Large Size Vacuum Module: Series ZR

Combination Symbol: K2 Combination Symbol: C2 Feature: Single solenoid valve is provided for supply valve. Feature: Adsorption of workpieces and release of vacuum are switched by external pilot valve.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] JXC-C2-1 160 JXC-C2-3 300 JXC-C2-5 480 DIN rail L For 3 Axes For 4 Axes 5.25 12.5 (Pitch) JXC92 JXC73/83/93 7.5 AXT100 DR * For , enter a number from the No. line in the table below.

ZR

(VJ3133) Air operated VJA3130 0.245 0.213 0.194 0.187 0.174 0.184 0.214 K2 K3 C1 C2 C3 C4 Weight includes Bracket B. (Solenoid valve: 24 VDC, M plug connector type) Air operated VJA3130 N.C. (VJ3133) N.C. (VJ3133) Double SOL. (VJ3233-X18) How to Order Refer to page 13-3-34 for further part no. information.

3 Port Solenoid Valve

(Double) Port size C2, C4 (2, 4 one-touch fitting) Mass (g) 31 40 V110-C2/C4 Flow Characteristics Flow characteristics Port size 2a, 2b 1(P)2a/2b C [dm3/(sbar)] C [dm3/(sbar)] 2a/2b3(E) 1(P) b b C2 C4 0.03 0.03 0.22 0.19 0.05 0.05 0.31 0.29 C6 The effective area S (mm2) is approximately 5 times as large as the sonic conductance (S C x 5). 2 3 Port Solenoid Valve Series VV100 Construction

Fieldbus System

/N.O.) u Coil type C2 C3 C4 C6 C8 Standard With power saving circuit (Continuous duty type) Nil T P P P Be sure to select the power saving circuit type when a valve is continuously energized for long periods of time. Note the specified energizing time when power saving circuit is selected.

Rotary Actuator/Vane Style Series CRB1

Applicable shaft types: J, K, T C1 = C (mm) D1 L1 max X (mm) D1 = Shaft type Y L2 max D2 Size J K T J K T J K T Size C1 Y = C2 L2 = 50 50 3 to 11.9 X 3 4 to 39.5 4 to 39.5 Y 3 3 to 11.9 63 63 3 to 14.9 X 3 4 to 45 4 to 45 Y 3 3 to 14.9 L1 = D2 = C2 = C X = 80 80 3 to 16.9 X 3 4 to 53.5 4 to 53.5 Y 3 3 to 16.9 100 100 3 to 24.9 X 4 5 to 65 5 to 65 Y 4 3 to 24.9 134 Series CRB1 Rotary Actuator

Dual Rod Cylinder Series CXSJ/CXS

D-M9AL Bore size (mm) D A B C 6 10 15 20 25 32 19.5 0.5 7.5 11.5 A C 29.5 3 17.5 9 35.5 10 23.5 2 Electrical entry direction: Inward Electrical entry direction: Outward 43 13 31 5 44 15 32 7 53 15.5 41 7.5 Auto switch mounting dimensions (mm) CXSJ6,10 C3 10 Bore size B1 Symbol Auto switch model C2 D2 6 1 1 2 5.5 4 8 6 D1 D-A9 D-M9, D-M9W D-M9AL A1 B1 B1 C1, D1 C2, C3, D2 C1, D1 C2, C3, D2

Title not found

Slim line coupler not shown 5/8 27/32 1 1 C6 C2-SL C2 C4 C8 C6 C3 C1 C5 C2 1/2 C7 C3 1/2 Reducing Couplings not shown Note not shown not shown 1 1/8 7/16 Dia. 3/8 Dia. Typ. 3/8 Dia. 5/16 Dia. Typ. 1/4 Dia.

Compact Type

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

17

G Za2 D2 Ea Ea Eb Eb 4-MM E1 E1 E2 E2 C2 P Q2 Section Za2 detail (Adjustable range) B2 F2 D G Section Z detail (Adjustable range) F B3 B2 B1 C1 Zb2 JJ B F Z H K2 Counter bore depth H H L Thread length A2 Section Za2 detail (Adjustable range) A A 2 x 2 x LD J C Mounting direction (1) Mounting direction (2) C2 (mm) (mm) Adjustable range Applicable cylinder MY1B25 MY1B32 MY1B40 Mounting direction

Compact Type Dual-Rod Cylinder Series CXSJ

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

CXS

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

CXS

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

Body Class: 4 (Class 4, Orifice ø12), Valve Type: 2 (Double Acting), Port Size: 04 (1/2), Thread: R, Rc, Material: C (Body: PFA, Endplate: PPS, Diaphragm: PTFE), Option: 2 (By-pass)

Body Class: Class 4, Orifice ø12, Valve Type: Double Acting, Port Size: 1/2, Thread: R, Rc, Material: Body: PFA, Endplate: PPS, Diaphragm: PTFE, Option: By-pass, Specification: -, Z: -

Type: [Fitting] One-Touch Coupling, Fitting Type: Other shapes, Tube Size 1(φ): 4, Application: Standard/Mini, Shape: [Others] Multi-Connector, Compatible Fluid: Air, Tube Material: Soft Nylon / Polyurethane, Number of Connection Tubes(piece): 12, Connector Type: -, Options: Cover, both sides, 2 pcs.

XL

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

C2 PSE56 0 01 Option Port size 01 02 C01 N01 N02 A2 B2 R 1/8 (with M5 female thread) R 1/4 (with M5 female thread) Rc 1/8 NPT 1/8 (with M5 female thread) NPT 1/4 (with M5 female thread) URJ 1/4 TSJ 1/4 Note Description Part no. Connector for pressure sensor controller ZS-28-C 1 pc. Output specifications Adapter with throttle Rc 1/4 ZS-31-X175 1 pc.

Electric Actuator

Select D for the vacuum port for suction of 50 L/min (ANR) or more. ( Cable length Note 3) I/O connector 0 Cable type Note 1) Note 2) + Driver type Nil S R Nil 2 5 A Nil H Without connector Without cable Standard cable Robotic cable (Flexible cable) Without cable 2 m 5 m 10 m Power supply voltage (V) Compatible drivers 25 32 Size 40 ) ) ) ) ) ) ) ) ) With connector Nil A1 A2 B1 B2 C1 C2

Mechanically Jointed Rodless Cylinders

Application Application Mounting direction w (to minimize the installation width) Work piece Mounting direction q (to minimize the installation height) Work piece Guide Guide Series MY3 Series MY3 Floating mechanism Bracket Floating mechanism Bracket Mounting Example Mounting Example G G D1 D2 Za2 Za1 Ea Ea Ea Ea C1 C2 K2 (Screw length) B2 F2 B1 F1 K1 (Screw length) Detail drawing of Za2