10

Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T Z2K Z2L Z2M Z2N Z2P Z2Q Z2R Z2S Z2W Z2T Z3A Z3B Z3C Z3D Z3E Z3F Z3G Z3H Z3V Z3J A B C D E F H J K L M N Nil A B C D E F G H K L Z Nil XB A B D E H J L M Nil A B C D E F G H K L Z Nil XB A B C D E F G H J K L M N P Nil A B C D E F G H K L Z Nil XB A B C D E F M N P Q R S T U V W Y Z1A Z1B Z1C Z1U Z1D Z1E Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T

Modular/F.R.L. Units Series AC

F 28 30 36 44 54 E 33 42 44 50 61 D 45 55 58 65 76 C 20 29 39 42 53 B 59 78 107 110 134 AA 34 46 63 67 78 A 40 53 70 75 90 H 45 55 63 69 81 G 22 21 26 Model VHS20 VHS30 VHS40 VHS40-06 VHS50 Caution on Mounting 1.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-F7NTL D-A73C D-A80C D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A9V D-M9V D-F9WV D-F9BAL D-A7/A80 RQ D-P5DWL Bore size (mm) MU U 19.5 22.5 24.5 27.5 31.5 35 41 47.5 57.5 67.5 U 44 50 56.5 66.5 76.5 U 20.5 23.5 25.5 28.5 32.5 36 42 48.5 58.5 68.5 U 26.5 29.5 31.5 34.5 38.5 42 48 54.5 64.5 74.5 U 23 26 28 31 35 38.5 44.5 51 61 71 U 26 29 31 34 38 41.5 47.5 54 64 74 U 22 25 27 30 34 37.5 43.5 50

Free Mount Cylinder Series CU

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

One-touch Fittings

D P [mm] M L2 A L1 2 x N Q Q D 2 x O d Applicable fitting size d Different Diameter Union Y: KQ2U Applicable tubing O.D.

42

U side entry (LU) 15.5 17 22 51 69 83.5 117 U D U D U D 117 83.5 69 51 22 17 15.5 9 9 184.5 (3-position, Metal seal type) 200 (3-position, Metal seal type) 179 (Single, Double, 3-position, Rubber seal type) 194.5 (Single, Double, 3-position, Rubber seal type) 123.3 106 76.5 VFS D side U side D side U side 106 61 9 9 VFR 19 R4.5 R4.5 3/8", 1/2" 4(A), 2(B) port 1/8" External pilot port 68.5

ZP

D. Applicable tube O. D.

MNB

MLGC 100 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5 4 CNG Auto Switch Mounting Height D-Z7/Z-80 D-Y59 D-Y7P D-Y7W D-F5, D-J5 D-F59F D-F5W, D-J59W D-F5BAL, D-F5NTL D-A3 D-G39 D-K39 MNB D-A5 D-A6 D-A59W D-Y69 D-Y7PV D-Y7WV Bore size D-A44 D-Y7BAL D-P5DWL (mm) CNA Ht Hs Ht Hs Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 31 38 23 30 23 26.5 23 25.5 27.5 77 27.5 67 32.5 25 35 24.5 32 CNS 33 42 26 34 26

MNB

switch Auto switch Ht Ht A A 32 B B L 9-6-20 21 Series MNB Cylinder with Lock Double Acting, Single Rod Proper Auto Switch Mounting Position D-F5W D-J59W D-F5 D-J5 D-F5BAL D-F59F D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W, D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 CL 40 1 3.5 1.5

7

11 U E C T A B OUT IN OUT IN M 2 x P Port size J I F L K (D) (mm) Electrical entry Port size P A B C E F I J K L Model Flat terminal Conduit terminal Conduit D M T T U U V T U 55 (61) 99.5 68.5 55 (61) 47.5 61 (67) 23 3/8, 1/2 96.5 (102.5) 25.5 30 4 B VXD2 70 20 11.5 14 50 33 37 28 ( ): Denotes the Normally Open (N.O.) dimensions. 143 VXD Series For Air/Water/Oil 5 C 6 D Dimensions/VXD2 /

MNB

(different sides or same side) 15 25 1 pc. 10 Auto Switches / Proper Mounting Position and Height for Stroke End Detection Reed switch Solid state switch A B Hs A B Hs Ht Ht Auto switch mounting position Auto switch mounting height D-A5 D-A6 D-A59W D-F5, D-J5 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5, D-A6 D-A59W D-F5NTL D-F5W, D-J59W D-F5BAL, D-F5NTL Bore size (mm) Bore size (mm) Hs Ht Ht Hs B

PSxx-OMU0002CN

5) () (01 MPa 0.001 MPa 1/1000) () () F // () -14No.PS-OMU0002CN-D (38L(2 ) 0.50.05 Nm ,, A(ZS-46-A1) 38L A B(ZS-46-A2) 38L B -15No.PS-OMU0002CN-D (a)(a) (b) (ZS-46-B) +(ZS-46-D) () 90 -16No.PS-OMU0002CN-D (-M5) 1/61/4 11.5 Nm (ZS-46-N) -01-N01 23 35 Nm -C4H-C6H-N7H-C4L-C6L-N7L 1/61/4 11.5 Nm -17No.PS-OMU0002CN-D -18No.PS-OMU0002CN-D FG () () No.

SYJ3000/5000/7000

SY100-61-3-05 SY100-61-3-06 SY100-61-2-01 SY100-61-2-02 SY100-61-2-03 SY100-61-2-04 Voltage symbol 24V 12V 100V 200V 110V 220V Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC How to Use DIN Terminal Caution Connection 1. Loosen the holding screw and pull the connector out of the solenoid valve terminal block. 2.

Modular F.R.L. Units

D-G

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

D> Without light SY100-61-1 With light Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Part no.

MXS Series Air Slide Table

45 55 65 75 100 125 150 175 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 MXS25L-10 MXS25L-20 MXS25L-30 MXS25L-40 MXS25L-50 MXS25L-75 MXS25L-100 MXS25L-125 MXS25L-150 162 218 258 72 72 Air Slide Table MXS Series Appropriate mounting position for stroke end detection (mm) Reed switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model Operating range A 10 40 10 75

MXS

102 154 190 KA M 92 92 92 102 115 156 197 255 295 MXS25L-10 MXS25L-20 MXS25L-30 MXS25L-40 MXS25L-50 MXS25L-75 MXS25L-100 MXS25L-125 MXS25L-150 162 218 258 3.11-34 Air Slide Table Series MXS Auto Switch Mounting Position for Stroke End Detection Reed switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model Operating range A 10 20 30 40 75 100 125 150 10 20 30 125 75 100

7.5

side D D D D Max. 14.5 (SJ3000-00-P) (SJ2260) (SJ3260) (SJ2260) SOL.b SOL.b SOL.b SOL.b 15 D side U side (12) (12) (12) (12) With manual operation of the pressure adjustment screw (14) SOL.a (14) SOL.a (14) SOL.a (14) SOL.a 22.5 90.5 22.9 56.2 Note) Reduces supply pressure from the D side of manifold.

Rotary Actuator/Vane Type

The angle is 60 when any of the following are used: D-90/90A/97/93A The angle is 69 when any of the following are used: D-S99(V)/T99(V)/S9P(V) R22.5 20.5 D(26.5: Connector type) Refer to page 61 for details of shaft types J, K, T and Y.

Table of Contents

Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.