VM

D.

3 Port Solenoid Valve Metal Seal Series VZ200 1

) 2-M5 x 0.8 300 300 (Lead wire length) (Lead wire length) 79.9 87.5 Stations n: Stations Formula L1 = 19n + 12 L2 = 19n + 40 2 50 78 3 69 97 4 88 116 5 107 135 6 126 154 7 145 173 8 164 192 9 183 211 10 202 230 Symbol L1 L2 4-15-16 17 3 Port Solenoid Valve Metal Seal, Body Ported/Base Mounted Series VZ400 Dimensions: Common Exhaust Common exhaust: VV3Z4-50 (G) (L) (M) (D) With light/surge

VXP21/22/23

C B f M L K J A e 57 62 67 b 39 45.5 49.5 Q 39 39 41.5 Q 23 23 25.5 N 61 (68) 69 (76) 79 (89) d 47 52 57 a 34 51 58 N 69 (76) 77 (84) 87 (97) N 61 69 79 c 65 78 86 Q R 57 74 81 VXP2142 , 30 30 35 20 20 23 34 43 47 29 37 43 28 35 40 3 8 8 63 80 90 59 59 62 104 (116) 118 (136) 133 (150) 26 32.5 36.5 71 87 97 14 17.5 20 92 92 95 3 8 1 2 3 4 1 VXP2152 VXP2262 VXP2150 VXP2260 ( ): N.O. 17-3-50

Modular Type Air Filter Series AF

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 26 AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (Option) L Bracket (Option) F D M G K K F M J J B E E B H OUT IN C OUT IN H C Port size OUT OUT Port size o s AF10: 25 AF20: 40 Drain A P Min. clearance for maintenance AF30, 40, 40-06 L Bracket (Option) A D G F M K J B E Drain Min. clearance

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

A: Stroke + 97 B: 110 20 0.02 110 110 0.02 A B B A: Stroke + 97 A Positioning hole 2-8H10 4-T-slot Recommended dimension 8 (Refer to JIS B0952.) 80 Long positioning hole 142 Series LJ1 Non-standard Motor Mounting Dimensions Standard/TSUBAKI CABLEVEYOR Specifications Series LJ1H S10 Motor mounting area dimensions Housing 19.2 30 C B Mitsubishi Electric Corporation Yaskawa Electric Corporation

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

CQ2

D-J79W D-F7F D-F7NTL D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V 12 to 25 CU 32 to 50 CQS CQ2 MU D-A9 D-F9 D-A9V D-F9V D-F9WV D-F9W D-F9BAL 32 to 50 Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F7F D-F7NTL D-A7H D-A80H D-A73C D-A80C D-F7 D-J79 D-F7V D-J79C D-F7BAL D-F7W D-F7F D-J79W D-F7WV D-F9W D-F9WV D-F9BAL D-F9WV D-F9W

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-A80C D-J79C D-F79F D-F7NTL D-BAL D-J79 D-F7W D-J79W D-A79W D-F7WV D-F7V D-F7BAVL D-A7 D-A80 D-A7H D-A80H D-F7 12 to 25 32 to 50 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 32 to 50 Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H D-A80H D-A73C D-A80C D-F7 D-F79F D-J79 D-F7V D-J79C D-F7W D-J79W D-F7WV D-F7BAVL D-F7BAL D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL

10

Auto Switch Proper Mounting Height (Standard type) [mm] Auto switch model D-F5l D-J59 D-F59F D-F5lW D-J59W D-F5BA D-F5NT D-Y59l D-Y7P D-Y7lW D-Y7BA D-Z7l D-Z80 D-M9l D-M9lW D-M9lA D-A9l D-A9lV D-M9lV D-M9lWV D-M9lAV D-A5l D-A6l D-A59W D-Y69l D-Y7PV D-Y7lWV D-P3DWA D-P4DW D-G39 D-K39 D-A3l D-A44 Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 27.5 23

CXS

102 107 112 117 122 132 142 147 152 162 CXS25 212 122 127 132 137 142 147 152 157 162 172 182 187 192 202 70 50 40 97 182 92 112 117 122 127 132 142 152 157 162 172 102 107 CXS32 17 Series CXS Auto Switch Proper Mounting Positions for Stroke End Detection Electrical entry direction: Inward Electrical entry direction: Outward D B A C B D-Z7, D-Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL

Mechanically Jointed Rodless Cylinder Series MY1

MY3M MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BAL D-M9V D-M9WV D-M9AVL D-M9 D-M9W D-M9AL D-A9 D-A9V D-Y69/Y7PV D-Y7WV Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 90 74 86 70 86 74 106 90 110 94 94 106 97 123 123 97 118 102 118 102 153 127 127 153 148 132 148 132 182.5 157.5 182.5

Table of Contents

D. Applicable tube O. D.

SX

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 86 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

0.4

or D.

KQ2

M H KK D MS LQ How to Order MQR U01 KQ 2 H 05 T Made to Order Refer to page 97 for details. One-touch fittings Model Port size Applicable tubing O.D.

Series VQ Base Mounted Metal Seal/Rubber Seal

Write sequentially from the 1st station on the D side.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

8 6 D-M9/D-F9W 5 4 D-Z7/Z80 9 9 11 A B D-Y59/Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

Proposals for Energy Saving

Air Preparation Equipment 35 D H2 H1 8.5 A L1 High efficiency nozzle/KNH (mm) Model Nozzle size D Connection size L1 A Width across flats H1 Connection thread 1 1.5 2 R 1/4 R 1/4 R 1/4 14 14 14 52 52 52 46 46 46 KNH-R02-100 KNH-R02-150 KNH-R02-200 D H1 A L1 Low noise nozzle with self-align fitting/KNS (mm) Model Nozzle size D Connection size L1 L2 Width across flats H1 H2 L2 D 0.75

XL

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

High Vacuum Angle Valve, XL Series

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.