Table of Contents

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

VQZ1000/2000/3000

15 Body Ported Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ3000 2 position single Grommet (G): VQZ3120 1(R)-G-C6/C/C10/02 300 (Lead wire length) 19 95 58 24.5 mounting hole 24.4 9 9 R3 A 2 28.5 SMC VQC 4 13 18 20 4 Cover diameter 1.6 Cross section 0.34 mm2 B 38 2-C6, C8, C10, 02 38 SQ 23.4 mounting hole Manual override C6: One-touch fitting for 6 46.5 M5 x 0.8 external pilot

2/3 Port Valve

Insulation Electrical entry Options 1 (100V) 2 (200V) 3 (110V) 4 (220V) 7 (240V) 8 (48V) 5 (24V) 6 (12V) Class B Class H G S L, Z S L, Z 1 (2mm) 2 (3mm) 3 (4.5mm) 4 (6mm) C D, T G, C S T (1) VX22 VX23 VX21 01 ( ) 02 ( ) 02 ( ) 03 ( ) 02 ( ) 03 ( ) 1 8 1 4 1 4 1 4 38 AC 38 Ordering Example (Example) Series VX22, Orifice size 4.5mm, Rc(PT)1/4, 100V AC conduit (Part number) VX2232-02